Technology of Integrated Circuits:
Strongly involved with SIEMENS Corp. in the tremendous recent developments of process technologies for IC fabrication the authors comprehensively record their authoritative knowledge and practical experience. New materials , modern planar technology, process designs for CMOS, Bipolar, BICMOS and sma...
Gespeichert in:
| Hauptverfasser: | , , , |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Berlin, Heidelberg
Springer Berlin Heidelberg
2000
|
| Schriftenreihe: | Springer Series in ADVANCED MICROELECTRONICS
2 |
| Schlagworte: | |
| Online-Zugang: | FHI01 BTU01 Volltext |
| Zusammenfassung: | Strongly involved with SIEMENS Corp. in the tremendous recent developments of process technologies for IC fabrication the authors comprehensively record their authoritative knowledge and practical experience. New materials , modern planar technology, process designs for CMOS, Bipolar, BICMOS and smart-power technologies, self-adjusting doping techniques are just a few of the highlights. With its strong application-orientation this is a need-to-have book for professionals in semiconductor industries. Senior students in electrical engineering and physics can use it as a textbook because of the systematic treatment of the subjects. With regard to their later careers as industrial engineers they will particularly appreciate the deep insight into the actual methods and problems of IC manufacturing |
| Beschreibung: | 1 Online-Ressource (XVIII, 342 p) |
| ISBN: | 9783662041604 |
| DOI: | 10.1007/978-3-662-04160-4 |
Internformat
MARC
| LEADER | 00000nmm a2200000zcb4500 | ||
|---|---|---|---|
| 001 | BV045149351 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | cr|uuu---uuuuu | ||
| 008 | 180827s2000 |||| o||u| ||||||eng d | ||
| 020 | |a 9783662041604 |9 978-3-662-04160-4 | ||
| 024 | 7 | |a 10.1007/978-3-662-04160-4 |2 doi | |
| 035 | |a (ZDB-2-ENG)978-3-662-04160-4 | ||
| 035 | |a (OCoLC)1184490942 | ||
| 035 | |a (DE-599)BVBBV045149351 | ||
| 040 | |a DE-604 |b ger |e aacr | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-573 |a DE-634 | ||
| 082 | 0 | |a 621.381 |2 23 | |
| 100 | 1 | |a Widmann, Dietrich |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Technology of Integrated Circuits |c by Dietrich Widmann, Hermann Mader, Hans Friedrich, Walter Heywang, Rudolf Müller |
| 264 | 1 | |a Berlin, Heidelberg |b Springer Berlin Heidelberg |c 2000 | |
| 300 | |a 1 Online-Ressource (XVIII, 342 p) | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b c |2 rdamedia | ||
| 338 | |b cr |2 rdacarrier | ||
| 490 | 0 | |a Springer Series in ADVANCED MICROELECTRONICS |v 2 | |
| 520 | |a Strongly involved with SIEMENS Corp. in the tremendous recent developments of process technologies for IC fabrication the authors comprehensively record their authoritative knowledge and practical experience. New materials , modern planar technology, process designs for CMOS, Bipolar, BICMOS and smart-power technologies, self-adjusting doping techniques are just a few of the highlights. With its strong application-orientation this is a need-to-have book for professionals in semiconductor industries. Senior students in electrical engineering and physics can use it as a textbook because of the systematic treatment of the subjects. With regard to their later careers as industrial engineers they will particularly appreciate the deep insight into the actual methods and problems of IC manufacturing | ||
| 650 | 4 | |a Engineering | |
| 650 | 4 | |a Electronics and Microelectronics, Instrumentation | |
| 650 | 4 | |a Optical and Electronic Materials | |
| 650 | 4 | |a Industrial Chemistry/Chemical Engineering | |
| 650 | 4 | |a Engineering | |
| 650 | 4 | |a Chemical engineering | |
| 650 | 4 | |a Electronics | |
| 650 | 4 | |a Microelectronics | |
| 650 | 4 | |a Optical materials | |
| 650 | 4 | |a Electronic materials | |
| 650 | 0 | 7 | |a LSI |0 (DE-588)4168200-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Integrierte Schaltung |0 (DE-588)4027242-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Technik |0 (DE-588)4059205-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a VLSI |0 (DE-588)4117388-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a LSI |0 (DE-588)4168200-2 |D s |
| 689 | 0 | 1 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |D s |
| 689 | 0 | |8 1\p |5 DE-604 | |
| 689 | 1 | 0 | |a VLSI |0 (DE-588)4117388-0 |D s |
| 689 | 1 | 1 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |D s |
| 689 | 1 | |8 2\p |5 DE-604 | |
| 689 | 2 | 0 | |a VLSI |0 (DE-588)4117388-0 |D s |
| 689 | 2 | 1 | |a Technik |0 (DE-588)4059205-4 |D s |
| 689 | 2 | |8 3\p |5 DE-604 | |
| 689 | 3 | 0 | |a LSI |0 (DE-588)4168200-2 |D s |
