Handbook of silicon wafer cleaning technology:
Gespeichert in:
| Weitere Verfasser: | , |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Oxford
William Andrew, an imprint of Elsevier
[2018]
|
| Ausgabe: | Third edition |
| Schlagworte: | |
| Beschreibung: | 1 Online-Ressource |
| ISBN: | 9780323510851 |
Internformat
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| 912 | |a ZDB-10-ESC | ||
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Datensatz im Suchindex
| _version_ | 1806054962320375808 |
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| adam_text | |
| any_adam_object | |
| author2 | Reinhardt, Karen A. Kern, Werner |
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | Third edition |
| format | Electronic eBook |
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| id | DE-604.BV045400804 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-31T01:10:31Z |
| institution | BVB |
| isbn | 9780323510851 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030786898 |
| oclc_num | 1083292403 |
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| owner_facet | DE-91 DE-BY-TUM |
| physical | 1 Online-Ressource |
| psigel | ZDB-10-ESC |
| publishDate | 2018 |
| publishDateSearch | 2018 |
| publishDateSort | 2018 |
| publisher | William Andrew, an imprint of Elsevier |
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| spelling | Handbook of silicon wafer cleaning technology Edited by Karen A. Reinhardt, Werner Kern Third edition Oxford William Andrew, an imprint of Elsevier [2018] 1 Online-Ressource txt rdacontent c rdamedia cr rdacarrier SOI-Technik (DE-588)4128029-5 gnd rswk-swf Oberflächenreinigung (DE-588)4204243-4 gnd rswk-swf Wafer (DE-588)4294605-0 gnd rswk-swf SOI-Technik (DE-588)4128029-5 s Wafer (DE-588)4294605-0 s Oberflächenreinigung (DE-588)4204243-4 s 1\p DE-604 Reinhardt, Karen A. edt Kern, Werner edt Erscheint auch als Druck-Ausgabe, hbk 978-0-323-51084-4 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Handbook of silicon wafer cleaning technology SOI-Technik (DE-588)4128029-5 gnd Oberflächenreinigung (DE-588)4204243-4 gnd Wafer (DE-588)4294605-0 gnd |
| subject_GND | (DE-588)4128029-5 (DE-588)4204243-4 (DE-588)4294605-0 |
| title | Handbook of silicon wafer cleaning technology |
| title_auth | Handbook of silicon wafer cleaning technology |
| title_exact_search | Handbook of silicon wafer cleaning technology |
| title_full | Handbook of silicon wafer cleaning technology Edited by Karen A. Reinhardt, Werner Kern |
| title_fullStr | Handbook of silicon wafer cleaning technology Edited by Karen A. Reinhardt, Werner Kern |
| title_full_unstemmed | Handbook of silicon wafer cleaning technology Edited by Karen A. Reinhardt, Werner Kern |
| title_short | Handbook of silicon wafer cleaning technology |
| title_sort | handbook of silicon wafer cleaning technology |
| topic | SOI-Technik (DE-588)4128029-5 gnd Oberflächenreinigung (DE-588)4204243-4 gnd Wafer (DE-588)4294605-0 gnd |
| topic_facet | SOI-Technik Oberflächenreinigung Wafer |
| work_keys_str_mv | AT reinhardtkarena handbookofsiliconwafercleaningtechnology AT kernwerner handbookofsiliconwafercleaningtechnology |