Metallic oxynitride thin films by reactive sputtering and related deposition methods: processes, properties and applications
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Sharjah
Bentham Science Publishers
2013
|
| Schlagworte: | |
| Beschreibung: | Print version record |
| Beschreibung: | 1 online resource (363 pages) |
| ISBN: | 9781608051564 1608051560 |
Internformat
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| 100 | 1 | |a Vaz, Filipe |e Verfasser |4 aut | |
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| 300 | |a 1 online resource (363 pages) | ||
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| 505 | 8 | |a This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes | |
| 650 | 7 | |a TECHNOLOGY & ENGINEERING / Mechanical |2 bisacsh | |
| 650 | 7 | |a Thin films |2 fast | |
| 650 | 4 | |a Thin films | |
| 700 | 1 | |a Martin, Nicolas |e Sonstige |4 oth | |
| 700 | 1 | |a Fenker, Martin |e Sonstige |4 oth | |
| 776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe |a Vaz, Filipe |t Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods : Processes, Properties and Applications |d Sharjah : Bentham Science Publishers, 2013 |z 9781608051571 |
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Datensatz im Suchindex
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| any_adam_object | |
| author | Vaz, Filipe |
| author_facet | Vaz, Filipe |
| author_role | aut |
| author_sort | Vaz, Filipe |
| author_variant | f v fv |
| building | Verbundindex |
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| contents | This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes |
| ctrlnum | (ZDB-4-ENC)ocn854975260 (OCoLC)854975260 (DE-599)BVBBV045345289 |
| dewey-full | 621.3815/2 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
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| dewey-search | 621.3815/2 |
| dewey-sort | 3621.3815 12 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| id | DE-604.BV045345289 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T08:15:32Z |
| institution | BVB |
| isbn | 9781608051564 1608051560 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030731991 |
| oclc_num | 854975260 |
| open_access_boolean | |
| physical | 1 online resource (363 pages) |
| psigel | ZDB-4-ENC |
| publishDate | 2013 |
| publishDateSearch | 2013 |
| publishDateSort | 2013 |
| publisher | Bentham Science Publishers |
| record_format | marc |
| spelling | Vaz, Filipe Verfasser aut Metallic oxynitride thin films by reactive sputtering and related deposition methods processes, properties and applications Filipe Vaz Sharjah Bentham Science Publishers 2013 1 online resource (363 pages) txt rdacontent c rdamedia cr rdacarrier Print version record This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes TECHNOLOGY & ENGINEERING / Mechanical bisacsh Thin films fast Thin films Martin, Nicolas Sonstige oth Fenker, Martin Sonstige oth Erscheint auch als Druck-Ausgabe Vaz, Filipe Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods : Processes, Properties and Applications Sharjah : Bentham Science Publishers, 2013 9781608051571 |
| spellingShingle | Vaz, Filipe Metallic oxynitride thin films by reactive sputtering and related deposition methods processes, properties and applications This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes TECHNOLOGY & ENGINEERING / Mechanical bisacsh Thin films fast Thin films |
| title | Metallic oxynitride thin films by reactive sputtering and related deposition methods processes, properties and applications |
| title_auth | Metallic oxynitride thin films by reactive sputtering and related deposition methods processes, properties and applications |
| title_exact_search | Metallic oxynitride thin films by reactive sputtering and related deposition methods processes, properties and applications |
| title_full | Metallic oxynitride thin films by reactive sputtering and related deposition methods processes, properties and applications Filipe Vaz |
| title_fullStr | Metallic oxynitride thin films by reactive sputtering and related deposition methods processes, properties and applications Filipe Vaz |
| title_full_unstemmed | Metallic oxynitride thin films by reactive sputtering and related deposition methods processes, properties and applications Filipe Vaz |
| title_short | Metallic oxynitride thin films by reactive sputtering and related deposition methods |
| title_sort | metallic oxynitride thin films by reactive sputtering and related deposition methods processes properties and applications |
| title_sub | processes, properties and applications |
| topic | TECHNOLOGY & ENGINEERING / Mechanical bisacsh Thin films fast Thin films |
| topic_facet | TECHNOLOGY & ENGINEERING / Mechanical Thin films |
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