Smart sensors and MEMS: intelligent devices and microsystems for industrial applications
Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion...
Gespeichert in:
| Weitere Verfasser: | , |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Oxford, UK
Woodhead Publishing
2013
|
| Schriftenreihe: | Woodhead Publishing series in electronic and optical materials
51 |
| Schlagworte: | |
| Online-Zugang: | FLA01 Volltext |
| Zusammenfassung: | Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion and memory functions. Part one outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, and advanced optical incremental sensors (encoders and interferometers), among other topics. The second part of the book describes the industrial applications of smart micro-electro-mechanical systems (MEMS). Some of the topics covered in this section include microfabrication technologies used for creating smart devices for industrial applications, microactuators, dynamic behaviour of smart MEMS in industrial applications, MEMS integrating motion and displacement sensors, MEMS print heads for industrial printing, Photovoltaic and fuel cells in power MEMS for smart energy management, and radio frequency (RF)-MEMS for smart communication microsystems. Smart sensors and MEMS is invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry, and engineers looking for industrial sensing, monitoring and automation solutions. Outlines industrial applications for smart sensors and smart MEMSCovers smart sensors including capacitive, inductive, resistive and magnetic sensors and sensors to detect radiation and measure temperatureCovers smart MEMS including power MEMS, radio frequency MEMS, optical MEMS, inertial MEMS, and microreaction chambers |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | 1 online resource illustrations |
| ISBN: | 9780857099297 0857099299 1306540933 9781306540933 0857095021 9780857095022 |
Internformat
MARC
| LEADER | 00000nmm a2200000zcb4500 | ||
|---|---|---|---|
| 001 | BV046126540 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 190827s2013 |||| o||u| ||||||eng d | ||
| 020 | |a 9780857099297 |9 978-0-85709-929-7 | ||
| 020 | |a 0857099299 |9 0-85709-929-9 | ||
| 020 | |a 1306540933 |9 1-306-54093-3 | ||
| 020 | |a 9781306540933 |9 978-1-306-54093-3 | ||
| 020 | |a 0857095021 |9 0-85709-502-1 | ||
| 020 | |a 9780857095022 |9 978-0-85709-502-2 | ||
| 035 | |a (ZDB-33-ESD)ocn874966039 | ||
| 035 | |a (OCoLC)874966039 | ||
| 035 | |a (DE-599)BVBBV046126540 | ||
| 040 | |a DE-604 |b ger |e rda | ||
| 041 | 0 | |a eng | |
| 082 | 0 | |a 681.2 |2 23 | |
| 245 | 1 | 0 | |a Smart sensors and MEMS |b intelligent devices and microsystems for industrial applications |c edited by Stoyan Nihtianov and Antonio Luque |
| 246 | 1 | 3 | |a Smart sensors and microelectromechanical systems |
| 264 | 1 | |a Oxford, UK |b Woodhead Publishing |c 2013 | |
| 300 | |a 1 online resource |b illustrations | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 0 | |a Woodhead Publishing series in electronic and optical materials |v 51 | |
| 500 | |a Includes bibliographical references and index | ||
| 520 | |a Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion and memory functions. Part one outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, and advanced optical incremental sensors (encoders and interferometers), among other topics. The second part of the book describes the industrial applications of smart micro-electro-mechanical systems (MEMS). Some of the topics covered in this section include microfabrication technologies used for creating smart devices for industrial applications, microactuators, dynamic behaviour of smart MEMS in industrial applications, MEMS integrating motion and displacement sensors, MEMS print heads for industrial printing, Photovoltaic and fuel cells in power MEMS for smart energy management, and radio frequency (RF)-MEMS for smart communication microsystems. Smart sensors and MEMS is invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry, and engineers looking for industrial sensing, monitoring and automation solutions. Outlines industrial applications for smart sensors and smart MEMSCovers smart sensors including capacitive, inductive, resistive and magnetic sensors and sensors to detect radiation and measure temperatureCovers smart MEMS including power MEMS, radio frequency MEMS, optical MEMS, inertial MEMS, and microreaction chambers | ||
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades |2 bisacsh | |
| 650 | 7 | |a Detectors / Industrial applications |2 fast | |
| 650 | 4 | |a Detectors |x Industrial applications | |
| 650 | 4 | |a Microelectromechanical systems |x Industrial applications | |
| 650 | 0 | 7 | |a MEMS |0 (DE-588)4824724-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Intelligenter Sensor |0 (DE-588)4293453-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |2 gnd |9 rswk-swf |
| 655 | 7 | |8 1\p |0 (DE-588)4143413-4 |a Aufsatzsammlung |2 gnd-content | |
| 689 | 0 | 0 | |a Intelligenter Sensor |0 (DE-588)4293453-9 |D s |
| 689 | 0 | 1 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |D s |
| 689 | 0 | 2 | |a MEMS |0 (DE-588)4824724-8 |D s |
| 689 | 0 | |8 2\p |5 DE-604 | |
| 700 | 1 | |a Nihtianov, S. |4 edt | |
| 700 | 1 | |a Luque, A. |4 edt | |
| 856 | 4 | 0 | |u http://www.sciencedirect.com/science/book/9780857095022 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
| 912 | |a ZDB-33-ESD | ||
| 999 | |a oai:aleph.bib-bvb.de:BVB01-031506994 | ||
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 883 | 1 | |8 2\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 966 | e | |u http://www.sciencedirect.com/science/book/9780857095022 |l FLA01 |p ZDB-33-ESD |q FLA_PDA_ESD |x Verlag |3 Volltext | |
