Simulation of Semiconductor Processes and Devices 1998: SISPAD 98
This volume contains the proceedings of the 1998 International Conference on Simulation of Semiconductor Processes and Devices and provides an open forum for the presentation of the latest results and trends in modeling and simulation of semiconductor equipment, processes and devices. Topics include...
Gespeichert in:
| Weitere Verfasser: | , |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Vienna
Springer Vienna
1998
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| Schlagworte: | |
| Online-Zugang: | BTU01 Volltext |
| Zusammenfassung: | This volume contains the proceedings of the 1998 International Conference on Simulation of Semiconductor Processes and Devices and provides an open forum for the presentation of the latest results and trends in modeling and simulation of semiconductor equipment, processes and devices. Topics include: • semiconductor equipment simulation • process modeling and simulation • device modeling and simulation of complex structures • interconnect modeling • integrated systems for process, device, circuit simulation and optimisation • numerical methods and algorithms • compact modeling and parameter extraction • modeling for RF applications • simulation and modeling of new devices (heterojunction based, SET’s, quantum effect devices, laser based ...) |
| Beschreibung: | 1 Online-Ressource (XIV, 410 p) |
| ISBN: | 9783709168271 |
| DOI: | 10.1007/978-3-7091-6827-1 |
Internformat
MARC
| LEADER | 00000nmm a2200000zc 4500 | ||
|---|---|---|---|
| 001 | BV045185644 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 180912s1998 |||| o||u| ||||||eng d | ||
| 020 | |a 9783709168271 |9 978-3-7091-6827-1 | ||
| 024 | 7 | |a 10.1007/978-3-7091-6827-1 |2 doi | |
| 035 | |a (ZDB-2-ENG)978-3-7091-6827-1 | ||
| 035 | |a (OCoLC)1053826610 | ||
| 035 | |a (DE-599)BVBBV045185644 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-634 | ||
| 082 | 0 | |a 621.3815 |2 23 | |
| 245 | 1 | 0 | |a Simulation of Semiconductor Processes and Devices 1998 |b SISPAD 98 |c edited by Kristin De Meyer, Serge Biesemans |
| 264 | 1 | |a Vienna |b Springer Vienna |c 1998 | |
| 300 | |a 1 Online-Ressource (XIV, 410 p) | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 520 | |a This volume contains the proceedings of the 1998 International Conference on Simulation of Semiconductor Processes and Devices and provides an open forum for the presentation of the latest results and trends in modeling and simulation of semiconductor equipment, processes and devices. Topics include: • semiconductor equipment simulation • process modeling and simulation • device modeling and simulation of complex structures • interconnect modeling • integrated systems for process, device, circuit simulation and optimisation • numerical methods and algorithms • compact modeling and parameter extraction • modeling for RF applications • simulation and modeling of new devices (heterojunction based, SET’s, quantum effect devices, laser based ...) | ||
| 650 | 4 | |a Engineering | |
| 650 | 4 | |a Circuits and Systems | |
| 650 | 4 | |a Electronics and Microelectronics, Instrumentation | |
| 650 | 4 | |a Optical and Electronic Materials | |
| 650 | 4 | |a Simulation and Modeling | |
| 650 | 4 | |a Complexity | |
| 650 | 4 | |a Engineering | |
| 650 | 4 | |a Computer simulation | |
| 650 | 4 | |a Complexity, Computational | |
| 650 | 4 | |a Electronics | |
| 650 | 4 | |a Microelectronics | |
| 650 | 4 | |a Electronic circuits | |
| 650 | 4 | |a Optical materials | |
| 650 | 4 | |a Electronic materials | |
| 650 | 0 | 7 | |a Halbleiterbauelement |0 (DE-588)4113826-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Prozess |g Physik |0 (DE-588)4424693-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Computersimulation |0 (DE-588)4148259-1 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 655 | 7 | |8 1\p |0 (DE-588)1071861417 |a Konferenzschrift |y 1998 |z Löwen |2 gnd-content | |
| 689 | 0 | 0 | |a Computersimulation |0 (DE-588)4148259-1 |D s |
| 689 | 0 | 1 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 0 | 2 | |a Prozess |g Physik |0 (DE-588)4424693-6 |D s |
| 689 | 0 | 3 | |a Halbleiterbauelement |0 (DE-588)4113826-0 |D s |
| 689 | 0 | |8 2\p |5 DE-604 | |
| 700 | 1 | |a Meyer, Kristin De |4 edt | |
| 700 | 1 | |a Biesemans, Serge |4 edt | |
| 776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe |z 9783709174159 |
| 856 | 4 | 0 | |u https://doi.org/10.1007/978-3-7091-6827-1 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
| 912 | |a ZDB-2-ENG | ||
| 940 | 1 | |q ZDB-2-ENG_Archiv | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-030574822 | ||
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 883 | 1 | |8 2\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 966 | e | |u https://doi.org/10.1007/978-3-7091-6827-1 |l BTU01 |p ZDB-2-ENG |q ZDB-2-ENG_Archiv |x Verlag |3 Volltext | |
Datensatz im Suchindex
| _version_ | 1804178875768373248 |
|---|---|
| any_adam_object | |
| author2 | Meyer, Kristin De Biesemans, Serge |
| author2_role | edt edt |
| author2_variant | k d m kd kdm s b sb |
| author_facet | Meyer, Kristin De Biesemans, Serge |
