Semiconductor strain metrology: principles and applications
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
[Saif Zone, Sharjah, U.A.E] ; Oak Park, IL
Bentham Science
[2012]
|
| Subjects: | |
| Physical Description: | 1 online resource (136 pages :) illustrations |
| ISBN: | 9781608053599 1608053598 |
Staff View
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Record in the Search Index
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| author | Wong, Terence K. S. |
| author_facet | Wong, Terence K. S. |
| author_role | aut |
| author_sort | Wong, Terence K. S. |
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| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
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| dewey-sort | 3621.3815 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| id | DE-604.BV045344966 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T08:15:32Z |
| institution | BVB |
| isbn | 9781608053599 1608053598 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030731669 |
| oclc_num | 811371628 |
| open_access_boolean | |
| physical | 1 online resource (136 pages :) illustrations |
| psigel | ZDB-4-ENC |
| publishDate | 2012 |
| publishDateSearch | 2012 |
| publishDateSort | 2012 |
| publisher | Bentham Science |
| record_format | marc |
| spelling | Wong, Terence K. S. Verfasser aut Semiconductor strain metrology principles and applications Terence K.S. Wong [Saif Zone, Sharjah, U.A.E] ; Oak Park, IL Bentham Science [2012] 1 online resource (136 pages :) illustrations txt rdacontent c rdamedia cr rdacarrier TECHNOLOGY & ENGINEERING / Electronics / Circuits / General bisacsh TECHNOLOGY & ENGINEERING / Electronics / Circuits / Integrated bisacsh Silicon-on-insulator technology fast Semiconductors Design and construction Materials Compound semiconductors Design and construction Materials Silicon-on-insulator technology |
| spellingShingle | Wong, Terence K. S. Semiconductor strain metrology principles and applications TECHNOLOGY & ENGINEERING / Electronics / Circuits / General bisacsh TECHNOLOGY & ENGINEERING / Electronics / Circuits / Integrated bisacsh Silicon-on-insulator technology fast Semiconductors Design and construction Materials Compound semiconductors Design and construction Materials Silicon-on-insulator technology |
| title | Semiconductor strain metrology principles and applications |
| title_auth | Semiconductor strain metrology principles and applications |
| title_exact_search | Semiconductor strain metrology principles and applications |
| title_full | Semiconductor strain metrology principles and applications Terence K.S. Wong |
| title_fullStr | Semiconductor strain metrology principles and applications Terence K.S. Wong |
| title_full_unstemmed | Semiconductor strain metrology principles and applications Terence K.S. Wong |
| title_short | Semiconductor strain metrology |
| title_sort | semiconductor strain metrology principles and applications |
| title_sub | principles and applications |
| topic | TECHNOLOGY & ENGINEERING / Electronics / Circuits / General bisacsh TECHNOLOGY & ENGINEERING / Electronics / Circuits / Integrated bisacsh Silicon-on-insulator technology fast Semiconductors Design and construction Materials Compound semiconductors Design and construction Materials Silicon-on-insulator technology |
| topic_facet | TECHNOLOGY & ENGINEERING / Electronics / Circuits / General TECHNOLOGY & ENGINEERING / Electronics / Circuits / Integrated Silicon-on-insulator technology Semiconductors Design and construction Materials Compound semiconductors Design and construction Materials Silicon-on-insulator technology |
| work_keys_str_mv | AT wongterenceks semiconductorstrainmetrologyprinciplesandapplications |