Handbook of physical vapor deposition (PVD) processing: film formation, adhesion, surface preparation and contamination control
Covers aspects of the Physical Vapor Deposition process technology from characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. Includes subjects such as substrate characterization, adhesion, cleaning, and processin...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Westwood, N.J.
Noyes Publications
© 1998
|
| Schriftenreihe: | Knovel Library
|
| Schlagworte: | |
| Online-Zugang: | FLA01 Volltext |
| Zusammenfassung: | Covers aspects of the Physical Vapor Deposition process technology from characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. Includes subjects such as substrate characterization, adhesion, cleaning, and processing. Also covers the more widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | 1 online resource (xxvii, 917 pages) illustrations |
| ISBN: | 1591240794 9781591240792 9780815514220 0815514220 |
Internformat
MARC
| LEADER | 00000nmm a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV046124831 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 190827s1998 |||| o||u| ||||||eng d | ||
| 020 | |a 1591240794 |9 1-59124-079-4 | ||
| 020 | |a 9781591240792 |9 978-1-59124-079-2 | ||
| 020 | |a 9780815514220 |9 978-0-8155-1422-0 | ||
| 020 | |a 0815514220 |9 0-8155-1422-0 | ||
| 035 | |a (ZDB-33-ESD)ocm49708622 | ||
| 035 | |a (OCoLC)49708622 | ||
| 035 | |a (DE-599)BVBBV046124831 | ||
| 040 | |a DE-604 |b ger |e rda | ||
| 041 | 0 | |a eng | |
| 082 | 0 | |a 671.7/35021 |2 22 | |
| 100 | 1 | |a Mattox, D. M. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Handbook of physical vapor deposition (PVD) processing |b film formation, adhesion, surface preparation and contamination control |c byDonald M. Mattox |
| 264 | 1 | |a Westwood, N.J. |b Noyes Publications |c © 1998 | |
| 300 | |a 1 online resource (xxvii, 917 pages) |b illustrations | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 0 | |a Knovel Library | |
| 500 | |a Includes bibliographical references and index | ||
| 520 | |a Covers aspects of the Physical Vapor Deposition process technology from characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. Includes subjects such as substrate characterization, adhesion, cleaning, and processing. Also covers the more widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes | ||
| 546 | |a English | ||
| 650 | 7 | |a Vapor-plating |2 fast | |
| 650 | 7 | |a Galvanoplastia |2 larpcal | |
| 650 | 7 | |a Manuais |2 larpcal | |
| 650 | 4 | |a Vapor-plating |v Handbooks, manuals, etc | |
| 650 | 0 | 7 | |a PVD-Verfahren |0 (DE-588)4115673-0 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a PVD-Verfahren |0 (DE-588)4115673-0 |D s |
| 689 | 0 | |8 1\p |5 DE-604 | |
| 856 | 4 | 0 | |u http://www.sciencedirect.com/science/book/9780815514220 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
| 912 | |a ZDB-33-ESD | ||
| 999 | |a oai:aleph.bib-bvb.de:BVB01-031505284 | ||
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 966 | e | |u http://www.sciencedirect.com/science/book/9780815514220 |l FLA01 |p ZDB-33-ESD |q FLA_PDA_ESD |x Verlag |3 Volltext | |
Datensatz im Suchindex
| _version_ | 1804180443248984064 |
|---|---|
| any_adam_object | |
| author | Mattox, D. M. |
| author_facet | Mattox, D. M. |
| author_role | aut |
| author_sort | Mattox, D. M. |
| author_variant | d m m dm dmm |
| building | Verbundindex |
| bvnumber | BV046124831 |
| collection | ZDB-33-ESD |
| ctrlnum | (ZDB-33-ESD)ocm49708622 (OCoLC)49708622 (DE-599)BVBBV046124831 |
| dewey-full | 671.7/35021 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 671 - Metalworking & primary metal products |
| dewey-raw | 671.7/35021 |
| dewey-search | 671.7/35021 |
| dewey-sort | 3671.7 535021 |
| dewey-tens | 670 - Manufacturing |
| discipline | Werkstoffwissenschaften / Fertigungstechnik |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02262nmm a2200481zc 4500</leader><controlfield tag="001">BV046124831</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">190827s1998 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1591240794</subfield><subfield code="9">1-59124-079-4</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781591240792</subfield><subfield code="9">978-1-59124-079-2</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780815514220</subfield><subfield code="9">978-0-8155-1422-0</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0815514220</subfield><subfield code="9">0-8155-1422-0</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-33-ESD)ocm49708622</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)49708622</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV046124831</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">671.7/35021</subfield><subfield code="2">22</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Mattox, D. M.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Handbook of physical vapor deposition (PVD) processing</subfield><subfield code="b">film formation, adhesion, surface preparation and contamination control</subfield><subfield code="c">byDonald M. Mattox</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Westwood, N.J.