| building | Verbundindex |
| bvnumber | BV045185644 |
| collection | ZDB-2-ENG |
| ctrlnum | (ZDB-2-ENG)978-3-7091-6827-1 (OCoLC)1053826610 (DE-599)BVBBV045185644 |
| dewey-full | 621.3815 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815 |
| dewey-search | 621.3815 |
| dewey-sort | 3621.3815 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| doi_str_mv | 10.1007/978-3-7091-6827-1 |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>03363nmm a2200685zc 4500</leader><controlfield tag="001">BV045185644</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">180912s1998 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783709168271</subfield><subfield code="9">978-3-7091-6827-1</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/978-3-7091-6827-1</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-2-ENG)978-3-7091-6827-1</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)1053826610</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV045185644</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-634</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.3815</subfield><subfield code="2">23</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Simulation of Semiconductor Processes and Devices 1998</subfield><subfield code="b">SISPAD 98</subfield><subfield code="c">edited by Kristin De Meyer, Serge Biesemans</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Vienna</subfield><subfield code="b">Springer Vienna</subfield><subfield code="c">1998</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (XIV, 410 p)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">This volume contains the proceedings of the 1998 International Conference on Simulation of Semiconductor Processes and Devices and provides an open forum for the presentation of the latest results and trends in modeling and simulation of semiconductor equipment, processes and devices. Topics include: • semiconductor equipment simulation • process modeling and simulation • device modeling and simulation of complex structures • interconnect modeling • integrated systems for process, device, circuit simulation and optimisation • numerical methods and algorithms • compact modeling and parameter extraction • modeling for RF applications • simulation and modeling of new devices (heterojunction based, SET’s, quantum effect devices, laser based ...)</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Engineering</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Circuits and Systems</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electronics and Microelectronics, Instrumentation</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Optical and Electronic Materials</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Simulation and Modeling</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Complexity</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Engineering</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Computer simulation</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Complexity, Computational</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electronics</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectronics</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electronic circuits</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Optical materials</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electronic materials</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiterbauelement</subfield><subfield code="0">(DE-588)4113826-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Prozess</subfield><subfield code="g">Physik</subfield><subfield code="0">(DE-588)4424693-6</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Computersimulation</subfield><subfield code="0">(DE-588)4148259-1</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="8">1\p</subfield><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="y">1998</subfield><subfield code="z">Löwen</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Computersimulation</subfield><subfield code="0">(DE-588)4148259-1</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Prozess</subfield><subfield code="g">Physik</subfield><subfield code="0">(DE-588)4424693-6</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="3"><subfield code="a">Halbleiterbauelement</subfield><subfield code="0">(DE-588)4113826-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="8">2\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Meyer, Kristin De</subfield><subfield code="4">edt</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Biesemans, Serge</subfield><subfield code="4">edt</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe</subfield><subfield code="z">9783709174159</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1007/978-3-7091-6827-1</subfield><subfield code="x">Verlag</subfield><subfield code="z">URL des Erstveröffentlichers</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-2-ENG</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">ZDB-2-ENG_Archiv</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-030574822</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">2\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-7091-6827-1</subfield><subfield code="l">BTU01</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="q">ZDB-2-ENG_Archiv</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| genre | 1\p (DE-588)1071861417 Konferenzschrift 1998 Löwen gnd-content |