Datensatz im Suchindex
| _version_ | 1804180446726062080 |
|---|---|
| any_adam_object | |
| author2 | Nihtianov, S. Luque, A. |
| author2_role | edt edt |
| author2_variant | s n sn a l al |
| author_facet | Nihtianov, S. Luque, A. |
| building | Verbundindex |
| bvnumber | BV046126540 |
| collection | ZDB-33-ESD |
| ctrlnum | (ZDB-33-ESD)ocn874966039 (OCoLC)874966039 (DE-599)BVBBV046126540 |
| dewey-full | 681.2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 681 - Precision instruments and other devices |
| dewey-raw | 681.2 |
| dewey-search | 681.2 |
| dewey-sort | 3681.2 |
| dewey-tens | 680 - Manufacture of products for specific uses |
| discipline | Handwerk und Gewerbe / Verschiedene Technologien |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>04451nmm a2200589zcb4500</leader><controlfield tag="001">BV046126540</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">190827s2013 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780857099297</subfield><subfield code="9">978-0-85709-929-7</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0857099299</subfield><subfield code="9">0-85709-929-9</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1306540933</subfield><subfield code="9">1-306-54093-3</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781306540933</subfield><subfield code="9">978-1-306-54093-3</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0857095021</subfield><subfield code="9">0-85709-502-1</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780857095022</subfield><subfield code="9">978-0-85709-502-2</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-33-ESD)ocn874966039</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)874966039</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV046126540</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">681.2</subfield><subfield code="2">23</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Smart sensors and MEMS</subfield><subfield code="b">intelligent devices and microsystems for industrial applications</subfield><subfield code="c">edited by Stoyan Nihtianov and Antonio Luque</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">Smart sensors and microelectromechanical systems</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Oxford, UK</subfield><subfield code="b">Woodhead Publishing</subfield><subfield code="c">2013</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 online resource</subfield><subfield code="b">illustrations</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Woodhead Publishing series in electronic and optical materials</subfield><subfield code="v">51</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion and memory functions. Part one outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, and advanced optical incremental sensors (encoders and interferometers), among other topics. The second part of the book describes the industrial applications of smart micro-electro-mechanical systems (MEMS). Some of the topics covered in this section include microfabrication technologies used for creating smart devices for industrial applications, microactuators, dynamic behaviour of smart MEMS in industrial applications, MEMS integrating motion and displacement sensors, MEMS print heads for industrial printing, Photovoltaic and fuel cells in power MEMS for smart energy management, and radio frequency (RF)-MEMS for smart communication microsystems. Smart sensors and MEMS is invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry, and engineers looking for industrial sensing, monitoring and automation solutions. Outlines industrial applications for smart sensors and smart MEMSCovers smart sensors including capacitive, inductive, resistive and magnetic sensors and sensors to detect radiation and measure temperatureCovers smart MEMS including power MEMS, radio frequency MEMS, optical MEMS, inertial MEMS, and microreaction chambers</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Detectors / Industrial applications</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Detectors</subfield><subfield code="x">Industrial applications</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectromechanical systems</subfield><subfield code="x">Industrial applications</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Intelligenter Sensor</subfield><subfield code="0">(DE-588)4293453-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikrosystemtechnik</subfield><subfield code="0">(DE-588)4221617-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="8">1\p</subfield><subfield code="0">(DE-588)4143413-4</subfield><subfield code="a">Aufsatzsammlung</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Intelligenter Sensor</subfield><subfield code="0">(DE-588)4293453-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Mikrosystemtechnik</subfield><subfield code="0">(DE-588)4221617-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">MEMS</subfield><subfield code="0">(DE-588)4824724-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="8">2\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Nihtianov, S.</subfield><subfield code="4">edt</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Luque, A.</subfield><subfield code="4">edt</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://www.sciencedirect.com/science/book/9780857095022</subfield><subfield code="x">Verlag</subfield><subfield code="z">URL des Erstveröffentlichers</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-ESD</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-031506994</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">2\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://www.sciencedirect.com/science/book/9780857095022</subfield><subfield code="l">FLA01</subfield><subfield code="p">ZDB-33-ESD</subfield><subfield code="q">FLA_PDA_ESD</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| genre | 1\p (DE-588)4143413-4 Aufsatzsammlung gnd-content |
