Micro System Technologies 90: 1st International Conference on Micro Electro, Opto, Mechanic Systems and Components Berlin, 10–13 September 1990
On September 10-13, 1990, the first international meeting on Microsystem Technologies takes place at the Berlin International Congress Center. Most of the traditional congresses deal with themes that become more and more specific, and only a small part of the scientific world is reflected. The Micro...
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| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Berlin, Heidelberg
Springer Berlin Heidelberg
1990
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| Schlagworte: | |
| Online-Zugang: | BTU01 Volltext |
| Zusammenfassung: | On September 10-13, 1990, the first international meeting on Microsystem Technologies takes place at the Berlin International Congress Center. Most of the traditional congresses deal with themes that become more and more specific, and only a small part of the scientific world is reflected. The Micro System Technologies is attempting to take the opposite direction: During the last two decades the development of microelectronics was characterized by a tremendous increase of complexity of integrated circuits. At the same time the fields of microoptics and micromechanics have been developed to an advanced state of the art by the application of thin film and semiconductor technologies. The trend of the future development is to increase the integration density by combining the microelectronic, microoptic, and micro mechanic aspects to new complex multifunctional systems, which are able to comprise sensors, actuators, analogue and digital circuits on the same chip or on multichip-modules. Microsystems will lead to extensions of the field of microelectronic applications with important technical alterations and can open new considerable markets. For the realization of economical solutions for microsystems a lot of interdisciplinary cooperation and know-how has to be developed. New materials for sensitive layers, substrates, conducting, semiconducting, or isolating thin films are the basis for the development of new technologies. The increasing complexity leads to increasing interaction among electrical and non-electrical quantities |
| Beschreibung: | 1 Online-Ressource (XV, 858 p) |
| ISBN: | 9783642456787 |
| DOI: | 10.1007/978-3-642-45678-7 |
Internformat
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| 520 | |a On September 10-13, 1990, the first international meeting on Microsystem Technologies takes place at the Berlin International Congress Center. Most of the traditional congresses deal with themes that become more and more specific, and only a small part of the scientific world is reflected. The Micro System Technologies is attempting to take the opposite direction: During the last two decades the development of microelectronics was characterized by a tremendous increase of complexity of integrated circuits. At the same time the fields of microoptics and micromechanics have been developed to an advanced state of the art by the application of thin film and semiconductor technologies. The trend of the future development is to increase the integration density by combining the microelectronic, microoptic, and micro mechanic aspects to new complex multifunctional systems, which are able to comprise sensors, actuators, analogue and digital circuits on the same chip or on multichip-modules. Microsystems will lead to extensions of the field of microelectronic applications with important technical alterations and can open new considerable markets. For the realization of economical solutions for microsystems a lot of interdisciplinary cooperation and know-how has to be developed. New materials for sensitive layers, substrates, conducting, semiconducting, or isolating thin films are the basis for the development of new technologies. The increasing complexity leads to increasing interaction among electrical and non-electrical quantities | ||
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| spelling | Micro System Technologies 90 1st International Conference on Micro Electro, Opto, Mechanic Systems and Components Berlin, 10–13 September 1990 edited by Herbert Reichl Berlin, Heidelberg Springer Berlin Heidelberg 1990 1 Online-Ressource (XV, 858 p) txt rdacontent c rdamedia cr rdacarrier On September 10-13, 1990, the first international meeting on Microsystem Technologies takes place at the Berlin International Congress Center. Most of the traditional congresses deal with themes that become more and more specific, and only a small part of the scientific world is reflected. The Micro System Technologies is attempting to take the opposite direction: During the last two decades the development of microelectronics was characterized by a tremendous increase of complexity of integrated circuits. At the same time the fields of microoptics and micromechanics have been developed to an advanced state of the art by the application of thin film and semiconductor technologies. The trend of the future development is to increase the integration density by combining the microelectronic, microoptic, and micro mechanic aspects to new complex multifunctional systems, which are able to comprise sensors, actuators, analogue and digital circuits on the same chip or on multichip-modules. Microsystems will lead to extensions of the field of microelectronic applications with important technical alterations and can open new considerable markets. For the realization of economical solutions for microsystems a lot of interdisciplinary cooperation and know-how has to be developed. New materials for sensitive layers, substrates, conducting, semiconducting, or isolating thin films are the basis for the development of new technologies. The increasing complexity leads to increasing interaction among electrical and non-electrical quantities Engineering Electronics and Microelectronics, Instrumentation Optics, Lasers, Photonics, Optical Devices Engineering, general Electronics Microelectronics Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf 1\p (DE-588)1071861417 Konferenzschrift 1990 Berlin West gnd-content 2\p (DE-588)1071861417 Konferenzschrift 1990 Berlin gnd-content Mikrosystemtechnik (DE-588)4221617-5 s 3\p DE-604 Reichl, Herbert edt Erscheint auch als Druck-Ausgabe 9783642456800 https://doi.org/10.1007/978-3-642-45678-7 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Micro System Technologies 90 1st International Conference on Micro Electro, Opto, Mechanic Systems and Components Berlin, 10–13 September 1990 Engineering Electronics and Microelectronics, Instrumentation Optics, Lasers, Photonics, Optical Devices Engineering, general Electronics Microelectronics Mikrosystemtechnik (DE-588)4221617-5 gnd |
| subject_GND | (DE-588)4221617-5 (DE-588)1071861417 |
| title | Micro System Technologies 90 1st International Conference on Micro Electro, Opto, Mechanic Systems and Components Berlin, 10–13 September 1990 |
| title_auth | Micro System Technologies 90 1st International Conference on Micro Electro, Opto, Mechanic Systems and Components Berlin, 10–13 September 1990 |
| title_exact_search | Micro System Technologies 90 1st International Conference on Micro Electro, Opto, Mechanic Systems and Components Berlin, 10–13 September 1990 |
| title_full | Micro System Technologies 90 1st International Conference on Micro Electro, Opto, Mechanic Systems and Components Berlin, 10–13 September 1990 edited by Herbert Reichl |
| title_fullStr | Micro System Technologies 90 1st International Conference on Micro Electro, Opto, Mechanic Systems and Components Berlin, 10–13 September 1990 edited by Herbert Reichl |
| title_full_unstemmed | Micro System Technologies 90 1st International Conference on Micro Electro, Opto, Mechanic Systems and Components Berlin, 10–13 September 1990 edited by Herbert Reichl |
| title_short | Micro System Technologies 90 |
| title_sort | micro system technologies 90 1st international conference on micro electro opto mechanic systems and components berlin 10 13 september 1990 |
| title_sub | 1st International Conference on Micro Electro, Opto, Mechanic Systems and Components Berlin, 10–13 September 1990 |
| topic | Engineering Electronics and Microelectronics, Instrumentation Optics, Lasers, Photonics, Optical Devices Engineering, general Electronics Microelectronics Mikrosystemtechnik (DE-588)4221617-5 gnd |
| topic_facet | Engineering Electronics and Microelectronics, Instrumentation Optics, Lasers, Photonics, Optical Devices Engineering, general Electronics Microelectronics Mikrosystemtechnik Konferenzschrift 1990 Berlin West Konferenzschrift 1990 Berlin |
| url | https://doi.org/10.1007/978-3-642-45678-7 |
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