APA (7th ed.) Citation

Levinson, H. J. (2019). Principles of lithography (Fourth edition.). SPIE Press. https://doi.org/10.1117/3.2525393

Chicago Style (17th ed.) Citation

Levinson, Harry J. Principles of Lithography. Fourth edition. Bellingham, Washington, USA: SPIE Press, 2019. https://doi.org/10.1117/3.2525393.

MLA (9th ed.) Citation

Levinson, Harry J. Principles of Lithography. Fourth edition. SPIE Press, 2019. https://doi.org/10.1117/3.2525393.