Mechanical Microsensors:
Fabrication technologies related to those which are exploited for the fabrication of integrated circuits can be used to machine mechanical structures with minimum feature sizes in the range of micrometers. The mechanical machining of silicon based on IC-technologies is known as micromachining, and t...
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Berlin, Heidelberg
Springer Berlin Heidelberg
2001
|
| Schriftenreihe: | Microtechnology and MEMS
|
| Schlagworte: | |
| Online-Zugang: | UBT01 Volltext |
| Zusammenfassung: | Fabrication technologies related to those which are exploited for the fabrication of integrated circuits can be used to machine mechanical structures with minimum feature sizes in the range of micrometers. The mechanical machining of silicon based on IC-technologies is known as micromachining, and the systems made by micromachining are called MEMS (microelectromechanical systems). The present book describes how to use this technology to fabricate sensors of miniature size for mechanical quantities, such as pressure, force, flow and acceleration. The book includes a chapter with a comprehensive description of the relevant micromachining processes, and an introduction to MEMS, a field much broader than just microsensors. Most of these sensors rely on a deformation of the mechanical construction by an external load, and on a transduction mechanism to convert the deformation into a mechanical signal. The fundamental mechanics and electromechanics required for the understanding and the design of mechanical microsensors are described on a level accessible to engineers of all disciplines. Students in engineering sciences from the third year on should be able to benefit from this description. The most important mechanical sensors are described and discussed in detail with respect to fabrication issues, function and performance. Special emphasis is given to pressure sensors, force sensors, accelerometers, gyroscopes and flow sensors. Electronic interfacing, and a discussion of electronic circuits used for the sensors is also included. Finally the problem of packaging is addressed |
| Beschreibung: | 1 Online-Ressource (X, 295 p) |
| ISBN: | 9783662043219 |
| DOI: | 10.1007/978-3-662-04321-9 |
Internformat
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Datensatz im Suchindex
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| author | Elwenspoek, Miko Wiegerink, Remco |
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| author_role | aut aut |
| author_sort | Elwenspoek, Miko |
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| bvnumber | BV045152099 |
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| ctrlnum | (ZDB-2-CMS)978-3-662-04321-9 (OCoLC)1184503919 (DE-599)BVBBV045152099 |
| dewey-full | 620.115 |
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| doi_str_mv | 10.1007/978-3-662-04321-9 |
| format | Electronic eBook |
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| id | DE-604.BV045152099 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T08:10:07Z |
| institution | BVB |
| isbn | 9783662043219 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030541767 |
| oclc_num | 1184503919 |
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| owner_facet | DE-703 |
| physical | 1 Online-Ressource (X, 295 p) |
| psigel | ZDB-2-CMS ZDB-2-CMS_2000/2004 ZDB-2-CMS ZDB-2-CMS_2000/2004 |
| publishDate | 2001 |
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| publisher | Springer Berlin Heidelberg |
| record_format | marc |
| series2 | Microtechnology and MEMS |
| spelling | Elwenspoek, Miko Verfasser aut Mechanical Microsensors by Miko Elwenspoek, Remco Wiegerink Berlin, Heidelberg Springer Berlin Heidelberg 2001 1 Online-Ressource (X, 295 p) txt rdacontent c rdamedia cr rdacarrier Microtechnology and MEMS Fabrication technologies related to those which are exploited for the fabrication of integrated circuits can be used to machine mechanical structures with minimum feature sizes in the range of micrometers. The mechanical machining of silicon based on IC-technologies is known as micromachining, and the systems made by micromachining are called MEMS (microelectromechanical systems). The present book describes how to use this technology to fabricate sensors of miniature size for mechanical quantities, such as pressure, force, flow and acceleration. The book includes a chapter with a comprehensive description of the relevant micromachining processes, and an introduction to MEMS, a field much broader than just microsensors. Most of these sensors rely on a deformation of the mechanical construction by an external load, and on a transduction mechanism to convert the deformation into a mechanical signal. The fundamental mechanics and electromechanics required for the understanding and the design of mechanical microsensors are described on a level accessible to engineers of all disciplines. Students in engineering sciences from the third year on should be able to benefit from this description. The most important mechanical sensors are described and discussed in detail with respect to fabrication issues, function and performance. Special emphasis is given to pressure sensors, force sensors, accelerometers, gyroscopes and flow sensors. Electronic interfacing, and a discussion of electronic circuits used for the sensors is also included. Finally the problem of packaging is addressed Materials Science Nanotechnology Theoretical and Applied Mechanics Measurement Science and Instrumentation Electronics and Microelectronics, Instrumentation Control, Robotics, Mechatronics Materials science Physical measurements Measurement Mechanics Mechanics, Applied Control engineering Robotics Mechatronics Electronics Microelectronics Mikromechanik (DE-588)4205811-9 gnd rswk-swf Mikrosensor (DE-588)4561097-6 gnd rswk-swf Mikrosensor (DE-588)4561097-6 s Mikromechanik (DE-588)4205811-9 s 1\p DE-604 Wiegerink, Remco aut Erscheint auch als Druck-Ausgabe 9783642087066 https://doi.org/10.1007/978-3-662-04321-9 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Elwenspoek, Miko Wiegerink, Remco Mechanical Microsensors Materials Science Nanotechnology Theoretical and Applied Mechanics Measurement Science and Instrumentation Electronics and Microelectronics, Instrumentation Control, Robotics, Mechatronics Materials science Physical measurements Measurement Mechanics Mechanics, Applied Control engineering Robotics Mechatronics Electronics Microelectronics Mikromechanik (DE-588)4205811-9 gnd Mikrosensor (DE-588)4561097-6 gnd |
| subject_GND | (DE-588)4205811-9 (DE-588)4561097-6 |
| title | Mechanical Microsensors |
| title_auth | Mechanical Microsensors |
| title_exact_search | Mechanical Microsensors |
| title_full | Mechanical Microsensors by Miko Elwenspoek, Remco Wiegerink |
| title_fullStr | Mechanical Microsensors by Miko Elwenspoek, Remco Wiegerink |
| title_full_unstemmed | Mechanical Microsensors by Miko Elwenspoek, Remco Wiegerink |
| title_short | Mechanical Microsensors |
| title_sort | mechanical microsensors |
| topic | Materials Science Nanotechnology Theoretical and Applied Mechanics Measurement Science and Instrumentation Electronics and Microelectronics, Instrumentation Control, Robotics, Mechatronics Materials science Physical measurements Measurement Mechanics Mechanics, Applied Control engineering Robotics Mechatronics Electronics Microelectronics Mikromechanik (DE-588)4205811-9 gnd Mikrosensor (DE-588)4561097-6 gnd |
| topic_facet | Materials Science Nanotechnology Theoretical and Applied Mechanics Measurement Science and Instrumentation Electronics and Microelectronics, Instrumentation Control, Robotics, Mechatronics Materials science Physical measurements Measurement Mechanics Mechanics, Applied Control engineering Robotics Mechatronics Electronics Microelectronics Mikromechanik Mikrosensor |
| url | https://doi.org/10.1007/978-3-662-04321-9 |
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