Developments in surface contamination and cleaning, Volume 7, Cleanliness validation and verification:
As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book series Developments in Surface Contamination and Cleaning a...
Gespeichert in:
| Weitere Verfasser: | , |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Amsterdam
Elsevier
2015
|
| Ausgabe: | First edition |
| Schlagworte: | |
| Online-Zugang: | FLA01 Volltext |
| Zusammenfassung: | As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. The chapters in this Volume address the sources of surface contaminants and various methods for their collection and characterization, as well as methods for cleanliness validation. Regulatory aspects of cleaning are also covered. The collection of topics in this book is unique and complements other volumes in this series. Edited by the leading experts in small-scale particle surface contamination, cleaning and cleaning control, these books will be an invaluable reference for researchers and engineers in R & D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography |
| Beschreibung: | Includes bibliographical references and index |
| Beschreibung: | 1 online resource (207 pages) |
| ISBN: | 9780323311458 0323311458 0323313035 9780323313032 |
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| 245 | 1 | 0 | |a Developments in surface contamination and cleaning, Volume 7, Cleanliness validation and verification |c edited by Rajiv Kohli and K.L. Mittal |
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| 500 | |a Includes bibliographical references and index | ||
| 520 | |a As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. The chapters in this Volume address the sources of surface contaminants and various methods for their collection and characterization, as well as methods for cleanliness validation. Regulatory aspects of cleaning are also covered. The collection of topics in this book is unique and complements other volumes in this series. Edited by the leading experts in small-scale particle surface contamination, cleaning and cleaning control, these books will be an invaluable reference for researchers and engineers in R & D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography | ||
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Datensatz im Suchindex
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| indexdate | 2024-07-10T08:16:36Z |
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| spelling | Developments in surface contamination and cleaning, Volume 7, Cleanliness validation and verification edited by Rajiv Kohli and K.L. Mittal First edition Amsterdam Elsevier 2015 1 online resource (207 pages) txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references and index As device sizes in the semiconductor industries are shrinking, they become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not as effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a whole provides an excellent source of information on these alternative cleaning techniques as well as methods for characterization and validation of surface contamination. Each volume has a particular topical focus, covering the key techniques and recent developments in the area. The chapters in this Volume address the sources of surface contaminants and various methods for their collection and characterization, as well as methods for cleanliness validation. Regulatory aspects of cleaning are also covered. The collection of topics in this book is unique and complements other volumes in this series. Edited by the leading experts in small-scale particle surface contamination, cleaning and cleaning control, these books will be an invaluable reference for researchers and engineers in R & D, manufacturing, quality control and procurement specification situated in a multitude of industries such as: aerospace, automotive, biomedical, defense, energy, manufacturing, microelectronics, optics and xerography TECHNOLOGY & ENGINEERING / Engineering (General) bisacsh TECHNOLOGY & ENGINEERING / Reference bisacsh Cleaning fast Surfaces (Technology) fast Surfaces (Technology) Surface contamination Prevention Cleaning Beschichtung (DE-588)4144863-7 gnd rswk-swf Teilchen (DE-588)4059317-4 gnd rswk-swf Oberfläche (DE-588)4042907-6 gnd rswk-swf Kontamination (DE-588)4032272-5 gnd rswk-swf Reinigungsverfahren (DE-588)4391913-3 gnd rswk-swf (DE-588)4143413-4 Aufsatzsammlung gnd-content Oberfläche (DE-588)4042907-6 s Beschichtung (DE-588)4144863-7 s Kontamination (DE-588)4032272-5 s Reinigungsverfahren (DE-588)4391913-3 s Teilchen (DE-588)4059317-4 s DE-604 Kohli, Rajiv 1947- edt Mittal, K. L. 1945- edt http://www.sciencedirect.com/science/book/9780323313032 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Developments in surface contamination and cleaning, Volume 7, Cleanliness validation and verification TECHNOLOGY & ENGINEERING / Engineering (General) bisacsh TECHNOLOGY & ENGINEERING / Reference bisacsh Cleaning fast Surfaces (Technology) fast Surfaces (Technology) Surface contamination Prevention Cleaning Beschichtung (DE-588)4144863-7 gnd Teilchen (DE-588)4059317-4 gnd Oberfläche (DE-588)4042907-6 gnd Kontamination (DE-588)4032272-5 gnd Reinigungsverfahren (DE-588)4391913-3 gnd |
| subject_GND | (DE-588)4144863-7 (DE-588)4059317-4 (DE-588)4042907-6 (DE-588)4032272-5 (DE-588)4391913-3 (DE-588)4143413-4 |
| title | Developments in surface contamination and cleaning, Volume 7, Cleanliness validation and verification |
| title_auth | Developments in surface contamination and cleaning, Volume 7, Cleanliness validation and verification |
| title_exact_search | Developments in surface contamination and cleaning, Volume 7, Cleanliness validation and verification |
| title_full | Developments in surface contamination and cleaning, Volume 7, Cleanliness validation and verification edited by Rajiv Kohli and K.L. Mittal |
| title_fullStr | Developments in surface contamination and cleaning, Volume 7, Cleanliness validation and verification edited by Rajiv Kohli and K.L. Mittal |
| title_full_unstemmed | Developments in surface contamination and cleaning, Volume 7, Cleanliness validation and verification edited by Rajiv Kohli and K.L. Mittal |
| title_short | Developments in surface contamination and cleaning, Volume 7, Cleanliness validation and verification |
| title_sort | developments in surface contamination and cleaning volume 7 cleanliness validation and verification |
| topic | TECHNOLOGY & ENGINEERING / Engineering (General) bisacsh TECHNOLOGY & ENGINEERING / Reference bisacsh Cleaning fast Surfaces (Technology) fast Surfaces (Technology) Surface contamination Prevention Cleaning Beschichtung (DE-588)4144863-7 gnd Teilchen (DE-588)4059317-4 gnd Oberfläche (DE-588)4042907-6 gnd Kontamination (DE-588)4032272-5 gnd Reinigungsverfahren (DE-588)4391913-3 gnd |
| topic_facet | TECHNOLOGY & ENGINEERING / Engineering (General) TECHNOLOGY & ENGINEERING / Reference Cleaning Surfaces (Technology) Surface contamination Prevention Beschichtung Teilchen Oberfläche Kontamination Reinigungsverfahren Aufsatzsammlung |
| url | http://www.sciencedirect.com/science/book/9780323313032 |
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