High Resolution Focused Ion Beams: FIB and its Applications: The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology
In this book, we have attempted to produce a reference on high resolution focused ion beams (FIBs) that will be useful for both the user and the designer of FIB instrumentation. We have included a mix of theory and applications that seemed most useful to us. The field of FIBs has advanced rapidly si...
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| Hauptverfasser: | , , |
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| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Boston, MA
Springer US
2003
|
| Schlagworte: | |
| Online-Zugang: | UBT01 Volltext |
| Zusammenfassung: | In this book, we have attempted to produce a reference on high resolution focused ion beams (FIBs) that will be useful for both the user and the designer of FIB instrumentation. We have included a mix of theory and applications that seemed most useful to us. The field of FIBs has advanced rapidly since the application of the first field emission ion sources in the early 1970s. The development of the liquid metal ion source (LMIS) in the late 1960s and early 1970s and its application for FIBs in the late 1970s have resulted in a powerful tool for research and for industry. There have been hundreds of papers written on many aspects of LMIS and FIBs, and a useful and informative book on these subjects was published in 1991 by Phil Prewett and Grame Mair. Because there have been so many new applications and uses found for FIBs in the last ten years we felt that it was time for another book on the subject |
| Beschreibung: | 1 Online-Ressource (XI, 304 p) |
| ISBN: | 9781461507659 |
| DOI: | 10.1007/978-1-4615-0765-9 |
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| id | DE-604.BV045151861 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T08:10:06Z |
| institution | BVB |
| isbn | 9781461507659 |
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| spelling | Orloff, Jon Verfasser aut High Resolution Focused Ion Beams: FIB and its Applications The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology by Jon Orloff, Mark Utlaut, Lynwood Swanson Boston, MA Springer US 2003 1 Online-Ressource (XI, 304 p) txt rdacontent c rdamedia cr rdacarrier In this book, we have attempted to produce a reference on high resolution focused ion beams (FIBs) that will be useful for both the user and the designer of FIB instrumentation. We have included a mix of theory and applications that seemed most useful to us. The field of FIBs has advanced rapidly since the application of the first field emission ion sources in the early 1970s. The development of the liquid metal ion source (LMIS) in the late 1960s and early 1970s and its application for FIBs in the late 1970s have resulted in a powerful tool for research and for industry. There have been hundreds of papers written on many aspects of LMIS and FIBs, and a useful and informative book on these subjects was published in 1991 by Phil Prewett and Grame Mair. Because there have been so many new applications and uses found for FIBs in the last ten years we felt that it was time for another book on the subject Materials Science Characterization and Evaluation of Materials Physics, general Optical and Electronic Materials Optics, Optoelectronics, Plasmonics and Optical Devices Materials science Physics Optics Optoelectronics Plasmons (Physics) Optical materials Electronic materials Utlaut, Mark aut Swanson, Lynwood aut Erscheint auch als Druck-Ausgabe 9781461352297 https://doi.org/10.1007/978-1-4615-0765-9 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Orloff, Jon Utlaut, Mark Swanson, Lynwood High Resolution Focused Ion Beams: FIB and its Applications The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology Materials Science Characterization and Evaluation of Materials Physics, general Optical and Electronic Materials Optics, Optoelectronics, Plasmonics and Optical Devices Materials science Physics Optics Optoelectronics Plasmons (Physics) Optical materials Electronic materials |
| title | High Resolution Focused Ion Beams: FIB and its Applications The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology |
| title_auth | High Resolution Focused Ion Beams: FIB and its Applications The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology |
| title_exact_search | High Resolution Focused Ion Beams: FIB and its Applications The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology |
| title_full | High Resolution Focused Ion Beams: FIB and its Applications The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology by Jon Orloff, Mark Utlaut, Lynwood Swanson |
| title_fullStr | High Resolution Focused Ion Beams: FIB and its Applications The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology by Jon Orloff, Mark Utlaut, Lynwood Swanson |
| title_full_unstemmed | High Resolution Focused Ion Beams: FIB and its Applications The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology by Jon Orloff, Mark Utlaut, Lynwood Swanson |
| title_short | High Resolution Focused Ion Beams: FIB and its Applications |
| title_sort | high resolution focused ion beams fib and its applications the physics of liquid metal ion sources and ion optics and their application to focused ion beam technology |
| title_sub | The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology |
| topic | Materials Science Characterization and Evaluation of Materials Physics, general Optical and Electronic Materials Optics, Optoelectronics, Plasmonics and Optical Devices Materials science Physics Optics Optoelectronics Plasmons (Physics) Optical materials Electronic materials |
| topic_facet | Materials Science Characterization and Evaluation of Materials Physics, general Optical and Electronic Materials Optics, Optoelectronics, Plasmonics and Optical Devices Materials science Physics Optics Optoelectronics Plasmons (Physics) Optical materials Electronic materials |
| url | https://doi.org/10.1007/978-1-4615-0765-9 |
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