Mattox, D. M. (1998). Handbook of physical vapor deposition (PVD) processing: Film formation, adhesion, surface preparation and contamination control. Noyes Publications.
Chicago-Zitierstil (17. Ausg.)Mattox, D. M. Handbook of Physical Vapor Deposition (PVD) Processing: Film Formation, Adhesion, Surface Preparation and Contamination Control. Westwood, N.J: Noyes Publications, 1998.
MLA-Zitierstil (9. Ausg.)Mattox, D. M. Handbook of Physical Vapor Deposition (PVD) Processing: Film Formation, Adhesion, Surface Preparation and Contamination Control. Noyes Publications, 1998.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.