Methodology for the Modeling and Simulation of Microsystems:
Over the past two decades, technologies for microsystems fabrication have made considerable progress. This has made possible a large variety of new commercial devices ranging, for example, from integrated pressure and acceleration microsensors to active micromirror arrays for image projection. In th...
Gespeichert in:
1. Verfasser: | |
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Format: | Elektronisch E-Book |
Sprache: | English |
Veröffentlicht: |
Boston, MA
Springer US
1998
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Schriftenreihe: | Microsystems
2 |
Schlagworte: | |
Online-Zugang: | BTU01 Volltext |
Zusammenfassung: | Over the past two decades, technologies for microsystems fabrication have made considerable progress. This has made possible a large variety of new commercial devices ranging, for example, from integrated pressure and acceleration microsensors to active micromirror arrays for image projection. In the near future, there will be a number of new devices, which will be commercialized in many application areas. The field of microsystems is characterized by its wide diversity, which requires a multidisciplinary approach for design and processes as well as in application areas. Although there is a common technological background derived from integrated circuits, it is clear that microsystems will require additional application-specific technologies. Since most microsystem technologies are based on batch processing and dedicated to mass production, prototyping is likely to be an expensive and time-consuming step. It is recognized that standardization of the processes as well as of the design tools will definitely help reduce the entry cost of microsystems. This creates a very challenging situation for the design, modeling and simulation of microsystems. Methodology for the Modeling and Simulation of Microsystems is the first book to give an overview of the problems associated with modeling and simulation of microsystems. It introduces a new methodology, which is supported by several examples. It should provide a useful starting point for both scientists and engineers seeking background information for efficient design of microsystems |
Beschreibung: | 1 Online-Ressource (XXVIII, 136 p) |
ISBN: | 9781461556213 |
DOI: | 10.1007/978-1-4615-5621-3 |
Internformat
MARC
LEADER | 00000nmm a2200000zcb4500 | ||
---|---|---|---|
001 | BV045186227 | ||
003 | DE-604 | ||
005 | 00000000000000.0 | ||
007 | cr|uuu---uuuuu | ||
008 | 180912s1998 |||| o||u| ||||||eng d | ||
020 | |a 9781461556213 |9 978-1-4615-5621-3 | ||
024 | 7 | |a 10.1007/978-1-4615-5621-3 |2 doi | |
035 | |a (ZDB-2-ENG)978-1-4615-5621-3 | ||
035 | |a (OCoLC)1184366767 | ||
035 | |a (DE-599)BVBBV045186227 | ||
040 | |a DE-604 |b ger |e aacr | ||
041 | 0 | |a eng | |
049 | |a DE-634 | ||
082 | 0 | |a 621.3815 |2 23 | |
100 | 1 | |a Romanowicz, Bartlomiej F. |e Verfasser |4 aut | |
245 | 1 | 0 | |a Methodology for the Modeling and Simulation of Microsystems |c by Bartlomiej F. Romanowicz |
264 | 1 | |a Boston, MA |b Springer US |c 1998 | |
300 | |a 1 Online-Ressource (XXVIII, 136 p) | ||
336 | |b txt |2 rdacontent | ||
337 | |b c |2 rdamedia | ||
338 | |b cr |2 rdacarrier | ||
490 | 0 | |a Microsystems |v 2 | |
520 | |a Over the past two decades, technologies for microsystems fabrication have made considerable progress. This has made possible a large variety of new commercial devices ranging, for example, from integrated pressure and acceleration microsensors to active micromirror arrays for image projection. In the near future, there will be a number of new devices, which will be commercialized in many application areas. The field of microsystems is characterized by its wide diversity, which requires a multidisciplinary approach for design and processes as well as in application areas. Although there is a common technological background derived from integrated circuits, it is clear that microsystems will require additional application-specific technologies. Since most microsystem technologies are based on batch processing and dedicated to mass production, prototyping is likely to be an expensive and time-consuming step. It is recognized that standardization of the processes as well as of the design tools will definitely help reduce the entry cost of microsystems. This creates a very challenging situation for the design, modeling and simulation of microsystems. Methodology for the Modeling and Simulation of Microsystems is the first book to give an overview of the problems associated with modeling and simulation of microsystems. It introduces a new methodology, which is supported by several examples. It should provide a useful starting point for both scientists and engineers seeking background information for efficient design of microsystems | ||
650 | 4 | |a Engineering | |
650 | 4 | |a Circuits and Systems | |
650 | 4 | |a Electrical Engineering | |
650 | 4 | |a Engineering | |
650 | 4 | |a Electrical engineering | |
650 | 4 | |a Electronic circuits | |
