APA-Zitierstil (7. Ausg.)

Levinson, H. J. (2019). Principles of Lithography (Fourth edition.). SPIE Press.

Chicago-Zitierstil (17. Ausg.)

Levinson, Harry J. Principles of Lithography. Fourth edition. Bellingham, Washington, USA: SPIE Press, 2019.

MLA-Zitierstil (9. Ausg.)

Levinson, Harry J. Principles of Lithography. Fourth edition. SPIE Press, 2019.