Handbook of ellipsometry:
The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated c...
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| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Norwich, NY Heidelberg, Germany
William Andrew Pub. Springer
© 2005
|
| Schlagworte: | |
| Online-Zugang: | FLA01 Volltext |
| Zusammenfassung: | The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | 1 online resource (xvi, 870 pages) illustrations |
| ISBN: | 0815514999 9780815514992 3540222936 9783540222934 1591248493 9781591248491 9780815517467 0815517467 |
Internformat
MARC
| LEADER | 00000nmm a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV046124909 | ||
| 003 | DE-604 | ||
| 005 | 20200131 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 190827s2005 |||| o||u| ||||||eng d | ||
| 020 | |a 0815514999 |9 0-8155-1499-9 | ||
| 020 | |a 9780815514992 |9 978-0-8155-1499-2 | ||
| 020 | |a 3540222936 |9 3-540-22293-6 | ||
| 020 | |a 9783540222934 |9 978-3-540-22293-4 | ||
| 020 | |a 1591248493 |9 1-59124-849-3 | ||
| 020 | |a 9781591248491 |9 978-1-59124-849-1 | ||
| 020 | |a 9780815517467 |9 978-0-8155-1746-7 | ||
| 020 | |a 0815517467 |9 0-8155-1746-7 | ||
| 035 | |a (ZDB-33-ESD)ocn310147997 | ||
| 035 | |a (OCoLC)310147997 | ||
| 035 | |a (DE-599)BVBBV046124909 | ||
| 040 | |a DE-604 |b ger |e rda | ||
| 041 | 0 | |a eng | |
| 082 | 0 | |a 620.1/1295 |2 22 | |
| 245 | 1 | 0 | |a Handbook of ellipsometry |c edited by Harland G. Tompkins and Eugene A. Irene |
| 264 | 1 | |a Norwich, NY |a Heidelberg, Germany |b William Andrew Pub. |b Springer |c © 2005 | |
| 300 | |a 1 online resource (xvi, 870 pages) |b illustrations | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 500 | |a Includes bibliographical references and index | ||
| 520 | |a The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry | ||
| 650 | 7 | |a SCIENCE / Nanoscience |2 bisacsh | |
| 650 | 7 | |a Ellipsometry |2 fast | |
| 650 | 4 | |a Ellipsometry | |
| 650 | 0 | 7 | |a Ellipsometrie |0 (DE-588)4152025-7 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Ellipsometrie |0 (DE-588)4152025-7 |D s |
| 689 | 0 | |8 1\p |5 DE-604 | |
| 700 | 1 | |a Tompkins, Harland G. |d 1938- |e Sonstige |0 (DE-588)129994987 |4 oth | |
| 700 | 1 | |a Irene, Eugene A. |e Sonstige |4 oth | |
| 856 | 4 | 0 | |u http://www.sciencedirect.com/science/book/9780815514992 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
| 912 | |a ZDB-33-ESD | ||
| 999 | |a oai:aleph.bib-bvb.de:BVB01-031505363 | ||
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 966 | e | |u http://www.sciencedirect.com/science/book/9780815514992 |l FLA01 |p ZDB-33-ESD |q FLA_PDA_ESD |x Verlag |3 Volltext | |
Datensatz im Suchindex
| _version_ | 1804180443408367616 |
|---|---|
| any_adam_object | |
| author_GND | (DE-588)129994987 |
| building | Verbundindex |
| bvnumber | BV046124909 |
| collection | ZDB-33-ESD |
| ctrlnum | (ZDB-33-ESD)ocn310147997 (OCoLC)310147997 (DE-599)BVBBV046124909 |
| dewey-full | 620.1/1295 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620.1/1295 |
| dewey-search | 620.1/1295 |
| dewey-sort | 3620.1 41295 |
| dewey-tens | 620 - Engineering and allied operations |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>03116nmm a2200505zc 4500</leader><controlfield tag="001">BV046124909</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20200131 </controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">190827s2005 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0815514999</subfield><subfield code="9">0-8155-1499-9</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780815514992</subfield><subfield code="9">978-0-8155-1499-2</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3540222936</subfield><subfield code="9">3-540-22293-6</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783540222934</subfield><subfield code="9">978-3-540-22293-4</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1591248493</subfield><subfield code="9">1-59124-849-3</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781591248491</subfield><subfield code="9">978-1-59124-849-1</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780815517467</subfield><subfield code="9">978-0-8155-1746-7</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0815517467</subfield><subfield code="9">0-8155-1746-7</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-33-ESD)ocn310147997</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)310147997</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV046124909</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">620.1/1295</subfield><subfield code="2">22</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Handbook of ellipsometry</subfield><subfield code="c">edited by Harland G. Tompkins and Eugene A. Irene</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Norwich, NY</subfield><subfield code="a">Heidelberg, Germany</subfield><subfield code="b">William Andrew Pub.