Characterization in silicon processing: = Silicon processing
Saved in:
| Format: | Electronic eBook |
|---|---|
| Language: | English |
| Published: |
New York, NY
Momentum Press
2010
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| Series: | Materials characterization series
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| Subjects: | |
| Item Description: | Print version record. - "First published by Butterworth-Heinemann in 1995 ... Reissued volume published in 2010 by Momentum Press."--Title page verso |
| Physical Description: | 1 online resource (xv, 240 pages) illustrations |
| ISBN: | 9781606501115 1606501119 9781606501092 1606501097 |
Staff View
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| 245 | 1 | 0 | |a Characterization in silicon processing |b = Silicon processing |c editor, Yale Strausser ; series editors, C. Richard Brundle and Charles A. Evans |
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| 505 | 8 | |a With a focus on the use of materials characterization techniques for silicon-based semiconductors, this volume in the Materials Characterization series focuses on the process flow of silicon wafer manufacture where materials properties, processing and associated problems are brought to the fore. The book is organized by the types of materials commonly associated with integrated silicon semiconductor circuits and the typical processes involved for each such material, including deposition, thermal treatment, and lithography. Readers will find features such as: -- The essential processes of Silic | |
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| 650 | 7 | |a Surface chemistry |2 fast | |
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| contents | With a focus on the use of materials characterization techniques for silicon-based semiconductors, this volume in the Materials Characterization series focuses on the process flow of silicon wafer manufacture where materials properties, processing and associated problems are brought to the fore. The book is organized by the types of materials commonly associated with integrated silicon semiconductor circuits and the typical processes involved for each such material, including deposition, thermal treatment, and lithography. Readers will find features such as: -- The essential processes of Silic |
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| dewey-full | 620.193 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620.193 |
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| format | Electronic eBook |
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| id | DE-604.BV045344516 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T08:15:31Z |
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| isbn | 9781606501115 1606501119 9781606501092 1606501097 |
| language | English |
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| physical | 1 online resource (xv, 240 pages) illustrations |
| psigel | ZDB-4-ENC |
| publishDate | 2010 |
| publishDateSearch | 2010 |
| publishDateSort | 2010 |
| publisher | Momentum Press |
| record_format | marc |
| series2 | Materials characterization series |
| spelling | Characterization in silicon processing = Silicon processing editor, Yale Strausser ; series editors, C. Richard Brundle and Charles A. Evans Silicon processing New York, NY Momentum Press 2010 1 online resource (xv, 240 pages) illustrations txt rdacontent c rdamedia cr rdacarrier Materials characterization series Print version record. - "First published by Butterworth-Heinemann in 1995 ... Reissued volume published in 2010 by Momentum Press."--Title page verso With a focus on the use of materials characterization techniques for silicon-based semiconductors, this volume in the Materials Characterization series focuses on the process flow of silicon wafer manufacture where materials properties, processing and associated problems are brought to the fore. The book is organized by the types of materials commonly associated with integrated silicon semiconductor circuits and the typical processes involved for each such material, including deposition, thermal treatment, and lithography. Readers will find features such as: -- The essential processes of Silic TECHNOLOGY & ENGINEERING / Material Science bisacsh Electric conductors fast Semiconductor films fast Silicon fast Surface chemistry fast Silicon Electric conductors Semiconductor films Surface chemistry Silicone (DE-588)4127342-4 gnd rswk-swf Silicone (DE-588)4127342-4 s 1\p DE-604 Strausser, Yale Sonstige oth Brundle, C. Richard Sonstige oth Evans, Charles A. Sonstige oth Erscheint auch als Druck-Ausgabe Characterization in silicon processing New York : Momentum Press, 2010 1606501097 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Characterization in silicon processing = Silicon processing With a focus on the use of materials characterization techniques for silicon-based semiconductors, this volume in the Materials Characterization series focuses on the process flow of silicon wafer manufacture where materials properties, processing and associated problems are brought to the fore. The book is organized by the types of materials commonly associated with integrated silicon semiconductor circuits and the typical processes involved for each such material, including deposition, thermal treatment, and lithography. Readers will find features such as: -- The essential processes of Silic TECHNOLOGY & ENGINEERING / Material Science bisacsh Electric conductors fast Semiconductor films fast Silicon fast Surface chemistry fast Silicon Electric conductors Semiconductor films Surface chemistry Silicone (DE-588)4127342-4 gnd |
| subject_GND | (DE-588)4127342-4 |
| title | Characterization in silicon processing = Silicon processing |
| title_alt | Silicon processing |
| title_auth | Characterization in silicon processing = Silicon processing |
| title_exact_search | Characterization in silicon processing = Silicon processing |
| title_full | Characterization in silicon processing = Silicon processing editor, Yale Strausser ; series editors, C. Richard Brundle and Charles A. Evans |
| title_fullStr | Characterization in silicon processing = Silicon processing editor, Yale Strausser ; series editors, C. Richard Brundle and Charles A. Evans |
| title_full_unstemmed | Characterization in silicon processing = Silicon processing editor, Yale Strausser ; series editors, C. Richard Brundle and Charles A. Evans |
| title_short | Characterization in silicon processing |
| title_sort | characterization in silicon processing silicon processing |
| title_sub | = Silicon processing |
| topic | TECHNOLOGY & ENGINEERING / Material Science bisacsh Electric conductors fast Semiconductor films fast Silicon fast Surface chemistry fast Silicon Electric conductors Semiconductor films Surface chemistry Silicone (DE-588)4127342-4 gnd |
| topic_facet | TECHNOLOGY & ENGINEERING / Material Science Electric conductors Semiconductor films Silicon Surface chemistry Silicon Electric conductors Semiconductor films Surface chemistry Silicone |
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