Materials and Processes for Next Generation Lithography:
Saved in:
| Other Authors: | , |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Amsterdam, Netherlands
Elsevier
2016
|
| Series: | Frontiers of nanoscience
v. 11 |
| Subjects: | |
| Online Access: | FLA01 UER01 Volltext |
| Physical Description: | 1 online resource |
| ISBN: | 9780081003589 0081003587 |
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| id | DE-604.BV046127032 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T08:35:55Z |
| institution | BVB |
| isbn | 9780081003589 0081003587 |
| language | English |
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| publishDate | 2016 |
| publishDateSearch | 2016 |
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| publisher | Elsevier |
| record_format | marc |
| series2 | Frontiers of nanoscience |
| spelling | Materials and Processes for Next Generation Lithography Amsterdam, Netherlands Elsevier 2016 1 online resource txt rdacontent c rdamedia cr rdacarrier Frontiers of nanoscience v. 11 TECHNOLOGY & ENGINEERING / Mechanical bisacsh Microlithography fast Photoresists fast Microlithography Photoresists Robinson, Alex edt Lawson, Richard edt Erscheint auch als Druck-Ausgabe 0081003544 Erscheint auch als Druck-Ausgabe 9780081003541 http://www.sciencedirect.com/science/bookseries/18762778/11 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Materials and Processes for Next Generation Lithography TECHNOLOGY & ENGINEERING / Mechanical bisacsh Microlithography fast Photoresists fast Microlithography Photoresists |
| title | Materials and Processes for Next Generation Lithography |
| title_auth | Materials and Processes for Next Generation Lithography |
| title_exact_search | Materials and Processes for Next Generation Lithography |
| title_full | Materials and Processes for Next Generation Lithography |
| title_fullStr | Materials and Processes for Next Generation Lithography |
| title_full_unstemmed | Materials and Processes for Next Generation Lithography |
| title_short | Materials and Processes for Next Generation Lithography |
| title_sort | materials and processes for next generation lithography |
| topic | TECHNOLOGY & ENGINEERING / Mechanical bisacsh Microlithography fast Photoresists fast Microlithography Photoresists |
| topic_facet | TECHNOLOGY & ENGINEERING / Mechanical Microlithography Photoresists |
| url | http://www.sciencedirect.com/science/bookseries/18762778/11 |
| work_keys_str_mv | AT robinsonalex materialsandprocessesfornextgenerationlithography AT lawsonrichard materialsandprocessesfornextgenerationlithography |