Strongly involved with SIEMENS Corp. in the tremendous recent developments of process technologies for IC fabrication the authors comprehensively record their authoritative knowledge and practical experience. New materials , modern planar technology, process designs for CMOS, Bipolar, BICMOS and sma...

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Bibliographische Detailangaben

Hauptverfasser:	Widmann, Dietrich (VerfasserIn), Mader, Hermann (VerfasserIn), Friedrich, Hans (VerfasserIn), Heywang, Walter (VerfasserIn)
Format:	Elektronisch E-Book
Sprache:	English
Veröffentlicht:	Berlin, Heidelberg Springer Berlin Heidelberg 2000
Schriftenreihe:	Springer Series in ADVANCED MICROELECTRONICS 2
Schlagworte:	Engineering Electronics and Microelectronics, Instrumentation Optical and Electronic Materials Industrial Chemistry/Chemical Engineering Chemical engineering Electronics Microelectronics Optical materials Electronic materials LSI Integrierte Schaltung Technik VLSI Halbleitertechnologie
Online-Zugang:	FHI01 BTU01 Volltext
Zusammenfassung:	Strongly involved with SIEMENS Corp. in the tremendous recent developments of process technologies for IC fabrication the authors comprehensively record their authoritative knowledge and practical experience. New materials , modern planar technology, process designs for CMOS, Bipolar, BICMOS and smart-power technologies, self-adjusting doping techniques are just a few of the highlights. With its strong application-orientation this is a need-to-have book for professionals in semiconductor industries. Senior students in electrical engineering and physics can use it as a textbook because of the systematic treatment of the subjects. With regard to their later careers as industrial engineers they will particularly appreciate the deep insight into the actual methods and problems of IC manufacturing
Beschreibung:	1 Online-Ressource (XVIII, 342 p)
ISBN:	9783662041604
DOI:	10.1007/978-3-662-04160-4