APA (7th ed.) Citation

Meyer, K. D., & Biesemans, S. (1998). Simulation of Semiconductor Processes and Devices 1998: SISPAD 98. Springer Vienna. https://doi.org/10.1007/978-3-7091-6827-1

Chicago Style (17th ed.) Citation

Meyer, Kristin De, and Serge Biesemans. Simulation of Semiconductor Processes and Devices 1998: SISPAD 98. Vienna: Springer Vienna, 1998. https://doi.org/10.1007/978-3-7091-6827-1.

MLA (9th ed.) Citation

Meyer, Kristin De, and Serge Biesemans. Simulation of Semiconductor Processes and Devices 1998: SISPAD 98. Springer Vienna, 1998. https://doi.org/10.1007/978-3-7091-6827-1.