APA (7th ed.) Citation

Reinhardt, K. A., & Kern, W. (2018). Handbook of silicon wafer cleaning technology (Third edition.). William Andrew, an imprint of Elsevier.

Chicago Style (17th ed.) Citation

Reinhardt, Karen A., and Werner Kern. Handbook of Silicon Wafer Cleaning Technology. Third edition. Oxford: William Andrew, an imprint of Elsevier, 2018.

MLA (9th ed.) Citation

Reinhardt, Karen A., and Werner Kern. Handbook of Silicon Wafer Cleaning Technology. Third edition. William Andrew, an imprint of Elsevier, 2018.