Organometallic vapor-phase epitaxy: theory and practice
This book describes the operation of a particular technique for the production of compound semiconductor materials. It describes how the technique works, how it can be used for the growth of particular materials and structures, and the application of these materials for specific devices. It contains...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Elektronisch E-Book |
Sprache: | English |
Veröffentlicht: |
San Diego
Academic Press
© 1999
|
Ausgabe: | Second edition |
Schlagworte: | |
Online-Zugang: | FLA01 URL des Erstveröffentlichers |
Zusammenfassung: | This book describes the operation of a particular technique for the production of compound semiconductor materials. It describes how the technique works, how it can be used for the growth of particular materials and structures, and the application of these materials for specific devices. It contains not only a fundamental description of the operation of the technique but also contains lists of data useful for the everyday operation of OMVPE reactors. It also offers specific recipes that can be used to produce a wide range of specific materials, structures, and devices. Key Features * Updated with new emphasis on the semiconducting nitride materialsGaN and its alloys with In and Al * Emphasizes the newly understood aspects of surface processes * Contains a new chapter, as well as several new sections in chapters on thermodynamics and kinetics |
Beschreibung: | Includes bibliographical references and index |
Beschreibung: | 1 online resource (xxiv, 572 pages) illustrations |
ISBN: | 9780126738421 0126738424 9780080538181 0080538185 |
Internformat
MARC
LEADER | 00000nmm a2200000zc 4500 | ||
---|---|---|---|
001 | BV046123038 | ||
003 | DE-604 | ||
005 | 00000000000000.0 | ||
007 | cr|uuu---uuuuu | ||
008 | 190827s1999 |||| o||u| ||||||eng d | ||
020 | |a 9780126738421 |9 978-0-12-673842-1 | ||
020 | |a 0126738424 |9 0-12-673842-4 | ||
020 | |a 9780080538181 |9 978-0-08-053818-1 | ||
020 | |a 0080538185 |9 0-08-053818-5 | ||
035 | |a (ZDB-33-ESD)ocn162128791 | ||
035 | |a (OCoLC)162128791 | ||
035 | |a (DE-599)BVBBV046123038 | ||
040 | |a DE-604 |b ger |e rda | ||
041 | 0 | |a eng | |
082 | 0 | |a 537.6/22 |2 22 | |
100 | 1 | |a Stringfellow, G. B. |d 1942- |e Verfasser |4 aut | |
245 | 1 | 0 | |a Organometallic vapor-phase epitaxy |b theory and practice |c Gerald B. Stringfellow |
250 | |a Second edition | ||
264 | 1 | |a San Diego |b Academic Press |c © 1999 | |
300 | |a 1 online resource (xxiv, 572 pages) |b illustrations | ||
336 | |b txt |2 rdacontent | ||
337 | |b c |2 rdamedia | ||
338 | |b cr |2 rdacarrier | ||
500 | |a Includes bibliographical references and index | ||
520 | |a This book describes the operation of a particular technique for the production of compound semiconductor materials. It describes how the technique works, how it can be used for the growth of particular materials and structures, and the application of these materials for specific devices. It contains not only a fundamental description of the operation of the technique but also contains lists of data useful for the everyday operation of OMVPE reactors. It also offers specific recipes that can be used to produce a wide range of specific materials, structures, and devices. Key Features * Updated with new emphasis on the semiconducting nitride materialsGaN and its alloys with In and Al * Emphasizes the newly understood aspects of surface processes * Contains a new chapter, as well as several new sections in chapters on thermodynamics and kinetics | ||
650 | 7 | |a SCIENCE / Physics / Electricity |2 bisacsh | |
650 | 7 | |a Compound semiconductors |2 fast | |
650 | 7 | |a Metal organic chemical vapor deposition |2 fast | |
650 | 4 | |a Epitaxy | |
650 | 4 | |a Vapor-plating | |
650 | 4 | |a Crystal growth | |
650 | 4 | |a Compound semiconductors | |
650 | 4 | |a Metal organic chemical vapor deposition | |
650 | 0 | 7 | |a Gasphasenepitaxie |0 (DE-588)4156040-1 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Metallorganische Verbindungen |0 (DE-588)4038906-6 |2 gnd |9 rswk-swf |
689 | 0 | 0 | |a Metallorganische Verbindungen |0 (DE-588)4038906-6 |D s |
689 | 0 | 1 | |a Gasphasenepitaxie |0 (DE-588)4156040-1 |D s |
689 | 0 | |8 1\p |5 DE-604 | |
856 | 4 | 0 | |u http://www.sciencedirect.com/science/book/9780126738421 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
912 | |a ZDB-33-ESD | ||
999 | |a oai:aleph.bib-bvb.de:BVB01-031503491 | ||
883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
