Organometallic vapor-phase epitaxy: theory and practice

This book describes the operation of a particular technique for the production of compound semiconductor materials. It describes how the technique works, how it can be used for the growth of particular materials and structures, and the application of these materials for specific devices. It contains...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: Stringfellow, G. B. 1942- (VerfasserIn)
Format: Elektronisch E-Book
Sprache:English
Veröffentlicht: San Diego Academic Press © 1999
Ausgabe:Second edition
Schlagworte:
Online-Zugang:FLA01
URL des Erstveröffentlichers
Zusammenfassung:This book describes the operation of a particular technique for the production of compound semiconductor materials. It describes how the technique works, how it can be used for the growth of particular materials and structures, and the application of these materials for specific devices. It contains not only a fundamental description of the operation of the technique but also contains lists of data useful for the everyday operation of OMVPE reactors. It also offers specific recipes that can be used to produce a wide range of specific materials, structures, and devices. Key Features * Updated with new emphasis on the semiconducting nitride materialsGaN and its alloys with In and Al * Emphasizes the newly understood aspects of surface processes * Contains a new chapter, as well as several new sections in chapters on thermodynamics and kinetics
Beschreibung:Includes bibliographical references and index
Beschreibung:1 online resource (xxiv, 572 pages) illustrations
ISBN:9780126738421
0126738424
9780080538181
0080538185

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