Handbook of thin film deposition:
Handbook of thin film deposition, Fourth edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, materials f...
Gespeichert in:
| Weitere Verfasser: | , |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Oxford, United Kingdom
William Andrew, and imprint of Elsevier
[2018]
|
| Ausgabe: | Fourth edition |
| Schlagworte: | |
| Online-Zugang: | FAW01 FLA01 URL des Erstveröffentlichers |
| Zusammenfassung: | Handbook of thin film deposition, Fourth edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, materials for memory applications and methods for thin film optical processes. The book is broken up into three sections: scaling, equipment and processing, and applications. In this newly revised edition, the handbook will also explore the limits of thin film applications, most notably as they relate to applications in manufacturing, materials, design and reliability. Offers a practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance, applications and the limitations faced by those processes. Covers core processes and applications in the semiconductor industry and new developments within the photovoltaic and optical thin film industries |
| Beschreibung: | Includes index |
| Beschreibung: | 1 online resource |
| ISBN: | 9780128123126 0128123125 |
Internformat
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Datensatz im Suchindex
| _version_ | 1804179235573596160 |
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| any_adam_object | |
| author2 | Seshan, Krishna Schepis, Dominic |
| author2_role | edt edt |
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| author_facet | Seshan, Krishna Schepis, Dominic |
| building | Verbundindex |
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| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/2 |
| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | Fourth edition |
| format | Electronic eBook |
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| spelling | Handbook of thin film deposition edited by Krishna Seshan, Dominic Schepis Fourth edition Oxford, United Kingdom William Andrew, and imprint of Elsevier [2018] 1 online resource txt rdacontent c rdamedia cr rdacarrier Includes index Handbook of thin film deposition, Fourth edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, materials for memory applications and methods for thin film optical processes. The book is broken up into three sections: scaling, equipment and processing, and applications. In this newly revised edition, the handbook will also explore the limits of thin film applications, most notably as they relate to applications in manufacturing, materials, design and reliability. Offers a practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance, applications and the limitations faced by those processes. Covers core processes and applications in the semiconductor industry and new developments within the photovoltaic and optical thin film industries TECHNOLOGY & ENGINEERING / Mechanical bisacsh Thin film devices / Design and construction fast Thin films fast Thin films Handbooks, manuals, etc Thin film devices Design and construction PVD-Verfahren (DE-588)4115673-0 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf CVD-Verfahren (DE-588)4009846-1 gnd rswk-swf Fertigung (DE-588)4016899-2 gnd rswk-swf Integrierte Schaltung (DE-588)4027242-4 gnd rswk-swf Fotovoltaik (DE-588)4121476-6 gnd rswk-swf 1\p (DE-588)4143413-4 Aufsatzsammlung gnd-content Dünnschichttechnik (DE-588)4136339-5 s CVD-Verfahren (DE-588)4009846-1 s PVD-Verfahren (DE-588)4115673-0 s Halbleiter (DE-588)4022993-2 s Fotovoltaik (DE-588)4121476-6 s 2\p DE-604 Integrierte Schaltung (DE-588)4027242-4 s Fertigung (DE-588)4016899-2 s 3\p DE-604 Halbleitertechnologie (DE-588)4158814-9 s 4\p DE-604 Seshan, Krishna edt Schepis, Dominic edt Erscheint auch als Druck-Ausgabe 9780128123119 Erscheint auch als Druck-Ausgabe 0128123117 https://www.sciencedirect.com/science/book/9780128123119 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 4\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Handbook of thin film deposition TECHNOLOGY & ENGINEERING / Mechanical bisacsh Thin film devices / Design and construction fast Thin films fast Thin films Handbooks, manuals, etc Thin film devices Design and construction PVD-Verfahren (DE-588)4115673-0 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Halbleiter (DE-588)4022993-2 gnd CVD-Verfahren (DE-588)4009846-1 gnd Fertigung (DE-588)4016899-2 gnd Integrierte Schaltung (DE-588)4027242-4 gnd Fotovoltaik (DE-588)4121476-6 gnd |
| subject_GND | (DE-588)4115673-0 (DE-588)4136339-5 (DE-588)4158814-9 (DE-588)4022993-2 (DE-588)4009846-1 (DE-588)4016899-2 (DE-588)4027242-4 (DE-588)4121476-6 (DE-588)4143413-4 |
| title | Handbook of thin film deposition |
| title_auth | Handbook of thin film deposition |
| title_exact_search | Handbook of thin film deposition |
| title_full | Handbook of thin film deposition edited by Krishna Seshan, Dominic Schepis |
| title_fullStr | Handbook of thin film deposition edited by Krishna Seshan, Dominic Schepis |
| title_full_unstemmed | Handbook of thin film deposition edited by Krishna Seshan, Dominic Schepis |
| title_short | Handbook of thin film deposition |
| title_sort | handbook of thin film deposition |
| topic | TECHNOLOGY & ENGINEERING / Mechanical bisacsh Thin film devices / Design and construction fast Thin films fast Thin films Handbooks, manuals, etc Thin film devices Design and construction PVD-Verfahren (DE-588)4115673-0 gnd Dünnschichttechnik (DE-588)4136339-5 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Halbleiter (DE-588)4022993-2 gnd CVD-Verfahren (DE-588)4009846-1 gnd Fertigung (DE-588)4016899-2 gnd Integrierte Schaltung (DE-588)4027242-4 gnd Fotovoltaik (DE-588)4121476-6 gnd |
| topic_facet | TECHNOLOGY & ENGINEERING / Mechanical Thin film devices / Design and construction Thin films Thin films Handbooks, manuals, etc Thin film devices Design and construction PVD-Verfahren Dünnschichttechnik Halbleitertechnologie Halbleiter CVD-Verfahren Fertigung Integrierte Schaltung Fotovoltaik Aufsatzsammlung |
| url | https://www.sciencedirect.com/science/book/9780128123119 |
| work_keys_str_mv | AT seshankrishna handbookofthinfilmdeposition AT schepisdominic handbookofthinfilmdeposition |