| 689 | 3 | 1 | |a Technik |0 (DE-588)4059205-4 |D s |
| 689 | 3 | |8 4\p |5 DE-604 | |
| 689 | 4 | 0 | |a Integrierte Schaltung |0 (DE-588)4027242-4 |D s |
| 689 | 4 | |8 5\p |5 DE-604 | |
| 700 | 1 | |a Mader, Hermann |4 aut | |
| 700 | 1 | |a Friedrich, Hans |4 aut | |
| 700 | 1 | |a Heywang, Walter |4 aut | |
| 776 | 0 | 8 | |i Erscheint auch als |n Druck-Ausgabe |z 9783642085475 |
| 856 | 4 | 0 | |u https://doi.org/10.1007/978-3-662-04160-4 |x Verlag |z URL des Erstveröffentlichers |3 Volltext |
| 912 | |a ZDB-2-ENG | ||
| 940 | 1 | |q ZDB-2-ENG_2000/2004 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-030539050 | ||
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 883 | 1 | |8 2\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 883 | 1 | |8 3\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 883 | 1 | |8 4\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 883 | 1 | |8 5\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 966 | e | |u https://doi.org/10.1007/978-3-662-04160-4 |l FHI01 |p ZDB-2-ENG |q ZDB-2-ENG_2000/2004 |x Verlag |3 Volltext | |
| 966 | e | |u https://doi.org/10.1007/978-3-662-04160-4 |l BTU01 |p ZDB-2-ENG |q ZDB-2-ENG_Archiv |x Verlag |3 Volltext | |
Datensatz im Suchindex
| _version_ | 1804178820966645760 |
|---|---|
| any_adam_object | |
| author | Widmann, Dietrich Mader, Hermann Friedrich, Hans Heywang, Walter |
| author_facet | Widmann, Dietrich Mader, Hermann Friedrich, Hans Heywang, Walter |
| author_role | aut aut aut aut |
| author_sort | Widmann, Dietrich |
| author_variant | d w dw h m hm h f hf w h wh |
| building | Verbundindex |
| bvnumber | BV045149351 |
| collection | ZDB-2-ENG |
| ctrlnum | (ZDB-2-ENG)978-3-662-04160-4 (OCoLC)1184490942 (DE-599)BVBBV045149351 |
| dewey-full | 621.381 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.381 |
| dewey-search | 621.381 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| doi_str_mv | 10.1007/978-3-662-04160-4 |
| format | Electronic eBook |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>04128nmm a2200829zcb4500</leader><controlfield tag="001">BV045149351</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">cr|uuu---uuuuu</controlfield><controlfield tag="008">180827s2000 |||| o||u| ||||||eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9783662041604</subfield><subfield code="9">978-3-662-04160-4</subfield></datafield><datafield tag="024" ind1="7" ind2=" "><subfield code="a">10.1007/978-3-662-04160-4</subfield><subfield code="2">doi</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(ZDB-2-ENG)978-3-662-04160-4</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)1184490942</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV045149351</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">aacr</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-573</subfield><subfield code="a">DE-634</subfield></datafield><datafield tag="082" ind1="0" ind2=" "><subfield code="a">621.381</subfield><subfield code="2">23</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Widmann, Dietrich</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Technology of Integrated Circuits</subfield><subfield code="c">by Dietrich Widmann, Hermann Mader, Hans Friedrich, Walter Heywang, Rudolf Müller</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Berlin, Heidelberg</subfield><subfield code="b">Springer Berlin Heidelberg</subfield><subfield code="c">2000</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">1 Online-Ressource (XVIII, 342 p)</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">c</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">cr</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Springer Series in ADVANCED MICROELECTRONICS</subfield><subfield code="v">2</subfield></datafield><datafield tag="520" ind1=" " ind2=" "><subfield code="a">Strongly involved with SIEMENS Corp. in the tremendous recent developments of process technologies for IC fabrication the authors comprehensively record their authoritative knowledge and practical experience. New materials , modern planar technology, process designs for CMOS, Bipolar, BICMOS and smart-power technologies, self-adjusting doping techniques are just a few of the highlights. With its strong application-orientation this is a need-to-have book for professionals in semiconductor industries. Senior students in electrical engineering and physics can use it as a textbook because of the systematic treatment of the subjects. With regard to their later careers as industrial engineers they will particularly appreciate the deep insight into the actual methods and problems of IC manufacturing</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Engineering</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electronics