Handbook of silicon wafer cleaning technology:
Saved in:
| Other Authors: | , |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Oxford
William Andrew, an imprint of Elsevier
[2018]
|
| Edition: | Third edition |
| Subjects: | |
| Physical Description: | 1 Online-Ressource |
| ISBN: | 9780323510851 |
Staff View
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Record in the Search Index
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| id | DE-604.BV045400804 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-31T01:10:31Z |
| institution | BVB |
| isbn | 9780323510851 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030786898 |
| oclc_num | 1083292403 |
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| owner_facet | DE-91 DE-BY-TUM |
| physical | 1 Online-Ressource |
| psigel | ZDB-10-ESC |
| publishDate | 2018 |
| publishDateSearch | 2018 |
| publishDateSort | 2018 |
| publisher | William Andrew, an imprint of Elsevier |
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| spelling | Handbook of silicon wafer cleaning technology Edited by Karen A. Reinhardt, Werner Kern Third edition Oxford William Andrew, an imprint of Elsevier [2018] 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier SOI-Technik (DE-588)4128029-5 gnd rswk-swf Oberflächenreinigung (DE-588)4204243-4 gnd rswk-swf Wafer (DE-588)4294605-0 gnd rswk-swf SOI-Technik (DE-588)4128029-5 s Wafer (DE-588)4294605-0 s Oberflächenreinigung (DE-588)4204243-4 s 1\p DE-604 Reinhardt, Karen A. edt Kern, Werner edt Erscheint auch als Druck-Ausgabe, hbk 978-0-323-51084-4 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Handbook of silicon wafer cleaning technology SOI-Technik (DE-588)4128029-5 gnd Oberflächenreinigung (DE-588)4204243-4 gnd Wafer (DE-588)4294605-0 gnd |
| subject_GND | (DE-588)4128029-5 (DE-588)4204243-4 (DE-588)4294605-0 |
| title | Handbook of silicon wafer cleaning technology |
| title_auth | Handbook of silicon wafer cleaning technology |
| title_exact_search | Handbook of silicon wafer cleaning technology |
| title_full | Handbook of silicon wafer cleaning technology Edited by Karen A. Reinhardt, Werner Kern |
| title_fullStr | Handbook of silicon wafer cleaning technology Edited by Karen A. Reinhardt, Werner Kern |
| title_full_unstemmed | Handbook of silicon wafer cleaning technology Edited by Karen A. Reinhardt, Werner Kern |
| title_short | Handbook of silicon wafer cleaning technology |
| title_sort | handbook of silicon wafer cleaning technology |
| topic | SOI-Technik (DE-588)4128029-5 gnd Oberflächenreinigung (DE-588)4204243-4 gnd Wafer (DE-588)4294605-0 gnd |
| topic_facet | SOI-Technik Oberflächenreinigung Wafer |
| work_keys_str_mv | AT reinhardtkarena handbookofsiliconwafercleaningtechnology AT kernwerner handbookofsiliconwafercleaningtechnology |