650 | 0 | 7 | |a Computersimulation |0 (DE-588)4148259-1 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |2 gnd |9 rswk-swf |
689 | 0 | 0 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |D s |
689 | 0 | 1 | |a Computersimulation |0 (DE-588)4148259-1 |D s |
689 | 0 | |8 1\p |5 DE-604 | |
776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe |z 9781461375722 |
856 | 4 | 0 | |u https://doi.org/10.1007/978-1-4615-5621-3 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
912 | |a ZDB-2-ENG | ||
940 | 1 | |q ZDB-2-ENG_Archiv | |
999 | |a oai:aleph.bib-bvb.de:BVB01-030575404 | ||
883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
966 | e | |u https://doi.org/10.1007/978-1-4615-5621-3 |l BTU01 |p ZDB-2-ENG |q ZDB-2-ENG_Archiv |x Verlag |3 Volltext |
Datensatz im Suchindex
_version_ | 1804178876970041344 |
---|---|
any_adam_object | |
author | Romanowicz, Bartlomiej F. |
author_facet | Romanowicz, Bartlomiej F. |
author_role | aut |
author_sort | Romanowicz, Bartlomiej F. |
author_variant | b f r bf bfr |
building | Verbundindex |
bvnumber | BV045186227 |
collection | ZDB-2-ENG |
ctrlnum | (ZDB-2-ENG)978-1-4615-5621-3 (OCoLC)1184366767 (DE-599)BVBBV045186227 |
dewey-full | 621.3815 |
dewey-hundreds | 600 - Technology (Applied sciences) |
dewey-ones | 621 - Applied physics |
dewey-raw | 621.3815 |
dewey-search | 621.3815 |
dewey-sort | 3621.3815 |
dewey-tens | 620 - Engineering and allied operations |
discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
doi_str_mv | 10.1007/978-1-4615-5621-3 |
format | Electronic eBook |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>03418nmm a2200517zcb4500</leader><controlfield tag="001">BV045186227</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">180912s1998 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9781461556213</subfield><subfield code="9">978-1-4615-5621-3</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/978-1-4615-5621-3</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-2-ENG)978-1-4615-5621-3</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)1184366767</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV045186227</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-634</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815</subfield><subfield code="2">23</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Romanowicz, Bartlomiej F.</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Methodology for the Modeling and Simulation of Microsystems</subfield><subfield code="c">by Bartlomiej F. Romanowicz</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Boston, MA</subfield><subfield code="b">Springer US</subfield><subfield code="c">1998</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (XXVIII, 136 p)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Microsystems</subfield><subfield code="v">2</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Over the past two decades, technologies for microsystems fabrication have made considerable progress. This has made possible a large variety of new commercial devices ranging, for example, from integrated pressure and acceleration microsensors to active micromirror arrays for image projection. In the near future, there will be a number of new devices, which will be commercialized in many application areas. The field of microsystems is characterized by its wide diversity, which requires a multidisciplinary approach for design and processes as well as in application areas. Although there is a common technological background derived from integrated circuits, it is clear that microsystems will require additional application-specific technologies. Since most microsystem technologies are based on batch processing and dedicated to mass production, prototyping is likely to be an expensive and time-consuming step. It is recognized that standardization of the processes as well as of the design tools will definitely help reduce the entry cost of microsystems. This creates a very challenging situation for the design, modeling and simulation of microsystems. Methodology for the Modeling and Simulation of Microsystems is the first book to give an overview of the problems associated with modeling and simulation of microsystems. It introduces a new methodology, which is supported by several examples. It should provide a useful starting point for both scientists and engineers seeking background information for efficient design of microsystems</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Engineering</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Circuits and Systems</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electrical Engineering</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Engineering</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electrical engineering</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electronic circuits</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Computersimulation</subfield><subfield code="0">(DE-588)4148259-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikrosystemtechnik</subfield><subfield code="0">(DE-588)4221617-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Mikrosystemtechnik</subfield><subfield