APA (7th ed.) Citation

(2012). Handbook of sputter deposition technology: Fundamentals and applications for functional thin films, nano-materials and MEMS (2nd ed.). William Andrew.

Chicago Style (17th ed.) Citation

Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-materials and MEMS. 2nd ed. Waltham, MA: William Andrew, 2012.

MLA (9th ed.) Citation

Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-materials and MEMS. 2nd ed. William Andrew, 2012.