Developments in surface contamination and cleaning, Volume three, Methods for removal of particle contaminants:
The contributions in this volume cover methods for removal of particle contaminants on surfaces. Several of these methods are well established and have been employed in industrial applications for a long time. However, the ever- higher demand for removal of smaller particles on newer substrate mater...
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Amsterdam Boston
Elsevier
© 2011
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| Schlagworte: | |
| Online-Zugang: | FLA01 Volltext |
| Zusammenfassung: | The contributions in this volume cover methods for removal of particle contaminants on surfaces. Several of these methods are well established and have been employed in industrial applications for a long time. However, the ever- higher demand for removal of smaller particles on newer substrate materials is driving continuous development of the established cleaning methods and alternative innovative methods for particle removal. This book provides information on the latest developments in this topic area. The purpose of the Developments in Surface Contamination and Cleaning series is to provide a state-of-the-art guide to the current knowledge of the behaviour of film-type and particulate surface contaminants, and cleaning methods. Each title has a particular topical focus, covering the key techniques and recent developments in the area. Taken as a whole, the series forms a unique reference for professionals and academics working in the area of surface contamination and cleaning. A strong theme running through the series is that of surface contamination and cleaning at the micro and nano scales. Covers the latest techniques in areas such as removal of nanoparticles, especially important in the semiconductor industry, disk drives and microelectronics. The series as a whole represents the definitive reference on Surface Contamination and Cleaning An essential reference for industries where cleaning is critical: electronics, optics, pharmaceutical manufacturing, etc |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | 1 online resource (xiii, 243 pages) |
| ISBN: | 9781437778854 1437778852 |
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| illustrated | Not Illustrated |
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| spelling | Developments in surface contamination and cleaning, Volume three, Methods for removal of particle contaminants edited by Rajiv Kohli and K.L. Mittal Methods for removal of particle contaminants Amsterdam Boston Elsevier © 2011 1 online resource (xiii, 243 pages) txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references and index The contributions in this volume cover methods for removal of particle contaminants on surfaces. Several of these methods are well established and have been employed in industrial applications for a long time. However, the ever- higher demand for removal of smaller particles on newer substrate materials is driving continuous development of the established cleaning methods and alternative innovative methods for particle removal. This book provides information on the latest developments in this topic area. The purpose of the Developments in Surface Contamination and Cleaning series is to provide a state-of-the-art guide to the current knowledge of the behaviour of film-type and particulate surface contaminants, and cleaning methods. Each title has a particular topical focus, covering the key techniques and recent developments in the area. Taken as a whole, the series forms a unique reference for professionals and academics working in the area of surface contamination and cleaning. A strong theme running through the series is that of surface contamination and cleaning at the micro and nano scales. Covers the latest techniques in areas such as removal of nanoparticles, especially important in the semiconductor industry, disk drives and microelectronics. The series as a whole represents the definitive reference on Surface Contamination and Cleaning An essential reference for industries where cleaning is critical: electronics, optics, pharmaceutical manufacturing, etc Surface contamination fast Surfaces (Technology) Cleaning Surface contamination Oberfläche (DE-588)4042907-6 gnd rswk-swf Teilchen (DE-588)4059317-4 gnd rswk-swf Kontamination (DE-588)4032272-5 gnd rswk-swf Beschichtung (DE-588)4144863-7 gnd rswk-swf Reinigungsverfahren (DE-588)4391913-3 gnd rswk-swf Oberfläche (DE-588)4042907-6 s Beschichtung (DE-588)4144863-7 s Kontamination (DE-588)4032272-5 s Reinigungsverfahren (DE-588)4391913-3 s Teilchen (DE-588)4059317-4 s DE-604 Kohli, Rajiv 1947- Sonstige oth Mittal, K. L. 1945- Sonstige oth http://www.sciencedirect.com/science/book/9781437778854 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Developments in surface contamination and cleaning, Volume three, Methods for removal of particle contaminants Surface contamination fast Surfaces (Technology) Cleaning Surface contamination Oberfläche (DE-588)4042907-6 gnd Teilchen (DE-588)4059317-4 gnd Kontamination (DE-588)4032272-5 gnd Beschichtung (DE-588)4144863-7 gnd Reinigungsverfahren (DE-588)4391913-3 gnd |
| subject_GND | (DE-588)4042907-6 (DE-588)4059317-4 (DE-588)4032272-5 (DE-588)4144863-7 (DE-588)4391913-3 |
| title | Developments in surface contamination and cleaning, Volume three, Methods for removal of particle contaminants |
| title_alt | Methods for removal of particle contaminants |
| title_auth | Developments in surface contamination and cleaning, Volume three, Methods for removal of particle contaminants |
| title_exact_search | Developments in surface contamination and cleaning, Volume three, Methods for removal of particle contaminants |
| title_full | Developments in surface contamination and cleaning, Volume three, Methods for removal of particle contaminants edited by Rajiv Kohli and K.L. Mittal |
| title_fullStr | Developments in surface contamination and cleaning, Volume three, Methods for removal of particle contaminants edited by Rajiv Kohli and K.L. Mittal |
| title_full_unstemmed | Developments in surface contamination and cleaning, Volume three, Methods for removal of particle contaminants edited by Rajiv Kohli and K.L. Mittal |
| title_short | Developments in surface contamination and cleaning, Volume three, Methods for removal of particle contaminants |
| title_sort | developments in surface contamination and cleaning volume three methods for removal of particle contaminants |
| topic | Surface contamination fast Surfaces (Technology) Cleaning Surface contamination Oberfläche (DE-588)4042907-6 gnd Teilchen (DE-588)4059317-4 gnd Kontamination (DE-588)4032272-5 gnd Beschichtung (DE-588)4144863-7 gnd Reinigungsverfahren (DE-588)4391913-3 gnd |
| topic_facet | Surface contamination Surfaces (Technology) Cleaning Oberfläche Teilchen Kontamination Beschichtung Reinigungsverfahren |
| url | http://www.sciencedirect.com/science/book/9781437778854 |
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