code="0">(DE-588)4221617-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Computersimulation</subfield><subfield code="0">(DE-588)4148259-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe</subfield><subfield code="z">9781461375722</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1007/978-1-4615-5621-3</subfield><subfield code="x">Verlag</subfield><subfield code="z">URL des Erstveröffentlichers</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-2-ENG</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">ZDB-2-ENG_Archiv</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-030575404</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-1-4615-5621-3</subfield><subfield code="l">BTU01</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="q">ZDB-2-ENG_Archiv</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
id | DE-604.BV045186227 |
illustrated | Not Illustrated |
indexdate | 2024-07-10T08:10:57Z |
institution | BVB |
isbn | 9781461556213 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030575404 |
oclc_num | 1184366767 |
open_access_boolean | |
owner | DE-634 |
owner_facet | DE-634 |
physical | 1 Online-Ressource (XXVIII, 136 p) |
psigel | ZDB-2-ENG ZDB-2-ENG_Archiv ZDB-2-ENG ZDB-2-ENG_Archiv |
publishDate | 1998 |
publishDateSearch | 1998 |
publishDateSort | 1998 |
publisher | Springer US |
record_format | marc |
series2 | Microsystems |
spelling | Romanowicz, Bartlomiej F. Verfasser aut Methodology for the Modeling and Simulation of Microsystems by Bartlomiej F. Romanowicz Boston, MA Springer US 1998 1 Online-Ressource (XXVIII, 136 p) txt rdacontent c rdamedia cr rdacarrier Microsystems 2 Over the past two decades, technologies for microsystems fabrication have made considerable progress. This has made possible a large variety of new commercial devices ranging, for example, from integrated pressure and acceleration microsensors to active micromirror arrays for image projection. In the near future, there will be a number of new devices, which will be commercialized in many application areas. The field of microsystems is characterized by its wide diversity, which requires a multidisciplinary approach for design and processes as well as in application areas. Although there is a common technological background derived from integrated circuits, it is clear that microsystems will require additional application-specific technologies. Since most microsystem technologies are based on batch processing and dedicated to mass production, prototyping is likely to be an expensive and time-consuming step. It is recognized that standardization of the processes as well as of the design tools will definitely help reduce the entry cost of microsystems. This creates a very challenging situation for the design, modeling and simulation of microsystems. Methodology for the Modeling and Simulation of Microsystems is the first book to give an overview of the problems associated with modeling and simulation of microsystems. It introduces a new methodology, which is supported by several examples. It should provide a useful starting point for both scientists and engineers seeking background information for efficient design of microsystems Engineering Circuits and Systems Electrical Engineering Electrical engineering Electronic circuits Computersimulation (DE-588)4148259-1 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 s Computersimulation (DE-588)4148259-1 s 1\p DE-604 Erscheint auch als Druck-Ausgabe 9781461375722 https://doi.org/10.1007/978-1-4615-5621-3 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
spellingShingle | Romanowicz, Bartlomiej F. Methodology for the Modeling and Simulation of Microsystems Engineering Circuits and Systems Electrical Engineering Electrical engineering Electronic circuits Computersimulation (DE-588)4148259-1 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
subject_GND | (DE-588)4148259-1 (DE-588)4221617-5 |
title | Methodology for the Modeling and Simulation of Microsystems |
title_auth | Methodology for the Modeling and Simulation of Microsystems |
title_exact_search | Methodology for the Modeling and Simulation of Microsystems |
title_full | Methodology for the Modeling and Simulation of Microsystems by Bartlomiej F. Romanowicz |
title_fullStr | Methodology for the Modeling and Simulation of Microsystems by Bartlomiej F. Romanowicz |
title_full_unstemmed | Methodology for the Modeling and Simulation of Microsystems by Bartlomiej F. Romanowicz |
title_short | Methodology for the Modeling and Simulation of Microsystems |
title_sort | methodology for the modeling and simulation of microsystems |
topic | Engineering Circuits and Systems Electrical Engineering Electrical engineering Electronic circuits Computersimulation (DE-588)4148259-1 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
topic_facet | Engineering Circuits and Systems Electrical Engineering Electrical engineering Electronic circuits Computersimulation Mikrosystemtechnik |
url | https://doi.org/10.1007/978-1-4615-5621-3 |
work_keys_str_mv | AT romanowiczbartlomiejf methodologyforthemodelingandsimulationofmicrosystems |