Metal Impurities in Silicon- and Germanium-Based Technologies: Origin, Characterization, Control, and Device Impact
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Cham
Springer International Publishing
2018
|
| Schriftenreihe: | Springer Series in Materials Science
270 |
| Schlagworte: | |
| Online-Zugang: | BTU01 TUM01 Volltext |
| Beschreibung: | 1 Online-Ressource (XXXIII, 438 p. 215 illus., 207 illus. in color) |
| ISBN: | 9783319939254 |
| ISSN: | 0933-033X |
| DOI: | 10.1007/978-3-319-93925-4 |
Internformat
MARC
| LEADER | 00000nmm a2200000zcb4500 | ||
|---|---|---|---|
| 001 | BV045164849 | ||
| 003 | DE-604 | ||
| 005 | 20180912 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 180904s2018 |||| o||u| ||||||eng d | ||
| 020 | |a 9783319939254 |c Online |9 978-3-319-93925-4 | ||
| 024 | 7 | |a 10.1007/978-3-319-93925-4 |2 doi | |
| 035 | |a (ZDB-2-CMS)9783319939254 | ||
| 035 | |a (OCoLC)1056139230 | ||
| 035 | |a (DE-599)BVBBV045164849 | ||
| 040 | |a DE-604 |b ger |e rda | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-634 |a DE-91 | ||
| 082 | 0 | |a 620.11295 |2 23 | |
| 082 | 0 | |a 620.11297 |2 23 | |
| 084 | |a ZN 3460 |0 (DE-625)157317: |2 rvk | ||
| 084 | |a CHE 000 |2 stub | ||
| 100 | 1 | |a Claeys, Cor L. |d 1951- |e Verfasser |0 (DE-588)1089337477 |4 aut | |
| 245 | 1 | 0 | |a Metal Impurities in Silicon- and Germanium-Based Technologies |b Origin, Characterization, Control, and Device Impact |c by Cor Claeys, Eddy Simoen |
| 264 | 1 | |a Cham |b Springer International Publishing |c 2018 | |
| 300 | |a 1 Online-Ressource (XXXIII, 438 p. 215 illus., 207 illus. in color) | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 1 | |a Springer Series in Materials Science |v 270 |x 0933-033X | |
| 650 | 4 | |a Optical and Electronic Materials | |
| 650 | 4 | |a Microwaves, RF and Optical Engineering | |
| 650 | 4 | |a Semiconductors | |
| 650 | 4 | |a Electronic Circuits and Devices | |
| 650 | 4 | |a Characterization and Evaluation of Materials | |
| 650 | 4 | |a Optical materials | |
| 650 | 4 | |a Microwaves | |
| 650 | 4 | |a Surfaces (Physics) | |
| 650 | 0 | 7 | |a Germanium |0 (DE-588)4135644-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Silicium |0 (DE-588)4077445-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Verunreinigung |0 (DE-588)4188107-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Metall |0 (DE-588)4038860-8 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Silicium |0 (DE-588)4077445-4 |D s |
| 689 | 0 | 1 | |a Germanium |0 (DE-588)4135644-5 |D s |
| 689 | 0 | 2 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 0 | 3 | |a Verunreinigung |0 (DE-588)4188107-2 |D s |
| 689 | 0 | 4 | |a Metall |0 (DE-588)4038860-8 |D s |
| 689 | 0 | |8 1\p |5 DE-604 | |
| 700 | 1 | |a Simoen, Eddy |4 aut | |
| 776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe |z 978-3-319-93924-7 |
| 776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe |z 978-3-319-93926-1 |
| 830 | 0 | |a Springer Series in Materials Science |v 270 |w (DE-604)BV040385147 |9 270 | |
| 856 | 4 | 0 | |u https://doi.org/10.1007/978-3-319-93925-4 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
| 912 | |a ZDB-2-CMS | ||
| 940 | 1 | |q ZDB-2-CMS_2018 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-030554255 | ||
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 966 | e | |u https://doi.org/10.1007/978-3-319-93925-4 |l BTU01 |p ZDB-2-CMS |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-319-93925-4 |l TUM01 |p ZDB-2-CMS |x Verlag |3 Volltext | |
Datensatz im Suchindex
| _version_ | 1804178847731548160 |
|---|---|
| any_adam_object | |
| author | Claeys, Cor L. 1951- Simoen, Eddy |
| author_GND | (DE-588)1089337477 |
| author_facet | Claeys, Cor L. 1951- Simoen, Eddy |
| author_role | aut aut |
| author_sort | Claeys, Cor L. 1951- |
| author_variant | c l c cl clc e s es |
| building | Verbundindex |
| bvnumber | BV045164849 |
| classification_rvk | ZN 3460 |
| classification_tum | CHE 000 |
| collection | ZDB-2-CMS |
| ctrlnum | (ZDB-2-CMS)9783319939254 (OCoLC)1056139230 (DE-599)BVBBV045164849 |
| dewey-full | 620.11295 620.11297 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 620 - Engineering and allied operations |
| dewey-raw | 620.11295 620.11297 |
| dewey-search | 620.11295 620.11297 |
| dewey-sort | 3620.11295 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Chemie Elektrotechnik / Elektronik / Nachrichtentechnik |
