Simulation of Semiconductor Processes and Devices 2001: SISPAD 01
This volume contains the Proceedings of the International Conference on Simulation of Semiconductor Devices and Processes, SISPAD 01, held on September 5–7, 2001, in Athens. The conference provided an open forum for the presentation of the latest results and trends in process and device simulation....
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| Weitere Verfasser: | , |
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| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Vienna
Springer Vienna
2001
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| Schlagworte: | |
| Online-Zugang: | FHI01 BTU01 Volltext |
| Zusammenfassung: | This volume contains the Proceedings of the International Conference on Simulation of Semiconductor Devices and Processes, SISPAD 01, held on September 5–7, 2001, in Athens. The conference provided an open forum for the presentation of the latest results and trends in process and device simulation. The trend towards shrinking device dimensions and increasing complexity in process technology demands the continuous development of advanced models describing basic physical phenomena involved. New simulation tools are developed to complete the hierarchy in the Technology Computer Aided Design simulation chain between microscopic and macroscopic approaches. The conference program featured 8 invited papers, 60 papers for oral presentation and 34 papers for poster presentation, selected from a total of 165 abstracts from 30 countries around the world. These papers disclose new and interesting concepts for simulating processes and devices |
| Beschreibung: | 1 Online-Ressource (XV, 455 p) |
| ISBN: | 9783709162446 |
| DOI: | 10.1007/978-3-7091-6244-6 |
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| id | DE-604.BV045149514 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T08:10:04Z |
| institution | BVB |
| isbn | 9783709162446 |
| language | English |
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| physical | 1 Online-Ressource (XV, 455 p) |
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| publisher | Springer Vienna |
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| spelling | Simulation of Semiconductor Processes and Devices 2001 SISPAD 01 edited by Dimitris Tsoukalas, Christos Tsamis Vienna Springer Vienna 2001 1 Online-Ressource (XV, 455 p) txt rdacontent c rdamedia cr rdacarrier This volume contains the Proceedings of the International Conference on Simulation of Semiconductor Devices and Processes, SISPAD 01, held on September 5–7, 2001, in Athens. The conference provided an open forum for the presentation of the latest results and trends in process and device simulation. The trend towards shrinking device dimensions and increasing complexity in process technology demands the continuous development of advanced models describing basic physical phenomena involved. New simulation tools are developed to complete the hierarchy in the Technology Computer Aided Design simulation chain between microscopic and macroscopic approaches. The conference program featured 8 invited papers, 60 papers for oral presentation and 34 papers for poster presentation, selected from a total of 165 abstracts from 30 countries around the world. These papers disclose new and interesting concepts for simulating processes and devices Engineering Electronics and Microelectronics, Instrumentation Optical and Electronic Materials Nanotechnology Electronics Microelectronics Optical materials Electronic materials Tsoukalas, Dimitris edt Tsamis, Christos edt Erscheint auch als Druck-Ausgabe 9783709172780 https://doi.org/10.1007/978-3-7091-6244-6 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Simulation of Semiconductor Processes and Devices 2001 SISPAD 01 Engineering Electronics and Microelectronics, Instrumentation Optical and Electronic Materials Nanotechnology Electronics Microelectronics Optical materials Electronic materials |
| title | Simulation of Semiconductor Processes and Devices 2001 SISPAD 01 |
| title_auth | Simulation of Semiconductor Processes and Devices 2001 SISPAD 01 |
| title_exact_search | Simulation of Semiconductor Processes and Devices 2001 SISPAD 01 |
| title_full | Simulation of Semiconductor Processes and Devices 2001 SISPAD 01 edited by Dimitris Tsoukalas, Christos Tsamis |
| title_fullStr | Simulation of Semiconductor Processes and Devices 2001 SISPAD 01 edited by Dimitris Tsoukalas, Christos Tsamis |
| title_full_unstemmed | Simulation of Semiconductor Processes and Devices 2001 SISPAD 01 edited by Dimitris Tsoukalas, Christos Tsamis |
| title_short | Simulation of Semiconductor Processes and Devices 2001 |
| title_sort | simulation of semiconductor processes and devices 2001 sispad 01 |
| title_sub | SISPAD 01 |
| topic | Engineering Electronics and Microelectronics, Instrumentation Optical and Electronic Materials Nanotechnology Electronics Microelectronics Optical materials Electronic materials |
| topic_facet | Engineering Electronics and Microelectronics, Instrumentation Optical and Electronic Materials Nanotechnology Electronics Microelectronics Optical materials Electronic materials |
| url | https://doi.org/10.1007/978-3-7091-6244-6 |
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