</subfield><subfield code="b">Noyes Publications</subfield><subfield code="c">© 1998</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 online resource (xxvii, 917 pages)</subfield><subfield code="b">illustrations</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Knovel Library</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Covers aspects of the Physical Vapor Deposition process technology from characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. Includes subjects such as substrate characterization, adhesion, cleaning, and processing. Also covers the more widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes</subfield></datafield><datafield tag="546" ind1=" " ind2=" "><subfield code="a">English</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Vapor-plating</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Galvanoplastia</subfield><subfield code="2">larpcal</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Manuais</subfield><subfield code="2">larpcal</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Vapor-plating</subfield><subfield code="v">Handbooks, manuals, etc</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">PVD-Verfahren</subfield><subfield code="0">(DE-588)4115673-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">PVD-Verfahren</subfield><subfield code="0">(DE-588)4115673-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://www.sciencedirect.com/science/book/9780815514220</subfield><subfield code="x">Verlag</subfield><subfield code="z">URL des Erstveröffentlichers</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-ESD</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-031505284</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://www.sciencedirect.com/science/book/9780815514220</subfield><subfield code="l">FLA01</subfield><subfield code="p">ZDB-33-ESD</subfield><subfield code="q">FLA_PDA_ESD</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| id | DE-604.BV046124831 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T08:35:50Z |
| institution | BVB |
| isbn | 1591240794 9781591240792 9780815514220 0815514220 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-031505284 |
| oclc_num | 49708622 |
| open_access_boolean | |
| physical | 1 online resource (xxvii, 917 pages) illustrations |
| psigel | ZDB-33-ESD ZDB-33-ESD FLA_PDA_ESD |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | Noyes Publications |
| record_format | marc |
| series2 | Knovel Library |
| spelling | Mattox, D. M. Verfasser aut Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control byDonald M. Mattox Westwood, N.J. Noyes Publications © 1998 1 online resource (xxvii, 917 pages) illustrations txt rdacontent c rdamedia cr rdacarrier Knovel Library Includes bibliographical references and index Covers aspects of the Physical Vapor Deposition process technology from characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. Includes subjects such as substrate characterization, adhesion, cleaning, and processing. Also covers the more widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes English Vapor-plating fast Galvanoplastia larpcal Manuais larpcal Vapor-plating Handbooks, manuals, etc PVD-Verfahren (DE-588)4115673-0 gnd rswk-swf PVD-Verfahren (DE-588)4115673-0 s 1\p DE-604 http://www.sciencedirect.com/science/book/9780815514220 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Mattox, D. M. Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control Vapor-plating fast Galvanoplastia larpcal Manuais larpcal Vapor-plating Handbooks, manuals, etc PVD-Verfahren (DE-588)4115673-0 gnd |
| subject_GND | (DE-588)4115673-0 |
| title | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control |
| title_auth | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control |
| title_exact_search | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control |
| title_full | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control byDonald M. Mattox |
| title_fullStr | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control byDonald M. Mattox |
| title_full_unstemmed | Handbook of physical vapor deposition (PVD) processing film formation, adhesion, surface preparation and contamination control byDonald M. Mattox |
| title_short | Handbook of physical vapor deposition (PVD) processing |
| title_sort | handbook of physical vapor deposition pvd processing film formation adhesion surface preparation and contamination control |
| title_sub | film formation, adhesion, surface preparation and contamination control |
| topic | Vapor-plating fast Galvanoplastia larpcal Manuais larpcal Vapor-plating Handbooks, manuals, etc PVD-Verfahren (DE-588)4115673-0 gnd |
| topic_facet | Vapor-plating Galvanoplastia Manuais Vapor-plating Handbooks, manuals, etc PVD-Verfahren |
| url | http://www.sciencedirect.com/science/book/9780815514220 |
| work_keys_str_mv | AT mattoxdm handbookofphysicalvapordepositionpvdprocessingfilmformationadhesionsurfacepreparationandcontaminationcontrol |