APA (7th ed.) Citation

Reinhardt, K. A., & Kern, W. (2018). Handbook of silicon wafer cleaning technology (Third edition.). William Andrew.

Chicago Style (17th ed.) Citation

Reinhardt, Karen A., and Werner Kern. Handbook of Silicon Wafer Cleaning Technology. Third edition. Cambridge, MA: William Andrew, 2018.

MLA (9th ed.) Citation

Reinhardt, Karen A., and Werner Kern. Handbook of Silicon Wafer Cleaning Technology. Third edition. William Andrew, 2018.