Bringing Scanning Probe Microscopy up to Speed:
Bringing Scanning Probe Microscopy Up to Speed introduces the principles of scanning probe systems with particular emphasis on techniques for increasing speed. The authors include useful information on the characteristics and limitations of current state-of-the-art machines as well as the properties...
Gespeichert in:
| Hauptverfasser: | , , |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Boston, MA
Springer US
1999
|
| Schriftenreihe: | Microsystems
3 |
| Schlagworte: | |
| Online-Zugang: | BTU01 URL des Erstveröffentlichers |
| Zusammenfassung: | Bringing Scanning Probe Microscopy Up to Speed introduces the principles of scanning probe systems with particular emphasis on techniques for increasing speed. The authors include useful information on the characteristics and limitations of current state-of-the-art machines as well as the properties of the systems that will follow in the future. The basic approach is two-fold. First, fast scanning systems for single probes are treated and, second, systems with multiple probes operating in parallel are presented. The key components of the SPM are the mechanical microcantilever with integrated tip and the systems used to measure its deflection. In essence, the entire apparatus is devoted to moving the tip over a surface with a well-controlled force. The mechanical response of the actuator that governs the force is of the utmost importance since it determines the scanning speed. The mechanical response relates directly to the size of the actuator; smaller is faster. Traditional scanning probe microscopes rely on piezoelectric tubes of centimeter size to move the probe. In future scanning probe systems, the large actuators will be replaced with cantilevers where the actuators are integrated on the beam. These will be combined in arrays of multiple cantilevers with MEMS as the key technology for the fabrication process |
| Beschreibung: | 1 Online-Ressource (XIII, 159 p) |
| ISBN: | 9781461551676 |
| DOI: | 10.1007/978-1-4615-5167-6 |
Internformat
MARC
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| 100 | 1 | |a Minne, S. C. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Bringing Scanning Probe Microscopy up to Speed |c by S. C. Minne, S. R. Manalis, C. F. Quate |
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| 490 | 0 | |a Microsystems |v 3 | |
| 520 | |a Bringing Scanning Probe Microscopy Up to Speed introduces the principles of scanning probe systems with particular emphasis on techniques for increasing speed. The authors include useful information on the characteristics and limitations of current state-of-the-art machines as well as the properties of the systems that will follow in the future. The basic approach is two-fold. First, fast scanning systems for single probes are treated and, second, systems with multiple probes operating in parallel are presented. The key components of the SPM are the mechanical microcantilever with integrated tip and the systems used to measure its deflection. In essence, the entire apparatus is devoted to moving the tip over a surface with a well-controlled force. The mechanical response of the actuator that governs the force is of the utmost importance since it determines the scanning speed. The mechanical response relates directly to the size of the actuator; smaller is faster. Traditional scanning probe microscopes rely on piezoelectric tubes of centimeter size to move the probe. In future scanning probe systems, the large actuators will be replaced with cantilevers where the actuators are integrated on the beam. These will be combined in arrays of multiple cantilevers with MEMS as the key technology for the fabrication process | ||
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| 650 | 4 | |a Optical and Electronic Materials | |
| 650 | 4 | |a Surfaces and Interfaces, Thin Films | |
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| 700 | 1 | |a Manalis, S. R. |4 aut | |
| 700 | 1 | |a Quate, C. F. |4 aut | |
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Datensatz im Suchindex
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| author | Minne, S. C. Manalis, S. R. Quate, C. F. |
| author_facet | Minne, S. C. Manalis, S. R. Quate, C. F. |
| author_role | aut aut aut |
| author_sort | Minne, S. C. |
| author_variant | s c m sc scm s r m sr srm c f q cf cfq |
| building | Verbundindex |
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| collection | ZDB-2-ENG |
| ctrlnum | (ZDB-2-ENG)978-1-4615-5167-6 (OCoLC)1053844956 (DE-599)BVBBV045185217 |
