Lange, D., Brand, O., & Baltes, H. (2002). CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications. Springer Berlin Heidelberg. https://doi.org/10.1007/978-3-662-05060-6
Chicago Style (17th ed.) CitationLange, D., O. Brand, and H. Baltes. CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications. Berlin, Heidelberg: Springer Berlin Heidelberg, 2002. https://doi.org/10.1007/978-3-662-05060-6.
MLA (9th ed.) CitationLange, D., et al. CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications. Springer Berlin Heidelberg, 2002. https://doi.org/10.1007/978-3-662-05060-6.
Warning: These citations may not always be 100% accurate.