966 | e | |u http://www.sciencedirect.com/science/book/9780126738421 |l FLA01 |p ZDB-33-ESD |q FLA_PDA_ESD |x Verlag |3 Volltext |
Datensatz im Suchindex
_version_ | 1804180439507664896 |
---|---|
any_adam_object | |
author | Stringfellow, G. B. 1942- |
author_facet | Stringfellow, G. B. 1942- |
author_role | aut |
author_sort | Stringfellow, G. B. 1942- |
author_variant | g b s gb gbs |
building | Verbundindex |
bvnumber | BV046123038 |
collection | ZDB-33-ESD |
ctrlnum | (ZDB-33-ESD)ocn162128791 (OCoLC)162128791 (DE-599)BVBBV046123038 |
dewey-full | 537.6/22 |
dewey-hundreds | 500 - Natural sciences and mathematics |
dewey-ones | 537 - Electricity and electronics |
dewey-raw | 537.6/22 |
dewey-search | 537.6/22 |
dewey-sort | 3537.6 222 |
dewey-tens | 530 - Physics |
discipline | Physik |
edition | Second edition |
format | Electronic eBook |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02937nmm a2200541zc 4500</leader><controlfield tag="001">BV046123038</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">190827s1999 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780126738421</subfield><subfield code="9">978-0-12-673842-1</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0126738424</subfield><subfield code="9">0-12-673842-4</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9780080538181</subfield><subfield code="9">978-0-08-053818-1</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0080538185</subfield><subfield code="9">0-08-053818-5</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-33-ESD)ocn162128791</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)162128791</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV046123038</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">537.6/22</subfield><subfield code="2">22</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Stringfellow, G. B.</subfield><subfield code="d">1942-</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Organometallic vapor-phase epitaxy</subfield><subfield code="b">theory and practice</subfield><subfield code="c">Gerald B. Stringfellow</subfield></datafield><datafield tag="250" ind1=" " ind2=" "><subfield code="a">Second edition</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">San Diego</subfield><subfield code="b">Academic Press</subfield><subfield code="c">© 1999</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 online resource (xxiv, 572 pages)</subfield><subfield code="b">illustrations</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">Includes bibliographical references and index</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">This book describes the operation of a particular technique for the production of compound semiconductor materials. It describes how the technique works, how it can be used for the growth of particular materials and structures, and the application of these materials for specific devices. It contains not only a fundamental description of the operation of the technique but also contains lists of data useful for the everyday operation of OMVPE reactors. It also offers specific recipes that can be used to produce a wide range of specific materials, structures, and devices. Key Features * Updated with new emphasis on the semiconducting nitride materialsGaN and its alloys with In and Al * Emphasizes the newly understood aspects of surface processes * Contains a new chapter, as well as several new sections in chapters on thermodynamics and kinetics</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">SCIENCE / Physics / Electricity</subfield><subfield code="2">bisacsh</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Compound semiconductors</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="7"><subfield code="a">Metal organic chemical vapor deposition</subfield><subfield code="2">fast</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Epitaxy</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Vapor-plating</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Crystal growth</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Compound semiconductors</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Metal organic chemical vapor deposition</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Gasphasenepitaxie</subfield><subfield code="0">(DE-588)4156040-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Metallorganische Verbindungen</subfield><subfield code="0">(DE-588)4038906-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Metallorganische Verbindungen</subfield><subfield code="0">(DE-588)4038906-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Gasphasenepitaxie</subfield><subfield code="0">(DE-588)4156040-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">http://www.sciencedirect.com/science/book/9780126738421</subfield><subfield code="x">Verlag</subfield><subfield code="z">URL des Erstveröffentlichers</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-33-ESD</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-031503491</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">http://www.sciencedirect.com/science/book/9780126738421</subfield><subfield code="l">FLA01</subfield><subfield code="p">ZDB-33-ESD</subfield><subfield code="q">FLA_PDA_ESD</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