| doi_str_mv | 10.1007/978-3-319-93925-4 |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>02814nmm a2200685zcb4500</leader><controlfield tag="001">BV045164849</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20180912 </controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">180904s2018 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783319939254</subfield><subfield code="c">Online</subfield><subfield code="9">978-3-319-93925-4</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/978-3-319-93925-4</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-2-CMS)9783319939254</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)1056139230</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV045164849</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rda</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-634</subfield><subfield code="a">DE-91</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">620.11295</subfield><subfield code="2">23</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">620.11297</subfield><subfield code="2">23</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 3460</subfield><subfield code="0">(DE-625)157317:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">CHE 000</subfield><subfield code="2">stub</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Claeys, Cor L.</subfield><subfield code="d">1951-</subfield><subfield code="e">Verfasser</subfield><subfield code="0">(DE-588)1089337477</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Metal Impurities in Silicon- and Germanium-Based Technologies</subfield><subfield code="b">Origin, Characterization, Control, and Device Impact</subfield><subfield code="c">by Cor Claeys, Eddy Simoen</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Cham</subfield><subfield code="b">Springer International Publishing</subfield><subfield code="c">2018</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (XXXIII, 438 p. 215 illus., 207 illus. in color)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Springer Series in Materials Science</subfield><subfield code="v">270</subfield><subfield code="x">0933-033X</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Optical and Electronic Materials</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microwaves, RF and Optical Engineering</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Semiconductors</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electronic Circuits and Devices</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Characterization and Evaluation of Materials</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Optical materials</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microwaves</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Surfaces (Physics)</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Germanium</subfield><subfield code="0">(DE-588)4135644-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Verunreinigung</subfield><subfield code="0">(DE-588)4188107-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Metall</subfield><subfield code="0">(DE-588)4038860-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Germanium</subfield><subfield code="0">(DE-588)4135644-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="3"><subfield code="a">Verunreinigung</subfield><subfield code="0">(DE-588)4188107-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="4"><subfield code="a">Metall</subfield><subfield code="0">(DE-588)4038860-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Simoen, Eddy</subfield><subfield code="4">aut</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe</subfield><subfield code="z">978-3-319-93924-7</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe</subfield><subfield code="z">978-3-319-93926-1</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Springer Series in Materials Science</subfield><subfield code="v">270</subfield><subfield code="w">(DE-604)BV040385147</subfield><subfield code="9">270</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1007/978-3-319-93925-4</subfield><subfield code="x">Verlag</subfield><subfield code="z">URL des Erstveröffentlichers</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-2-CMS</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">ZDB-2-CMS_2018</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-030554255</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-319-93925-4</subfield><subfield code="l">BTU01</subfield><subfield code="p">ZDB-2-CMS</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-319-93925-4</subfield><subfield code="l">TUM01</subfield><subfield code="p">ZDB-2-CMS</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| id | DE-604.BV045164849 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T08:10:29Z |
| institution | BVB |
| isbn | 9783319939254 |
