Nanolithography and patterning techniques in microelectronics:
Currently surface patterning is achieved by means of optical lithographic techniques but with industry moving towards the fabrication of devices with size features of 100 nm less, the technological community is looking for alternative approaches to materials fabrication at the nanoscale. By using na...
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Cambridge Boca Raton, FL
Woodhead Pub. CRC Press
© 2005
|
| Schriftenreihe: | Woodhead Publishing in materials
|
| Schlagworte: | |
| Online-Zugang: | FLA01 URL des Erstveröffentlichers |
| Zusammenfassung: | Currently surface patterning is achieved by means of optical lithographic techniques but with industry moving towards the fabrication of devices with size features of 100 nm less, the technological community is looking for alternative approaches to materials fabrication at the nanoscale. By using nanolithography scientists can drive patterning currents through surfaces while building a 3D structure from a series of patterned layers. Electron induced chemical lithography can create ultra-high resolution templates for the site selective immobilisation of molecules, to form functional, hierarchic |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | 1 online resource (xiv, 409 pages) illustrations |
| ISBN: | 9781615831869 161583186X 9781855739314 1855739313 1845690907 9781845690908 |
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| id | DE-604.BV046122989 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T08:35:47Z |
| institution | BVB |
| isbn | 9781615831869 161583186X 9781855739314 1855739313 1845690907 9781845690908 |
| language | English |
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| publishDate | 2005 |
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| spelling | Nanolithography and patterning techniques in microelectronics edited by David G. Bucknall Cambridge Boca Raton, FL Woodhead Pub. CRC Press © 2005 1 online resource (xiv, 409 pages) illustrations txt rdacontent c rdamedia cr rdacarrier Woodhead Publishing in materials Includes bibliographical references and index Currently surface patterning is achieved by means of optical lithographic techniques but with industry moving towards the fabrication of devices with size features of 100 nm less, the technological community is looking for alternative approaches to materials fabrication at the nanoscale. By using nanolithography scientists can drive patterning currents through surfaces while building a 3D structure from a series of patterned layers. Electron induced chemical lithography can create ultra-high resolution templates for the site selective immobilisation of molecules, to form functional, hierarchic TECHNOLOGY & ENGINEERING / Electronics / Circuits / General bisacsh Microlithography fast Nanotechnology fast Nanotecnologia larpcal Microlithography Nanotechnology Bucknall, David G. Sonstige oth Erscheint auch als Druck-Ausgabe 0849334470 Erscheint auch als Druck-Ausgabe 9780849334474 http://www.sciencedirect.com/science/book/9781855739314 Verlag URL des Erstveröffentlichers Volltext data file rda |
| spellingShingle | Nanolithography and patterning techniques in microelectronics TECHNOLOGY & ENGINEERING / Electronics / Circuits / General bisacsh Microlithography fast Nanotechnology fast Nanotecnologia larpcal Microlithography Nanotechnology |
| title | Nanolithography and patterning techniques in microelectronics |
| title_auth | Nanolithography and patterning techniques in microelectronics |
| title_exact_search | Nanolithography and patterning techniques in microelectronics |
| title_full | Nanolithography and patterning techniques in microelectronics edited by David G. Bucknall |
| title_fullStr | Nanolithography and patterning techniques in microelectronics edited by David G. Bucknall |
| title_full_unstemmed | Nanolithography and patterning techniques in microelectronics edited by David G. Bucknall |
| title_short | Nanolithography and patterning techniques in microelectronics |
| title_sort | nanolithography and patterning techniques in microelectronics |
| topic | TECHNOLOGY & ENGINEERING / Electronics / Circuits / General bisacsh Microlithography fast Nanotechnology fast Nanotecnologia larpcal Microlithography Nanotechnology |
| topic_facet | TECHNOLOGY & ENGINEERING / Electronics / Circuits / General Microlithography Nanotechnology Nanotecnologia |
| url | http://www.sciencedirect.com/science/book/9781855739314 |
| work_keys_str_mv | AT bucknalldavidg nanolithographyandpatterningtechniquesinmicroelectronics |