and Microelectronics, Instrumentation</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Optical and Electronic Materials</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Industrial Chemistry/Chemical Engineering</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Engineering</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Chemical engineering</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electronics</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Microelectronics</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Optical materials</subfield></datafield><datafield tag="650" ind1=" " ind2="4"><subfield code="a">Electronic materials</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">LSI</subfield><subfield code="0">(DE-588)4168200-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Integrierte Schaltung</subfield><subfield code="0">(DE-588)4027242-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Technik</subfield><subfield code="0">(DE-588)4059205-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">VLSI</subfield><subfield code="0">(DE-588)4117388-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">LSI</subfield><subfield code="0">(DE-588)4168200-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="8">1\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">VLSI</subfield><subfield code="0">(DE-588)4117388-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2="1"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="8">2\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="2" ind2="0"><subfield code="a">VLSI</subfield><subfield code="0">(DE-588)4117388-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2="1"><subfield code="a">Technik</subfield><subfield code="0">(DE-588)4059205-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2=" "><subfield code="8">3\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="3" ind2="0"><subfield code="a">LSI</subfield><subfield code="0">(DE-588)4168200-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="3" ind2="1"><subfield code="a">Technik</subfield><subfield code="0">(DE-588)4059205-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="3" ind2=" "><subfield code="8">4\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="4" ind2="0"><subfield code="a">Integrierte Schaltung</subfield><subfield code="0">(DE-588)4027242-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="4" ind2=" "><subfield code="8">5\p</subfield><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Mader, Hermann</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Friedrich, Hans</subfield><subfield code="4">aut</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Heywang, Walter</subfield><subfield code="4">aut</subfield></datafield><datafield tag="776" ind1="0" ind2="8"><subfield code="i">Erscheint auch als</subfield><subfield code="n">Druck-Ausgabe</subfield><subfield code="z">9783642085475</subfield></datafield><datafield tag="856" ind1="4" ind2="0"><subfield code="u">https://doi.org/10.1007/978-3-662-04160-4</subfield><subfield code="x">Verlag</subfield><subfield code="z">URL des Erstveröffentlichers</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="912" ind1=" " ind2=" "><subfield code="a">ZDB-2-ENG</subfield></datafield><datafield tag="940" ind1="1" ind2=" "><subfield code="q">ZDB-2-ENG_2000/2004</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-030539050</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">1\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">2\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">3\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">4\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="883" ind1="1" ind2=" "><subfield code="8">5\p</subfield><subfield code="a">cgwrk</subfield><subfield code="d">20201028</subfield><subfield code="q">DE-101</subfield><subfield code="u">https://d-nb.info/provenance/plan#cgwrk</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-662-04160-4</subfield><subfield code="l">FHI01</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="q">ZDB-2-ENG_2000/2004</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield><datafield tag="966" ind1="e" ind2=" "><subfield code="u">https://doi.org/10.1007/978-3-662-04160-4</subfield><subfield code="l">BTU01</subfield><subfield code="p">ZDB-2-ENG</subfield><subfield code="q">ZDB-2-ENG_Archiv</subfield><subfield code="x">Verlag</subfield><subfield code="3">Volltext</subfield></datafield></record></collection> |
| id | DE-604.BV045149351 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T08:10:03Z |
| institution | BVB |
| isbn | 9783662041604 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030539050 |
| oclc_num | 1184490942 |