id | DE-604.BV046123038 |
illustrated | Illustrated |
indexdate | 2024-07-10T08:35:47Z |
institution | BVB |
isbn | 9780126738421 0126738424 9780080538181 0080538185 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-031503491 |
oclc_num | 162128791 |
open_access_boolean | |
physical | 1 online resource (xxiv, 572 pages) illustrations |
psigel | ZDB-33-ESD ZDB-33-ESD FLA_PDA_ESD |
publishDate | 1999 |
publishDateSearch | 1999 |
publishDateSort | 1999 |
publisher | Academic Press |
record_format | marc |
spelling | Stringfellow, G. B. 1942- Verfasser aut Organometallic vapor-phase epitaxy theory and practice Gerald B. Stringfellow Second edition San Diego Academic Press © 1999 1 online resource (xxiv, 572 pages) illustrations txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references and index This book describes the operation of a particular technique for the production of compound semiconductor materials. It describes how the technique works, how it can be used for the growth of particular materials and structures, and the application of these materials for specific devices. It contains not only a fundamental description of the operation of the technique but also contains lists of data useful for the everyday operation of OMVPE reactors. It also offers specific recipes that can be used to produce a wide range of specific materials, structures, and devices. Key Features * Updated with new emphasis on the semiconducting nitride materialsGaN and its alloys with In and Al * Emphasizes the newly understood aspects of surface processes * Contains a new chapter, as well as several new sections in chapters on thermodynamics and kinetics SCIENCE / Physics / Electricity bisacsh Compound semiconductors fast Metal organic chemical vapor deposition fast Epitaxy Vapor-plating Crystal growth Compound semiconductors Metal organic chemical vapor deposition Gasphasenepitaxie (DE-588)4156040-1 gnd rswk-swf Metallorganische Verbindungen (DE-588)4038906-6 gnd rswk-swf Metallorganische Verbindungen (DE-588)4038906-6 s Gasphasenepitaxie (DE-588)4156040-1 s 1\p DE-604 http://www.sciencedirect.com/science/book/9780126738421 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
spellingShingle | Stringfellow, G. B. 1942- Organometallic vapor-phase epitaxy theory and practice SCIENCE / Physics / Electricity bisacsh Compound semiconductors fast Metal organic chemical vapor deposition fast Epitaxy Vapor-plating Crystal growth Compound semiconductors Metal organic chemical vapor deposition Gasphasenepitaxie (DE-588)4156040-1 gnd Metallorganische Verbindungen (DE-588)4038906-6 gnd |
subject_GND | (DE-588)4156040-1 (DE-588)4038906-6 |
title | Organometallic vapor-phase epitaxy theory and practice |
title_auth | Organometallic vapor-phase epitaxy theory and practice |
title_exact_search | Organometallic vapor-phase epitaxy theory and practice |
title_full | Organometallic vapor-phase epitaxy theory and practice Gerald B. Stringfellow |
title_fullStr | Organometallic vapor-phase epitaxy theory and practice Gerald B. Stringfellow |
title_full_unstemmed | Organometallic vapor-phase epitaxy theory and practice Gerald B. Stringfellow |
title_short | Organometallic vapor-phase epitaxy |
title_sort | organometallic vapor phase epitaxy theory and practice |
title_sub | theory and practice |
topic | SCIENCE / Physics / Electricity bisacsh Compound semiconductors fast Metal organic chemical vapor deposition fast Epitaxy Vapor-plating Crystal growth Compound semiconductors Metal organic chemical vapor deposition Gasphasenepitaxie (DE-588)4156040-1 gnd Metallorganische Verbindungen (DE-588)4038906-6 gnd |
topic_facet | SCIENCE / Physics / Electricity Compound semiconductors Metal organic chemical vapor deposition Epitaxy Vapor-plating Crystal growth Gasphasenepitaxie Metallorganische Verbindungen |
url | http://www.sciencedirect.com/science/book/9780126738421 |
work_keys_str_mv | AT stringfellowgb organometallicvaporphaseepitaxytheoryandpractice |