Handbook of chemical vapor depostion [i.e. deposition] (CVD): principles, technology, and applications
Turn to this new second edition for an understanding of the latest advances in the chemical vapor deposition (CVD) process. CVD technology has recently grown at a rapid rate, and the number and scope of its applications and their impact on the market have increased considerably. The market is now es...
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| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Norwich, N.Y.
Noyes Publications/William Andrew Pub.
© 1999
|
| Edition: | 2nd ed |
| Series: | Materials science and process technology series
|
| Subjects: | |
| Online Access: | FLA01 Volltext |
| Summary: | Turn to this new second edition for an understanding of the latest advances in the chemical vapor deposition (CVD) process. CVD technology has recently grown at a rapid rate, and the number and scope of its applications and their impact on the market have increased considerably. The market is now estimated to be at least double that of a mere seven years ago when the first edition of this book was published. The second edition is an update with a considerably expanded and revised scope. Plasma CVD and metallo-organic CVD are two major factors in this rapid growth. Readers will find the latest data on both processes in this volume. Likewise, the book explains the growing importance of CVD in production of semiconductor and related applications |
| Item Description: | Includes bibliographical references and index Paralleltitel: Handbook of chemical vapor deposition |
| Physical Description: | 1 online resource (xxiv, 482 pages) illustrations |
| ISBN: | 9780815514329 0815514328 1591240301 9781591240303 |
Staff View
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| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 671 - Metalworking & primary metal products |
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| discipline | Werkstoffwissenschaften / Fertigungstechnik |
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| id | DE-604.BV046124907 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T08:35:50Z |
| institution | BVB |
| isbn | 9780815514329 0815514328 1591240301 9781591240303 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-031505361 |
| oclc_num | 281602520 |
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| physical | 1 online resource (xxiv, 482 pages) illustrations |
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| publishDate | 1999 |
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| series2 | Materials science and process technology series |
| spelling | Pierson, Hugh O. Verfasser aut Handbook of chemical vapor depostion [i.e. deposition] (CVD) principles, technology, and applications by Hugh O. Pierson Handbook of chemical vapor deposition 2nd ed Norwich, N.Y. Noyes Publications/William Andrew Pub. © 1999 1 online resource (xxiv, 482 pages) illustrations txt rdacontent c rdamedia cr rdacarrier Materials science and process technology series Includes bibliographical references and index Paralleltitel: Handbook of chemical vapor deposition Turn to this new second edition for an understanding of the latest advances in the chemical vapor deposition (CVD) process. CVD technology has recently grown at a rapid rate, and the number and scope of its applications and their impact on the market have increased considerably. The market is now estimated to be at least double that of a mere seven years ago when the first edition of this book was published. The second edition is an update with a considerably expanded and revised scope. Plasma CVD and metallo-organic CVD are two major factors in this rapid growth. Readers will find the latest data on both processes in this volume. Likewise, the book explains the growing importance of CVD in production of semiconductor and related applications Dépôt chimique en phase vapeur / Guides, manuels, etc Dépôt en phase vapeur / Guides, manuels, etc Chemical vapor deposition fast Vapor-plating fast Chemical vapor deposition Handbooks, manuals, etc Vapor-plating Handbooks, manuals, etc Pierson, Hugh O. Sonstige oth http://www.sciencedirect.com/science/book/9780815514329 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Pierson, Hugh O. Handbook of chemical vapor depostion [i.e. deposition] (CVD) principles, technology, and applications Dépôt chimique en phase vapeur / Guides, manuels, etc Dépôt en phase vapeur / Guides, manuels, etc Chemical vapor deposition fast Vapor-plating fast Chemical vapor deposition Handbooks, manuals, etc Vapor-plating Handbooks, manuals, etc |
| title | Handbook of chemical vapor depostion [i.e. deposition] (CVD) principles, technology, and applications |
| title_alt | Handbook of chemical vapor deposition |
| title_auth | Handbook of chemical vapor depostion [i.e. deposition] (CVD) principles, technology, and applications |
| title_exact_search | Handbook of chemical vapor depostion [i.e. deposition] (CVD) principles, technology, and applications |
| title_full | Handbook of chemical vapor depostion [i.e. deposition] (CVD) principles, technology, and applications by Hugh O. Pierson |
| title_fullStr | Handbook of chemical vapor depostion [i.e. deposition] (CVD) principles, technology, and applications by Hugh O. Pierson |
| title_full_unstemmed | Handbook of chemical vapor depostion [i.e. deposition] (CVD) principles, technology, and applications by Hugh O. Pierson |
| title_short | Handbook of chemical vapor depostion [i.e. deposition] (CVD) |
| title_sort | handbook of chemical vapor depostion i e deposition cvd principles technology and applications |
| title_sub | principles, technology, and applications |
| topic | Dépôt chimique en phase vapeur / Guides, manuels, etc Dépôt en phase vapeur / Guides, manuels, etc Chemical vapor deposition fast Vapor-plating fast Chemical vapor deposition Handbooks, manuals, etc Vapor-plating Handbooks, manuals, etc |
| topic_facet | Dépôt chimique en phase vapeur / Guides, manuels, etc Dépôt en phase vapeur / Guides, manuels, etc Chemical vapor deposition Vapor-plating Chemical vapor deposition Handbooks, manuals, etc Vapor-plating Handbooks, manuals, etc |
| url | http://www.sciencedirect.com/science/book/9780815514329 |
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