Verfügbarkeit: Microsystems :: THWS Bibkatalog

Microsystems: Micro-Electro-Mechanical Systems (MEMS)

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Bibliographische Detailangaben
1. Verfasser:	Zielke, Dirk (VerfasserIn)
Format:	Buch
Sprache:	English
Veröffentlicht:	Bielefeld [Verlag nicht ermittelbar] 2016
Ausgabe:	1st edition
Online-Zugang:	Inhaltsverzeichnis Inhaltsverzeichnis
Beschreibung:	107 Seiten Illustrationen 23 cm
ISBN:	9781530132645 1530132649

Internformat

MARC


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Datensatz im Suchindex

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adam_text	TABLE OF CONTENTS PREFACE.3 TABLE OF CONTENTS.5 1 INTRODUCTION. 7 2 TECHNOLOGY. 9 2.1 SILICON WAFER.10 2.2 SEMICONDUCTOR TECHNOLOGY. 11 LAYER DEPOSITION. 12 PHOTOLITHOGRAPHIC STRUCTURING . . 16 ETCH PROCESSES. 20 LAYER MODIFICATION.21 TECHNOLOGY EXAMPLE: DIFFUSED RESISTORS PRODUCED BY A PLANAR PROCESSES.24 2.3 MEMS TECHNOLOGIES. 25 BULK MICRO MACHINING. 25 SURFACE MICROMACHINING.29 WAFER LEVEL PACKAGING. 30 2.4 PACKAGING.31 WIRE BONDING. 35 PRINTED CIRCUIT BOARD TECHNOLOGY.36 THICK-FILM TECHNOLOGY.40 SOLDERING.41 3 SENSORS. 44 3.1 ACCELERATION SENSORS. 45 TYPES OF ACCELEROMETERS.46 STRUCTURE OF MEMS ACCELEROMETER.49 STATIC AND DYNAMIC BEHAVIOR MODEL OF A SPRING-MASS SYSTEM. 51 CAPACITIVE READOUT PRINCIPLE. 54 CAPACITANCE-TO-VOLTAGE CONVERTER (CV-CONVERTER).56 PARAMETERS OF ACCELERATION SENSORS.58 APPLICATION OF ACCELEROMETERS AS TILT SENSOR. 64 3.2 ANGULAR RATE SENSORS (GYROSCOPE).69 OPTICAL GYROSCOPES.70 MICROMECHANICAL ANGULAR RATE SENSORS. 71 ELECTROSTATIC EXCITATION. 73 PARAMETERS OF ANGULAR RATE SENSORS. 75 APPLICATIONS OF GYROSCOPES. 77 INERTIAL NAVIGATION SYSTEMS (IN S).78 3.3 PRESSURE SENSORS.82 PIEZO-RESISTIVE EVALUATION.85 READOUT OF MEASURING BRIDGES. 86 PARAMETERS OF PRESSURE SENSORS. 88 APPLICATIONS OF PRESSURE SENSORS. 89 4 PRACTICAL COURSE.94 EXPERIMENTAL SETUP. 94 ACCELERATION SENSOR ADXL202. 95 COMPLETE CIRCUIT OF THE 2-CHANNEL SENSOR BOARD.96 STARTUP PROCEDURE FOR THE SENSOR BOARD. 98 MEASUREMENTS OF STATIC PARAMETERS.99 DETERMINATION OF DYNAMIC PARAMETERS. 101 MEASUREMENT OF THE TEMPERATURE DEPENDENCE. 103 INCLINATION MEASUREMENT. 105 TASK.106
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author	Zielke, Dirk
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discipline	Maschinenbau / Maschinenwesen Elektrotechnik / Elektronik / Nachrichtentechnik
edition	1st edition
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illustrated	Illustrated
indexdate	2024-12-03T13:01:47Z
institution	BVB
isbn	9781530132645 1530132649
language	English
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owner	DE-M347
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physical	107 Seiten Illustrationen 23 cm
publishDate	2016
publishDateSearch	2016
publishDateSort	2016
publisher	[Verlag nicht ermittelbar]
record_format	marc
spelling	Zielke, Dirk (DE-588)1129204774 aut Microsystems Micro-Electro-Mechanical Systems (MEMS) Dirk Zielke 1st edition Bielefeld [Verlag nicht ermittelbar] 2016 107 Seiten Illustrationen 23 cm txt rdacontent n rdamedia nc rdacarrier B:DE-101 application/pdf http://d-nb.info/1175969907/04 Inhaltsverzeichnis DNB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=030938167&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis
spellingShingle	Zielke, Dirk Microsystems Micro-Electro-Mechanical Systems (MEMS)
title	Microsystems Micro-Electro-Mechanical Systems (MEMS)
title_auth	Microsystems Micro-Electro-Mechanical Systems (MEMS)
title_exact_search	Microsystems Micro-Electro-Mechanical Systems (MEMS)
title_full	Microsystems Micro-Electro-Mechanical Systems (MEMS) Dirk Zielke
title_fullStr	Microsystems Micro-Electro-Mechanical Systems (MEMS) Dirk Zielke
title_full_unstemmed	Microsystems Micro-Electro-Mechanical Systems (MEMS) Dirk Zielke
title_short	Microsystems
title_sort	microsystems micro electro mechanical systems mems
title_sub	Micro-Electro-Mechanical Systems (MEMS)
url	http://d-nb.info/1175969907/04 http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=030938167&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
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MARC

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