| genre_facet | Konferenzschrift 1998 Löwen |
| id | DE-604.BV045185644 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T08:10:55Z |
| institution | BVB |
| isbn | 9783709168271 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030574822 |
| oclc_num | 1053826610 |
| open_access_boolean | |
| owner | DE-634 |
| owner_facet | DE-634 |
| physical | 1 Online-Ressource (XIV, 410 p) |
| psigel | ZDB-2-ENG ZDB-2-ENG_Archiv ZDB-2-ENG ZDB-2-ENG_Archiv |
| publishDate | 1998 |
| publishDateSearch | 1998 |
| publishDateSort | 1998 |
| publisher | Springer Vienna |
| record_format | marc |
| spelling | Simulation of Semiconductor Processes and Devices 1998 SISPAD 98 edited by Kristin De Meyer, Serge Biesemans Vienna Springer Vienna 1998 1 Online-Ressource (XIV, 410 p) txt rdacontent c rdamedia cr rdacarrier This volume contains the proceedings of the 1998 International Conference on Simulation of Semiconductor Processes and Devices and provides an open forum for the presentation of the latest results and trends in modeling and simulation of semiconductor equipment, processes and devices. Topics include: • semiconductor equipment simulation • process modeling and simulation • device modeling and simulation of complex structures • interconnect modeling • integrated systems for process, device, circuit simulation and optimisation • numerical methods and algorithms • compact modeling and parameter extraction • modeling for RF applications • simulation and modeling of new devices (heterojunction based, SET’s, quantum effect devices, laser based ...) Engineering Circuits and Systems Electronics and Microelectronics, Instrumentation Optical and Electronic Materials Simulation and Modeling Complexity Computer simulation Complexity, Computational Electronics Microelectronics Electronic circuits Optical materials Electronic materials Halbleiterbauelement (DE-588)4113826-0 gnd rswk-swf Prozess Physik (DE-588)4424693-6 gnd rswk-swf Computersimulation (DE-588)4148259-1 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf 1\p (DE-588)1071861417 Konferenzschrift 1998 Löwen gnd-content Computersimulation (DE-588)4148259-1 s Halbleiter (DE-588)4022993-2 s Prozess Physik (DE-588)4424693-6 s Halbleiterbauelement (DE-588)4113826-0 s 2\p DE-604 Meyer, Kristin De edt Biesemans, Serge edt Erscheint auch als Druck-Ausgabe 9783709174159 https://doi.org/10.1007/978-3-7091-6827-1 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Simulation of Semiconductor Processes and Devices 1998 SISPAD 98 Engineering Circuits and Systems Electronics and Microelectronics, Instrumentation Optical and Electronic Materials Simulation and Modeling Complexity Computer simulation Complexity, Computational Electronics Microelectronics Electronic circuits Optical materials Electronic materials Halbleiterbauelement (DE-588)4113826-0 gnd Prozess Physik (DE-588)4424693-6 gnd Computersimulation (DE-588)4148259-1 gnd Halbleiter (DE-588)4022993-2 gnd |
| subject_GND | (DE-588)4113826-0 (DE-588)4424693-6 (DE-588)4148259-1 (DE-588)4022993-2 (DE-588)1071861417 |
| title | Simulation of Semiconductor Processes and Devices 1998 SISPAD 98 |
| title_auth | Simulation of Semiconductor Processes and Devices 1998 SISPAD 98 |
| title_exact_search | Simulation of Semiconductor Processes and Devices 1998 SISPAD 98 |
| title_full | Simulation of Semiconductor Processes and Devices 1998 SISPAD 98 edited by Kristin De Meyer, Serge Biesemans |
| title_fullStr | Simulation of Semiconductor Processes and Devices 1998 SISPAD 98 edited by Kristin De Meyer, Serge Biesemans |
| title_full_unstemmed | Simulation of Semiconductor Processes and Devices 1998 SISPAD 98 edited by Kristin De Meyer, Serge Biesemans |
| title_short | Simulation of Semiconductor Processes and Devices 1998 |
| title_sort | simulation of semiconductor processes and devices 1998 sispad 98 |
| title_sub | SISPAD 98 |
| topic | Engineering Circuits and Systems Electronics and Microelectronics, Instrumentation Optical and Electronic Materials Simulation and Modeling Complexity Computer simulation Complexity, Computational Electronics Microelectronics Electronic circuits Optical materials Electronic materials Halbleiterbauelement (DE-588)4113826-0 gnd Prozess Physik (DE-588)4424693-6 gnd Computersimulation (DE-588)4148259-1 gnd Halbleiter (DE-588)4022993-2 gnd |
| topic_facet | Engineering Circuits and Systems Electronics and Microelectronics, Instrumentation Optical and Electronic Materials Simulation and Modeling Complexity Computer simulation Complexity, Computational Electronics Microelectronics Electronic circuits Optical materials Electronic materials Halbleiterbauelement Prozess Physik Computersimulation Halbleiter Konferenzschrift 1998 Löwen |
| url | https://doi.org/10.1007/978-3-7091-6827-1 |
| work_keys_str_mv | AT meyerkristinde simulationofsemiconductorprocessesanddevices1998sispad98 AT biesemansserge simulationofsemiconductorprocessesanddevices1998sispad98 |