Theory and Application of Laser Chemical Vapor Deposition:

In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemi...

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Bibliographische Detailangaben
Hauptverfasser: Mazumder, Jyoti (VerfasserIn), Kar, Aravinda (VerfasserIn)
Format: Elektronisch E-Book
Sprache:English
Veröffentlicht: Boston, MA Springer US 1995
Schriftenreihe:Lasers, Photonics, and Electro-Optics
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Online-Zugang:BTU01
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Zusammenfassung:In this monograph, the authors offer a comprehensive examination of the latest research on Laser Chemical Vapor Deposition (LCVD). Chapters explore the physics of LCVD as well as the principles of a wide range of related phenomena-including laser-matter interactions, heat transfer, fluid flow, chemical kinetics, and adsorption. With this reference, researchers will discover how to apply these principles to developing theories about various types of LCVD processes; gain greater insight into the basic mechanisms of LCVD; and obtain the ability to design and control an LCVD system
Beschreibung:1 Online-Ressource (XII, 396 p)
ISBN:9781489914309
DOI:10.1007/978-1-4899-1430-9

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