Nanolithography: the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems
Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Emerging technologies are described, including the directed assembly of wafer features, nanostructures and devi...
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| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Oxford
Woodhead Publishing
2014
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| Schriftenreihe: | Woodhead Publishing series in electronic and optical materials
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| Schlagworte: | |
| Online-Zugang: | FLA01 Volltext |
| Zusammenfassung: | Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Emerging technologies are described, including the directed assembly of wafer features, nanostructures and devices, nano-photonics, and nano-fluidics. The goal of this book is to give enough background information to enable researchers to understand and appreciate new developments in nanolithography, and to go on to make advances of his/her own. Topics include: current state of the art in alternative nanolithography technologies in order to cope with the future reduction in size of semiconductor chips to nanoscale dimensions; lithographic techniques, including optical projection, extreme ultraviolet (EUV), nanoimprint, electron beam and ion beam lithography; emerging applications of nanolithography in nanoelectronics, nanophotonics and microfluidics. -- |
| Beschreibung: | Previously issued in print: 2013 Includes bibliographical references and index |
| Beschreibung: | 1 online resource (pages cm) |
| ISBN: | 9780857098757 0857098756 |
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| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381531 |
| dewey-search | 621.381531 |
| dewey-sort | 3621.381531 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| id | DE-604.BV046126459 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T08:35:54Z |
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| isbn | 9780857098757 0857098756 |
| language | English |
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| spelling | Nanolithography the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems edited by Martin Feldman Oxford Woodhead Publishing 2014 1 online resource (pages cm) txt rdacontent c rdamedia cr rdacarrier Woodhead Publishing series in electronic and optical materials Previously issued in print: 2013 Includes bibliographical references and index Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Emerging technologies are described, including the directed assembly of wafer features, nanostructures and devices, nano-photonics, and nano-fluidics. The goal of this book is to give enough background information to enable researchers to understand and appreciate new developments in nanolithography, and to go on to make advances of his/her own. Topics include: current state of the art in alternative nanolithography technologies in order to cope with the future reduction in size of semiconductor chips to nanoscale dimensions; lithographic techniques, including optical projection, extreme ultraviolet (EUV), nanoimprint, electron beam and ion beam lithography; emerging applications of nanolithography in nanoelectronics, nanophotonics and microfluidics. -- Nanolithography fast Nanolithography Nanolithografie (DE-588)4706129-7 gnd rswk-swf Nanolithografie (DE-588)4706129-7 s 1\p DE-604 Feldman, Martin edt Erscheint auch als Druck-Ausgabe 9780857095008 http://www.sciencedirect.com/science/book/9780857095008 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Nanolithography the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems Nanolithography fast Nanolithography Nanolithografie (DE-588)4706129-7 gnd |
| subject_GND | (DE-588)4706129-7 |
| title | Nanolithography the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems |
| title_auth | Nanolithography the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems |
| title_exact_search | Nanolithography the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems |
| title_full | Nanolithography the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems edited by Martin Feldman |
| title_fullStr | Nanolithography the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems edited by Martin Feldman |
| title_full_unstemmed | Nanolithography the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems edited by Martin Feldman |
| title_short | Nanolithography |
| title_sort | nanolithography the art of fabricating nanoelectronics nanophotonics and nanobiology devices and systems |
| title_sub | the art of fabricating nanoelectronics, nanophotonics and nanobiology devices and systems |
| topic | Nanolithography fast Nanolithography Nanolithografie (DE-588)4706129-7 gnd |
| topic_facet | Nanolithography Nanolithografie |
| url | http://www.sciencedirect.com/science/book/9780857095008 |
| work_keys_str_mv | AT feldmanmartin nanolithographytheartoffabricatingnanoelectronicsnanophotonicsandnanobiologydevicesandsystems |