| genre_facet | Aufsatzsammlung |
| id | DE-604.BV046126540 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T08:35:54Z |
| institution | BVB |
| isbn | 9780857099297 0857099299 1306540933 9781306540933 0857095021 9780857095022 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-031506994 |
| oclc_num | 874966039 |
| open_access_boolean | |
| physical | 1 online resource illustrations |
| psigel | ZDB-33-ESD ZDB-33-ESD FLA_PDA_ESD |
| publishDate | 2013 |
| publishDateSearch | 2013 |
| publishDateSort | 2013 |
| publisher | Woodhead Publishing |
| record_format | marc |
| series2 | Woodhead Publishing series in electronic and optical materials |
| spelling | Smart sensors and MEMS intelligent devices and microsystems for industrial applications edited by Stoyan Nihtianov and Antonio Luque Smart sensors and microelectromechanical systems Oxford, UK Woodhead Publishing 2013 1 online resource illustrations txt rdacontent c rdamedia cr rdacarrier Woodhead Publishing series in electronic and optical materials 51 Includes bibliographical references and index Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion and memory functions. Part one outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, and advanced optical incremental sensors (encoders and interferometers), among other topics. The second part of the book describes the industrial applications of smart micro-electro-mechanical systems (MEMS). Some of the topics covered in this section include microfabrication technologies used for creating smart devices for industrial applications, microactuators, dynamic behaviour of smart MEMS in industrial applications, MEMS integrating motion and displacement sensors, MEMS print heads for industrial printing, Photovoltaic and fuel cells in power MEMS for smart energy management, and radio frequency (RF)-MEMS for smart communication microsystems. Smart sensors and MEMS is invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry, and engineers looking for industrial sensing, monitoring and automation solutions. Outlines industrial applications for smart sensors and smart MEMSCovers smart sensors including capacitive, inductive, resistive and magnetic sensors and sensors to detect radiation and measure temperatureCovers smart MEMS including power MEMS, radio frequency MEMS, optical MEMS, inertial MEMS, and microreaction chambers TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades bisacsh Detectors / Industrial applications fast Detectors Industrial applications Microelectromechanical systems Industrial applications MEMS (DE-588)4824724-8 gnd rswk-swf Intelligenter Sensor (DE-588)4293453-9 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf 1\p (DE-588)4143413-4 Aufsatzsammlung gnd-content Intelligenter Sensor (DE-588)4293453-9 s Mikrosystemtechnik (DE-588)4221617-5 s MEMS (DE-588)4824724-8 s 2\p DE-604 Nihtianov, S. edt Luque, A. edt http://www.sciencedirect.com/science/book/9780857095022 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Smart sensors and MEMS intelligent devices and microsystems for industrial applications TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades bisacsh Detectors / Industrial applications fast Detectors Industrial applications Microelectromechanical systems Industrial applications MEMS (DE-588)4824724-8 gnd Intelligenter Sensor (DE-588)4293453-9 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| subject_GND | (DE-588)4824724-8 (DE-588)4293453-9 (DE-588)4221617-5 (DE-588)4143413-4 |
| title | Smart sensors and MEMS intelligent devices and microsystems for industrial applications |
| title_alt | Smart sensors and microelectromechanical systems |
| title_auth | Smart sensors and MEMS intelligent devices and microsystems for industrial applications |
| title_exact_search | Smart sensors and MEMS intelligent devices and microsystems for industrial applications |
| title_full | Smart sensors and MEMS intelligent devices and microsystems for industrial applications edited by Stoyan Nihtianov and Antonio Luque |
| title_fullStr | Smart sensors and MEMS intelligent devices and microsystems for industrial applications edited by Stoyan Nihtianov and Antonio Luque |
| title_full_unstemmed | Smart sensors and MEMS intelligent devices and microsystems for industrial applications edited by Stoyan Nihtianov and Antonio Luque |
| title_short | Smart sensors and MEMS |
| title_sort | smart sensors and mems intelligent devices and microsystems for industrial applications |
| title_sub | intelligent devices and microsystems for industrial applications |
| topic | TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades bisacsh Detectors / Industrial applications fast Detectors Industrial applications Microelectromechanical systems Industrial applications MEMS (DE-588)4824724-8 gnd Intelligenter Sensor (DE-588)4293453-9 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| topic_facet | TECHNOLOGY & ENGINEERING / Technical & Manufacturing Industries & Trades Detectors / Industrial applications Detectors Industrial applications Microelectromechanical systems Industrial applications MEMS Intelligenter Sensor Mikrosystemtechnik Aufsatzsammlung |
| url | http://www.sciencedirect.com/science/book/9780857095022 |
| work_keys_str_mv | AT nihtianovs smartsensorsandmemsintelligentdevicesandmicrosystemsforindustrialapplications AT luquea smartsensorsandmemsintelligentdevicesandmicrosystemsforindustrialapplications AT nihtianovs smartsensorsandmicroelectromechanicalsystems AT luquea smartsensorsandmicroelectromechanicalsystems |