</subfield><subfield code="b">Springer</subfield><subfield code="c">© 2005</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 online resource (xvi, 870 pages)</subfield><subfield code="b">illustrations</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">SCIENCE / Nanoscience</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Ellipsometry</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Ellipsometry</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ellipsometrie</subfield><subfield code="0">(DE-588)4152025-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Ellipsometrie</subfield><subfield code="0">(DE-588)4152025-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Tompkins, Harland G.</subfield><subfield code="d">1938-</subfield><subfield code="e">Sonstige</subfield><subfield code="0">(DE-588)129994987</subfield><subfield code="4">oth</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Irene, Eugene A.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://www.sciencedirect.com/science/book/9780815514992</subfield><subfield code="x">Verlag</subfield><subfield code="z">URL des Erstveröffentlichers</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-ESD</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-031505363</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://www.sciencedirect.com/science/book/9780815514992</subfield><subfield code="l">FLA01</subfield><subfield code="p">ZDB-33-ESD</subfield><subfield code="q">FLA_PDA_ESD</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| id | DE-604.BV046124909 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T08:35:51Z |
| institution | BVB |
| isbn | 0815514999 9780815514992 3540222936 9783540222934 1591248493 9781591248491 9780815517467 0815517467 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-031505363 |
| oclc_num | 310147997 |
| open_access_boolean | |
| physical | 1 online resource (xvi, 870 pages) illustrations |
| psigel | ZDB-33-ESD ZDB-33-ESD FLA_PDA_ESD |
| publishDate | 2005 |
| publishDateSearch | 2005 |
| publishDateSort | 2005 |
| publisher | William Andrew Pub. Springer |
| record_format | marc |
| spelling | Handbook of ellipsometry edited by Harland G. Tompkins and Eugene A. Irene Norwich, NY Heidelberg, Germany William Andrew Pub. Springer © 2005 1 online resource (xvi, 870 pages) illustrations txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references and index The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry SCIENCE / Nanoscience bisacsh Ellipsometry fast Ellipsometry Ellipsometrie (DE-588)4152025-7 gnd rswk-swf Ellipsometrie (DE-588)4152025-7 s 1\p DE-604 Tompkins, Harland G. 1938- Sonstige (DE-588)129994987 oth Irene, Eugene A. Sonstige oth http://www.sciencedirect.com/science/book/9780815514992 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Handbook of ellipsometry SCIENCE / Nanoscience bisacsh Ellipsometry fast Ellipsometry Ellipsometrie (DE-588)4152025-7 gnd |
| subject_GND | (DE-588)4152025-7 |
| title | Handbook of ellipsometry |
| title_auth | Handbook of ellipsometry |
| title_exact_search | Handbook of ellipsometry |
| title_full | Handbook of ellipsometry edited by Harland G. Tompkins and Eugene A. Irene |
| title_fullStr | Handbook of ellipsometry edited by Harland G. Tompkins and Eugene A. Irene |
| title_full_unstemmed | Handbook of ellipsometry edited by Harland G. Tompkins and Eugene A. Irene |
| title_short | Handbook of ellipsometry |
| title_sort | handbook of ellipsometry |
| topic | SCIENCE / Nanoscience bisacsh Ellipsometry fast Ellipsometry Ellipsometrie (DE-588)4152025-7 gnd |
| topic_facet | SCIENCE / Nanoscience Ellipsometry Ellipsometrie |
| url | http://www.sciencedirect.com/science/book/9780815514992 |
| work_keys_str_mv | AT tompkinsharlandg handbookofellipsometry AT ireneeugenea handbookofellipsometry |