Developments in surface contamination and cleaning, Volume 8, Cleaning techniques:
As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a who...
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Amsterdam
William Andrew
2015
|
| Ausgabe: | First edition |
| Schriftenreihe: | Developments in Surface Contamination and Cleaning Series
v. 8 |
| Schlagworte: | |
| Online-Zugang: | FLA01 Volltext |
| Zusammenfassung: | As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. Several novel wet and dry surface cleaning methods are addressed in this Volume. Many of these methods have not been reviewed previously, or the previous reviews are dated. These methods are finding increasing commercial application and the information in this book will be of high value to the reader. Edited by the leading experts in small-scale particle surface contamination, cleaning and cleaning control these books will be an invaluable reference for researchers and engineers in R & D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | 1 online resource (235 pages) |
| ISBN: | 9780323312714 0323312713 |
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| 520 | |a As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. Several novel wet and dry surface cleaning methods are addressed in this Volume. Many of these methods have not been reviewed previously, or the previous reviews are dated. These methods are finding increasing commercial application and the information in this book will be of high value to the reader. Edited by the leading experts in small-scale particle surface contamination, cleaning and cleaning control these books will be an invaluable reference for researchers and engineers in R & D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography | ||
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| illustrated | Not Illustrated |
| indexdate | 2024-07-10T08:16:36Z |
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| isbn | 9780323312714 0323312713 |
| language | English |
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| series2 | Developments in Surface Contamination and Cleaning Series |
| spelling | Developments in surface contamination and cleaning, Volume 8, Cleaning techniques edited by Rajiv Kohli and K.L. Mittal First edition Amsterdam William Andrew 2015 © 2015 1 online resource (235 pages) txt rdacontent c rdamedia cr rdacarrier Developments in Surface Contamination and Cleaning Series v. 8 Includes bibliographical references and index As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. Several novel wet and dry surface cleaning methods are addressed in this Volume. Many of these methods have not been reviewed previously, or the previous reviews are dated. These methods are finding increasing commercial application and the information in this book will be of high value to the reader. Edited by the leading experts in small-scale particle surface contamination, cleaning and cleaning control these books will be an invaluable reference for researchers and engineers in R & D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography TECHNOLOGY & ENGINEERING / Engineering (General) bisacsh TECHNOLOGY & ENGINEERING / Reference bisacsh Cleaning fast Coatings fast Dust control fast Particles / Measurement fast Surfaces (Technology) fast Surfaces (Technology) Surface contamination Prevention Particles Measurement Cleaning Coatings Dust control Kohli, Rajiv 1947- Sonstige oth Mittal, K. L. 1945- Sonstige oth Erscheint auch als Druck-Ausgabe 9780323299619 Erscheint auch als Druck-Ausgabe 032329961X http://www.sciencedirect.com/science/book/9780323299619 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Developments in surface contamination and cleaning, Volume 8, Cleaning techniques TECHNOLOGY & ENGINEERING / Engineering (General) bisacsh TECHNOLOGY & ENGINEERING / Reference bisacsh Cleaning fast Coatings fast Dust control fast Particles / Measurement fast Surfaces (Technology) fast Surfaces (Technology) Surface contamination Prevention Particles Measurement Cleaning Coatings Dust control |
| title | Developments in surface contamination and cleaning, Volume 8, Cleaning techniques |
| title_auth | Developments in surface contamination and cleaning, Volume 8, Cleaning techniques |
| title_exact_search | Developments in surface contamination and cleaning, Volume 8, Cleaning techniques |
| title_full | Developments in surface contamination and cleaning, Volume 8, Cleaning techniques edited by Rajiv Kohli and K.L. Mittal |
| title_fullStr | Developments in surface contamination and cleaning, Volume 8, Cleaning techniques edited by Rajiv Kohli and K.L. Mittal |
| title_full_unstemmed | Developments in surface contamination and cleaning, Volume 8, Cleaning techniques edited by Rajiv Kohli and K.L. Mittal |
| title_short | Developments in surface contamination and cleaning, Volume 8, Cleaning techniques |
| title_sort | developments in surface contamination and cleaning volume 8 cleaning techniques |
| topic | TECHNOLOGY & ENGINEERING / Engineering (General) bisacsh TECHNOLOGY & ENGINEERING / Reference bisacsh Cleaning fast Coatings fast Dust control fast Particles / Measurement fast Surfaces (Technology) fast Surfaces (Technology) Surface contamination Prevention Particles Measurement Cleaning Coatings Dust control |
| topic_facet | TECHNOLOGY & ENGINEERING / Engineering (General) TECHNOLOGY & ENGINEERING / Reference Cleaning Coatings Dust control Particles / Measurement Surfaces (Technology) Surface contamination Prevention Particles Measurement |
| url | http://www.sciencedirect.com/science/book/9780323299619 |
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