| open_access_boolean | |
| owner | DE-573 DE-634 |
| owner_facet | DE-573 DE-634 |
| physical | 1 Online-Ressource (XVIII, 342 p) |
| psigel | ZDB-2-ENG ZDB-2-ENG_2000/2004 ZDB-2-ENG ZDB-2-ENG_2000/2004 ZDB-2-ENG ZDB-2-ENG_Archiv |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | Springer Berlin Heidelberg |
| record_format | marc |
| series2 | Springer Series in ADVANCED MICROELECTRONICS |
| spelling | Widmann, Dietrich Verfasser aut Technology of Integrated Circuits by Dietrich Widmann, Hermann Mader, Hans Friedrich, Walter Heywang, Rudolf Müller Berlin, Heidelberg Springer Berlin Heidelberg 2000 1 Online-Ressource (XVIII, 342 p) txt rdacontent c rdamedia cr rdacarrier Springer Series in ADVANCED MICROELECTRONICS 2 Strongly involved with SIEMENS Corp. in the tremendous recent developments of process technologies for IC fabrication the authors comprehensively record their authoritative knowledge and practical experience. New materials , modern planar technology, process designs for CMOS, Bipolar, BICMOS and smart-power technologies, self-adjusting doping techniques are just a few of the highlights. With its strong application-orientation this is a need-to-have book for professionals in semiconductor industries. Senior students in electrical engineering and physics can use it as a textbook because of the systematic treatment of the subjects. With regard to their later careers as industrial engineers they will particularly appreciate the deep insight into the actual methods and problems of IC manufacturing Engineering Electronics and Microelectronics, Instrumentation Optical and Electronic Materials Industrial Chemistry/Chemical Engineering Chemical engineering Electronics Microelectronics Optical materials Electronic materials LSI (DE-588)4168200-2 gnd rswk-swf Integrierte Schaltung (DE-588)4027242-4 gnd rswk-swf Technik (DE-588)4059205-4 gnd rswk-swf VLSI (DE-588)4117388-0 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf LSI (DE-588)4168200-2 s Halbleitertechnologie (DE-588)4158814-9 s 1\p DE-604 VLSI (DE-588)4117388-0 s 2\p DE-604 Technik (DE-588)4059205-4 s 3\p DE-604 4\p DE-604 Integrierte Schaltung (DE-588)4027242-4 s 5\p DE-604 Mader, Hermann aut Friedrich, Hans aut Heywang, Walter aut Erscheint auch als Druck-Ausgabe 9783642085475 https://doi.org/10.1007/978-3-662-04160-4 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 4\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 5\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Widmann, Dietrich Mader, Hermann Friedrich, Hans Heywang, Walter Technology of Integrated Circuits Engineering Electronics and Microelectronics, Instrumentation Optical and Electronic Materials Industrial Chemistry/Chemical Engineering Chemical engineering Electronics Microelectronics Optical materials Electronic materials LSI (DE-588)4168200-2 gnd Integrierte Schaltung (DE-588)4027242-4 gnd Technik (DE-588)4059205-4 gnd VLSI (DE-588)4117388-0 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| subject_GND | (DE-588)4168200-2 (DE-588)4027242-4 (DE-588)4059205-4 (DE-588)4117388-0 (DE-588)4158814-9 |
| title | Technology of Integrated Circuits |
| title_auth | Technology of Integrated Circuits |
| title_exact_search | Technology of Integrated Circuits |
| title_full | Technology of Integrated Circuits by Dietrich Widmann, Hermann Mader, Hans Friedrich, Walter Heywang, Rudolf Müller |
| title_fullStr | Technology of Integrated Circuits by Dietrich Widmann, Hermann Mader, Hans Friedrich, Walter Heywang, Rudolf Müller |
| title_full_unstemmed | Technology of Integrated Circuits by Dietrich Widmann, Hermann Mader, Hans Friedrich, Walter Heywang, Rudolf Müller |
| title_short | Technology of Integrated Circuits |
| title_sort | technology of integrated circuits |
| topic | Engineering Electronics and Microelectronics, Instrumentation Optical and Electronic Materials Industrial Chemistry/Chemical Engineering Chemical engineering Electronics Microelectronics Optical materials Electronic materials LSI (DE-588)4168200-2 gnd Integrierte Schaltung (DE-588)4027242-4 gnd Technik (DE-588)4059205-4 gnd VLSI (DE-588)4117388-0 gnd Halbleitertechnologie (DE-588)4158814-9 gnd |
| topic_facet | Engineering Electronics and Microelectronics, Instrumentation Optical and Electronic Materials Industrial Chemistry/Chemical Engineering Chemical engineering Electronics Microelectronics Optical materials Electronic materials LSI Integrierte Schaltung Technik VLSI Halbleitertechnologie |
| url | https://doi.org/10.1007/978-3-662-04160-4 |
| work_keys_str_mv | AT widmanndietrich technologyofintegratedcircuits AT maderhermann technologyofintegratedcircuits AT friedrichhans technologyofintegratedcircuits AT heywangwalter technologyofintegratedcircuits |