Handbook of sputter deposition technology: fundamentals and applications for functional thin films, nano-materials and MEMS
This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, d...
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Waltham, MA
William Andrew
© 2012
|
| Ausgabe: | 2nd ed |
| Schlagworte: | |
| Online-Zugang: | FLA01 URL des Erstveröffentlichers |
| Zusammenfassung: | This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS. Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available. All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique. 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere |
| Beschreibung: | Title from publisher's Web site; (ScienceDirect; viewed on Oct. 25, 2012) Includes bibliographical references and index |
| Beschreibung: | 1 online resource |
| ISBN: | 9781437734843 1437734847 |
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| 500 | |a Includes bibliographical references and index | ||
| 520 | |a This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS. Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available. All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique. 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere | ||
| 650 | 7 | |a Cathode sputtering (Plating process) |2 fast | |
| 650 | 7 | |a Thin films |2 fast | |
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| discipline | Werkstoffwissenschaften / Fertigungstechnik |
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| illustrated | Not Illustrated |
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| spelling | Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS Hideaki Adachi [and others] ; edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera 2nd ed Waltham, MA William Andrew © 2012 1 online resource txt rdacontent c rdamedia cr rdacarrier Title from publisher's Web site; (ScienceDirect; viewed on Oct. 25, 2012) Includes bibliographical references and index This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS. Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available. All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique. 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere Cathode sputtering (Plating process) fast Thin films fast Cathode sputtering (Plating process) Handbooks, manuals, etc Thin films Handbooks, manuals, etc Adachi, Hideaki Sonstige oth Wasa, Kiyotaka Sonstige oth Kanno, Isaku Sonstige oth Kotera, Hidetoshi Sonstige oth Erscheint auch als Druck-Ausgabe 1437734839 Erscheint auch als Druck-Ausgabe 9781437734836 http://www.sciencedirect.com/science/book/9781437734836 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS Cathode sputtering (Plating process) fast Thin films fast Cathode sputtering (Plating process) Handbooks, manuals, etc Thin films Handbooks, manuals, etc |
| title | Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS |
| title_auth | Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS |
| title_exact_search | Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS |
| title_full | Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS Hideaki Adachi [and others] ; edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera |
| title_fullStr | Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS Hideaki Adachi [and others] ; edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera |
| title_full_unstemmed | Handbook of sputter deposition technology fundamentals and applications for functional thin films, nano-materials and MEMS Hideaki Adachi [and others] ; edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera |
| title_short | Handbook of sputter deposition technology |
| title_sort | handbook of sputter deposition technology fundamentals and applications for functional thin films nano materials and mems |
| title_sub | fundamentals and applications for functional thin films, nano-materials and MEMS |
| topic | Cathode sputtering (Plating process) fast Thin films fast Cathode sputtering (Plating process) Handbooks, manuals, etc Thin films Handbooks, manuals, etc |
| topic_facet | Cathode sputtering (Plating process) Thin films Cathode sputtering (Plating process) Handbooks, manuals, etc Thin films Handbooks, manuals, etc |
| url | http://www.sciencedirect.com/science/book/9781437734836 |
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