Thin film materials technology: sputtering of compound materials
An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key techn...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Norwich, NY Heidelberg
William Andrew Pub. Springer
© 2004
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| Schlagworte: | |
| Online-Zugang: | FLA01 URL des Erstveröffentlichers |
| Zusammenfassung: | An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | 1 online resource (xiv, 518 pages) illustrations |
| ISBN: | 0815514832 9780815514831 9783540211181 3540211187 9780815519317 0815519311 1282027662 9781282027664 |
Internformat
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| 100 | 1 | |a Wasa, Kiyotaka |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Thin film materials technology |b sputtering of compound materials |c by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi |
| 264 | 1 | |a Norwich, NY |a Heidelberg |b William Andrew Pub. |b Springer |c © 2004 | |
| 300 | |a 1 online resource (xiv, 518 pages) |b illustrations | ||
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| 338 | |b cr |2 rdacarrier | ||
| 500 | |a Includes bibliographical references and index | ||
| 520 | |a An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering | ||
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Solid State |2 bisacsh | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Electronics / Semiconductors |2 bisacsh | |
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| 650 | 7 | |a Thin films |2 fast | |
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Datensatz im Suchindex
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| author | Wasa, Kiyotaka |
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| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| illustrated | Illustrated |
| indexdate | 2024-07-10T08:35:51Z |
| institution | BVB |
| isbn | 0815514832 9780815514831 9783540211181 3540211187 9780815519317 0815519311 1282027662 9781282027664 |
| language | English |
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| spelling | Wasa, Kiyotaka Verfasser aut Thin film materials technology sputtering of compound materials by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi Norwich, NY Heidelberg William Andrew Pub. Springer © 2004 1 online resource (xiv, 518 pages) illustrations txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references and index An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh Cathode sputtering (Plating process) fast Thin films fast Cathode sputtering (Plating process) Thin films Sputtern (DE-588)4182614-0 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 s Sputtern (DE-588)4182614-0 s 1\p DE-604 Kitabatake, Makoto Sonstige oth Adachi, Hideaki Sonstige oth http://www.sciencedirect.com/science/book/9780815514831 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Wasa, Kiyotaka Thin film materials technology sputtering of compound materials TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh Cathode sputtering (Plating process) fast Thin films fast Cathode sputtering (Plating process) Thin films Sputtern (DE-588)4182614-0 gnd Dünnschichttechnik (DE-588)4136339-5 gnd |
| subject_GND | (DE-588)4182614-0 (DE-588)4136339-5 |
| title | Thin film materials technology sputtering of compound materials |
| title_auth | Thin film materials technology sputtering of compound materials |
| title_exact_search | Thin film materials technology sputtering of compound materials |
| title_full | Thin film materials technology sputtering of compound materials by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi |
| title_fullStr | Thin film materials technology sputtering of compound materials by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi |
| title_full_unstemmed | Thin film materials technology sputtering of compound materials by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi |
| title_short | Thin film materials technology |
| title_sort | thin film materials technology sputtering of compound materials |
| title_sub | sputtering of compound materials |
| topic | TECHNOLOGY & ENGINEERING / Electronics / Solid State bisacsh TECHNOLOGY & ENGINEERING / Electronics / Semiconductors bisacsh Cathode sputtering (Plating process) fast Thin films fast Cathode sputtering (Plating process) Thin films Sputtern (DE-588)4182614-0 gnd Dünnschichttechnik (DE-588)4136339-5 gnd |
| topic_facet | TECHNOLOGY & ENGINEERING / Electronics / Solid State TECHNOLOGY & ENGINEERING / Electronics / Semiconductors Cathode sputtering (Plating process) Thin films Sputtern Dünnschichttechnik |
| url | http://www.sciencedirect.com/science/book/9780815514831 |
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