| issn | 0933-033X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030554255 |
| oclc_num | 1056139230 |
| open_access_boolean | |
| owner | DE-634 DE-91 DE-BY-TUM |
| owner_facet | DE-634 DE-91 DE-BY-TUM |
| physical | 1 Online-Ressource (XXXIII, 438 p. 215 illus., 207 illus. in color) |
| psigel | ZDB-2-CMS ZDB-2-CMS_2018 |
| publishDate | 2018 |
| publishDateSearch | 2018 |
| publishDateSort | 2018 |
| publisher | Springer International Publishing |
| record_format | marc |
| series | Springer Series in Materials Science |
| series2 | Springer Series in Materials Science |
| spelling | Claeys, Cor L. 1951- Verfasser (DE-588)1089337477 aut Metal Impurities in Silicon- and Germanium-Based Technologies Origin, Characterization, Control, and Device Impact by Cor Claeys, Eddy Simoen Cham Springer International Publishing 2018 1 Online-Ressource (XXXIII, 438 p. 215 illus., 207 illus. in color) txt rdacontent c rdamedia cr rdacarrier Springer Series in Materials Science 270 0933-033X Optical and Electronic Materials Microwaves, RF and Optical Engineering Semiconductors Electronic Circuits and Devices Characterization and Evaluation of Materials Optical materials Microwaves Surfaces (Physics) Germanium (DE-588)4135644-5 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Verunreinigung (DE-588)4188107-2 gnd rswk-swf Metall (DE-588)4038860-8 gnd rswk-swf Silicium (DE-588)4077445-4 s Germanium (DE-588)4135644-5 s Halbleiter (DE-588)4022993-2 s Verunreinigung (DE-588)4188107-2 s Metall (DE-588)4038860-8 s 1\p DE-604 Simoen, Eddy aut Erscheint auch als Druck-Ausgabe 978-3-319-93924-7 Erscheint auch als Druck-Ausgabe 978-3-319-93926-1 Springer Series in Materials Science 270 (DE-604)BV040385147 270 https://doi.org/10.1007/978-3-319-93925-4 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Claeys, Cor L. 1951- Simoen, Eddy Metal Impurities in Silicon- and Germanium-Based Technologies Origin, Characterization, Control, and Device Impact Springer Series in Materials Science Optical and Electronic Materials Microwaves, RF and Optical Engineering Semiconductors Electronic Circuits and Devices Characterization and Evaluation of Materials Optical materials Microwaves Surfaces (Physics) Germanium (DE-588)4135644-5 gnd Silicium (DE-588)4077445-4 gnd Halbleiter (DE-588)4022993-2 gnd Verunreinigung (DE-588)4188107-2 gnd Metall (DE-588)4038860-8 gnd |
| subject_GND | (DE-588)4135644-5 (DE-588)4077445-4 (DE-588)4022993-2 (DE-588)4188107-2 (DE-588)4038860-8 |
| title | Metal Impurities in Silicon- and Germanium-Based Technologies Origin, Characterization, Control, and Device Impact |
| title_auth | Metal Impurities in Silicon- and Germanium-Based Technologies Origin, Characterization, Control, and Device Impact |
| title_exact_search | Metal Impurities in Silicon- and Germanium-Based Technologies Origin, Characterization, Control, and Device Impact |
| title_full | Metal Impurities in Silicon- and Germanium-Based Technologies Origin, Characterization, Control, and Device Impact by Cor Claeys, Eddy Simoen |
| title_fullStr | Metal Impurities in Silicon- and Germanium-Based Technologies Origin, Characterization, Control, and Device Impact by Cor Claeys, Eddy Simoen |
| title_full_unstemmed | Metal Impurities in Silicon- and Germanium-Based Technologies Origin, Characterization, Control, and Device Impact by Cor Claeys, Eddy Simoen |
| title_short | Metal Impurities in Silicon- and Germanium-Based Technologies |
| title_sort | metal impurities in silicon and germanium based technologies origin characterization control and device impact |
| title_sub | Origin, Characterization, Control, and Device Impact |
| topic | Optical and Electronic Materials Microwaves, RF and Optical Engineering Semiconductors Electronic Circuits and Devices Characterization and Evaluation of Materials Optical materials Microwaves Surfaces (Physics) Germanium (DE-588)4135644-5 gnd Silicium (DE-588)4077445-4 gnd Halbleiter (DE-588)4022993-2 gnd Verunreinigung (DE-588)4188107-2 gnd Metall (DE-588)4038860-8 gnd |
| topic_facet | Optical and Electronic Materials Microwaves, RF and Optical Engineering Semiconductors Electronic Circuits and Devices Characterization and Evaluation of Materials Optical materials Microwaves Surfaces (Physics) Germanium Silicium Halbleiter Verunreinigung Metall |
| url | https://doi.org/10.1007/978-3-319-93925-4 |
| volume_link | (DE-604)BV040385147 |
| work_keys_str_mv | AT claeyscorl metalimpuritiesinsiliconandgermaniumbasedtechnologiesorigincharacterizationcontrolanddeviceimpact AT simoeneddy metalimpuritiesinsiliconandgermaniumbasedtechnologiesorigincharacterizationcontrolanddeviceimpact |