CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications
This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of physical quantities su...
Gespeichert in:
| Hauptverfasser: | , , |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Berlin, Heidelberg
Springer Berlin Heidelberg
2002
|
| Schriftenreihe: | Microtechnology and Mems
|
| Schlagworte: | |
| Online-Zugang: | UBT01 Volltext |
| Zusammenfassung: | This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of physical quantities such as forces and mass changes. The book is divided into three parts. First fabrication aspects and the mechanisms of cantilever resonators are introduced. Of the possible driving and sensing mechanisms, electrothermal and magnetic excitation, as well as piezoresistive detection and the use of MOS transistors for the deflection detection are introduced. This is followed by two application examples: The use of resonant cantilevers for the mass-sensitive detection of volatile organic compounds, and force sensor arrays for parallel Scanning Atomic Force Microscopy (AFM) of large areas |
| Beschreibung: | 1 Online-Ressource (VIII, 142 p) |
| ISBN: | 9783662050606 |
| DOI: | 10.1007/978-3-662-05060-6 |
Internformat
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Datensatz im Suchindex
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| author | Lange, D. Brand, O. Baltes, H. |
| author_facet | Lange, D. Brand, O. Baltes, H. |
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| bvnumber | BV045152122 |
| collection | ZDB-2-CMS |
| ctrlnum | (ZDB-2-CMS)978-3-662-05060-6 (OCoLC)1184494207 (DE-599)BVBBV045152122 |
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| id | DE-604.BV045152122 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T08:10:07Z |
| institution | BVB |
| isbn | 9783662050606 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030541790 |
| oclc_num | 1184494207 |
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| owner | DE-703 |
| owner_facet | DE-703 |
| physical | 1 Online-Ressource (VIII, 142 p) |
| psigel | ZDB-2-CMS ZDB-2-CMS_2000/2004 ZDB-2-CMS ZDB-2-CMS_2000/2004 |
| publishDate | 2002 |
| publishDateSearch | 2002 |
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| publisher | Springer Berlin Heidelberg |
| record_format | marc |
| series2 | Microtechnology and Mems |
| spelling | Lange, D. Verfasser aut CMOS Cantilever Sensor Systems Atomic Force Microscopy and Gas Sensing Applications by D. Lange, O. Brand, H. Baltes Berlin, Heidelberg Springer Berlin Heidelberg 2002 1 Online-Ressource (VIII, 142 p) txt rdacontent c rdamedia cr rdacarrier Microtechnology and Mems This book introduces the use of industrial CMOS processes to produce arrays of nanomechanical cantilever transducers with on-chip driving and signal conditioning circuitry. These cantilevers are familiar from Scanning Probe Microscopy (SPM) and allow the sensitive detection of physical quantities such as forces and mass changes. The book is divided into three parts. First fabrication aspects and the mechanisms of cantilever resonators are introduced. Of the possible driving and sensing mechanisms, electrothermal and magnetic excitation, as well as piezoresistive detection and the use of MOS transistors for the deflection detection are introduced. This is followed by two application examples: The use of resonant cantilevers for the mass-sensitive detection of volatile organic compounds, and force sensor arrays for parallel Scanning Atomic Force Microscopy (AFM) of large areas Materials Science Nanotechnology Nanotechnology and Microengineering Applied and Technical Physics Control, Robotics, Mechatronics Engineering, general Measurement Science and Instrumentation Materials science Physics Physical measurements Measurement Engineering Control engineering Robotics Mechatronics Rasterkraftmikroskopie (DE-588)4274473-8 gnd rswk-swf Sensorsystem (DE-588)4307964-7 gnd rswk-swf CMOS (DE-588)4010319-5 gnd rswk-swf Gassensor (DE-588)4156050-4 gnd rswk-swf Sensorsystem (DE-588)4307964-7 s CMOS (DE-588)4010319-5 s Rasterkraftmikroskopie (DE-588)4274473-8 s Gassensor (DE-588)4156050-4 s 1\p DE-604 Brand, O. aut Baltes, H. aut Erscheint auch als Druck-Ausgabe 9783642077289 https://doi.org/10.1007/978-3-662-05060-6 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Lange, D. Brand, O. Baltes, H. CMOS Cantilever Sensor Systems Atomic Force Microscopy and Gas Sensing Applications Materials Science Nanotechnology Nanotechnology and Microengineering Applied and Technical Physics Control, Robotics, Mechatronics Engineering, general Measurement Science and Instrumentation Materials science Physics Physical measurements Measurement Engineering Control engineering Robotics Mechatronics Rasterkraftmikroskopie (DE-588)4274473-8 gnd Sensorsystem (DE-588)4307964-7 gnd CMOS (DE-588)4010319-5 gnd Gassensor (DE-588)4156050-4 gnd |
| subject_GND | (DE-588)4274473-8 (DE-588)4307964-7 (DE-588)4010319-5 (DE-588)4156050-4 |
| title | CMOS Cantilever Sensor Systems Atomic Force Microscopy and Gas Sensing Applications |
| title_auth | CMOS Cantilever Sensor Systems Atomic Force Microscopy and Gas Sensing Applications |
| title_exact_search | CMOS Cantilever Sensor Systems Atomic Force Microscopy and Gas Sensing Applications |
| title_full | CMOS Cantilever Sensor Systems Atomic Force Microscopy and Gas Sensing Applications by D. Lange, O. Brand, H. Baltes |
| title_fullStr | CMOS Cantilever Sensor Systems Atomic Force Microscopy and Gas Sensing Applications by D. Lange, O. Brand, H. Baltes |
| title_full_unstemmed | CMOS Cantilever Sensor Systems Atomic Force Microscopy and Gas Sensing Applications by D. Lange, O. Brand, H. Baltes |
| title_short | CMOS Cantilever Sensor Systems |
| title_sort | cmos cantilever sensor systems atomic force microscopy and gas sensing applications |
| title_sub | Atomic Force Microscopy and Gas Sensing Applications |
| topic | Materials Science Nanotechnology Nanotechnology and Microengineering Applied and Technical Physics Control, Robotics, Mechatronics Engineering, general Measurement Science and Instrumentation Materials science Physics Physical measurements Measurement Engineering Control engineering Robotics Mechatronics Rasterkraftmikroskopie (DE-588)4274473-8 gnd Sensorsystem (DE-588)4307964-7 gnd CMOS (DE-588)4010319-5 gnd Gassensor (DE-588)4156050-4 gnd |
| topic_facet | Materials Science Nanotechnology Nanotechnology and Microengineering Applied and Technical Physics Control, Robotics, Mechatronics Engineering, general Measurement Science and Instrumentation Materials science Physics Physical measurements Measurement Engineering Control engineering Robotics Mechatronics Rasterkraftmikroskopie Sensorsystem CMOS Gassensor |
| url | https://doi.org/10.1007/978-3-662-05060-6 |
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