Vaz, F. (2013). Metallic oxynitride thin films by reactive sputtering and related deposition methods: Processes, properties and applications. Bentham Science Publishers.
Chicago Style (17th ed.) CitationVaz, Filipe. Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Processes, Properties and Applications. Sharjah: Bentham Science Publishers, 2013.
MLA (9th ed.) CitationVaz, Filipe. Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Processes, Properties and Applications. Bentham Science Publishers, 2013.
Warning: These citations may not always be 100% accurate.