| dewey-full | 620.11295 620.11297 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620.11295 620.11297 |
| dewey-search | 620.11295 620.11297 |
| dewey-sort | 3620.11295 |
| dewey-tens | 620 - Engineering and allied operations |
| doi_str_mv | 10.1007/978-1-4615-5167-6 |
| format | Electronic eBook |
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| id | DE-604.BV045185217 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T08:10:55Z |
| institution | BVB |
| isbn | 9781461551676 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030574395 |
| oclc_num | 1053844956 |
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| owner_facet | DE-634 |
| physical | 1 Online-Ressource (XIII, 159 p) |
| psigel | ZDB-2-ENG ZDB-2-ENG_Archiv ZDB-2-ENG ZDB-2-ENG_Archiv |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| publisher | Springer US |
| record_format | marc |
| series2 | Microsystems |
| spelling | Minne, S. C. Verfasser aut Bringing Scanning Probe Microscopy up to Speed by S. C. Minne, S. R. Manalis, C. F. Quate Boston, MA Springer US 1999 1 Online-Ressource (XIII, 159 p) txt rdacontent c rdamedia cr rdacarrier Microsystems 3 Bringing Scanning Probe Microscopy Up to Speed introduces the principles of scanning probe systems with particular emphasis on techniques for increasing speed. The authors include useful information on the characteristics and limitations of current state-of-the-art machines as well as the properties of the systems that will follow in the future. The basic approach is two-fold. First, fast scanning systems for single probes are treated and, second, systems with multiple probes operating in parallel are presented. The key components of the SPM are the mechanical microcantilever with integrated tip and the systems used to measure its deflection. In essence, the entire apparatus is devoted to moving the tip over a surface with a well-controlled force. The mechanical response of the actuator that governs the force is of the utmost importance since it determines the scanning speed. The mechanical response relates directly to the size of the actuator; smaller is faster. Traditional scanning probe microscopes rely on piezoelectric tubes of centimeter size to move the probe. In future scanning probe systems, the large actuators will be replaced with cantilevers where the actuators are integrated on the beam. These will be combined in arrays of multiple cantilevers with MEMS as the key technology for the fabrication process Materials Science Optical and Electronic Materials Surfaces and Interfaces, Thin Films Electrical Engineering Characterization and Evaluation of Materials Materials science Electrical engineering Optical materials Electronic materials Materials / Surfaces Thin films Manalis, S. R. aut Quate, C. F. aut Erscheint auch als Druck-Ausgabe 9781461373537 https://doi.org/10.1007/978-1-4615-5167-6 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Minne, S. C. Manalis, S. R. Quate, C. F. Bringing Scanning Probe Microscopy up to Speed Materials Science Optical and Electronic Materials Surfaces and Interfaces, Thin Films Electrical Engineering Characterization and Evaluation of Materials Materials science Electrical engineering Optical materials Electronic materials Materials / Surfaces Thin films |
| title | Bringing Scanning Probe Microscopy up to Speed |
| title_auth | Bringing Scanning Probe Microscopy up to Speed |
| title_exact_search | Bringing Scanning Probe Microscopy up to Speed |
| title_full | Bringing Scanning Probe Microscopy up to Speed by S. C. Minne, S. R. Manalis, C. F. Quate |
| title_fullStr | Bringing Scanning Probe Microscopy up to Speed by S. C. Minne, S. R. Manalis, C. F. Quate |
| title_full_unstemmed | Bringing Scanning Probe Microscopy up to Speed by S. C. Minne, S. R. Manalis, C. F. Quate |
| title_short | Bringing Scanning Probe Microscopy up to Speed |
| title_sort | bringing scanning probe microscopy up to speed |
| topic | Materials Science Optical and Electronic Materials Surfaces and Interfaces, Thin Films Electrical Engineering Characterization and Evaluation of Materials Materials science Electrical engineering Optical materials Electronic materials Materials / Surfaces Thin films |
| topic_facet | Materials Science Optical and Electronic Materials Surfaces and Interfaces, Thin Films Electrical Engineering Characterization and Evaluation of Materials Materials science Electrical engineering Optical materials Electronic materials Materials / Surfaces Thin films |
| url | https://doi.org/10.1007/978-1-4615-5167-6 |
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