Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators:
Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators shows how to design and fabricate optical microsystems using innovative technologies and and original architectures. A barcode scanner, laser projection mirror and a microspectrometer are explained in detail, starting from...
Gespeichert in:
| Hauptverfasser: | , , |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Boston, MA
Springer US
2002
|
| Schriftenreihe: | Microsystems
14 |
| Schlagworte: | |
| Online-Zugang: | FHI01 BTU01 Volltext |
| Zusammenfassung: | Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators shows how to design and fabricate optical microsystems using innovative technologies and and original architectures. A barcode scanner, laser projection mirror and a microspectrometer are explained in detail, starting from the system conception, discussing simulations, choice of cleanroom technologies, design, fabrication, device test, packaging all the way to the system assembly. An advanced microscanning device capable of one- and two-dimensional scanning can be integrated in a compact barcode scanning system composed of a laser diode and adapted optics. The original design of the microscanner combines efficiently the miniaturized thermal mechanical actuator and the reflecting mirror, providing a one-dimensional scanning or an unique combination of two movements, depending on the geometry. The simplicity of the device makes it a competitive component. The authors rethink the design of a miniaturized optical device and find a compact solution for a microspectrometer, based on a tunable filter and a single pixel detector. A porous silicon technology combines efficiently the optical filter function with a thermal mechanical actuator on chip. The methodology for design and process calibration are discussed in detail. The device is the core component of an infrared gas spectrometer |
| Beschreibung: | 1 Online-Ressource (XII, 268 p) |
| ISBN: | 9781475760835 |
| DOI: | 10.1007/978-1-4757-6083-5 |
Internformat
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Datensatz im Suchindex
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| author | Lammel, Gerhard Schweizer, Sandra Renaud, Philippe |
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| id | DE-604.BV045149067 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T08:10:02Z |
| institution | BVB |
| isbn | 9781475760835 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030538766 |
| oclc_num | 1050946827 |
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| owner_facet | DE-573 DE-634 |
| physical | 1 Online-Ressource (XII, 268 p) |
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| spelling | Lammel, Gerhard Verfasser aut Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators by Gerhard Lammel, Sandra Schweizer, Philippe Renaud Boston, MA Springer US 2002 1 Online-Ressource (XII, 268 p) txt rdacontent c rdamedia cr rdacarrier Microsystems 14 Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators shows how to design and fabricate optical microsystems using innovative technologies and and original architectures. A barcode scanner, laser projection mirror and a microspectrometer are explained in detail, starting from the system conception, discussing simulations, choice of cleanroom technologies, design, fabrication, device test, packaging all the way to the system assembly. An advanced microscanning device capable of one- and two-dimensional scanning can be integrated in a compact barcode scanning system composed of a laser diode and adapted optics. The original design of the microscanner combines efficiently the miniaturized thermal mechanical actuator and the reflecting mirror, providing a one-dimensional scanning or an unique combination of two movements, depending on the geometry. The simplicity of the device makes it a competitive component. The authors rethink the design of a miniaturized optical device and find a compact solution for a microspectrometer, based on a tunable filter and a single pixel detector. A porous silicon technology combines efficiently the optical filter function with a thermal mechanical actuator on chip. The methodology for design and process calibration are discussed in detail. The device is the core component of an infrared gas spectrometer Engineering Mechanical Engineering Engineering Design Electrical Engineering Characterization and Evaluation of Materials Vibration, Dynamical Systems, Control Vibration Dynamical systems Dynamics Mechanical engineering Engineering design Electrical engineering Materials science Mikromechanik (DE-588)4205811-9 gnd rswk-swf Scanner (DE-588)4195691-6 gnd rswk-swf Mikrospektralanalyse (DE-588)4169859-9 gnd rswk-swf Elektromechanik (DE-588)4151846-9 gnd rswk-swf Mikromechanik (DE-588)4205811-9 s Elektromechanik (DE-588)4151846-9 s Mikrospektralanalyse (DE-588)4169859-9 s Scanner (DE-588)4195691-6 s 1\p DE-604 Schweizer, Sandra aut Renaud, Philippe aut Erscheint auch als Druck-Ausgabe 9781441949462 https://doi.org/10.1007/978-1-4757-6083-5 Verlag URL des Erstveröffentlichers Volltext 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Lammel, Gerhard Schweizer, Sandra Renaud, Philippe Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators Engineering Mechanical Engineering Engineering Design Electrical Engineering Characterization and Evaluation of Materials Vibration, Dynamical Systems, Control Vibration Dynamical systems Dynamics Mechanical engineering Engineering design Electrical engineering Materials science Mikromechanik (DE-588)4205811-9 gnd Scanner (DE-588)4195691-6 gnd Mikrospektralanalyse (DE-588)4169859-9 gnd Elektromechanik (DE-588)4151846-9 gnd |
| subject_GND | (DE-588)4205811-9 (DE-588)4195691-6 (DE-588)4169859-9 (DE-588)4151846-9 |
| title | Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators |
| title_auth | Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators |
| title_exact_search | Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators |
| title_full | Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators by Gerhard Lammel, Sandra Schweizer, Philippe Renaud |
| title_fullStr | Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators by Gerhard Lammel, Sandra Schweizer, Philippe Renaud |
| title_full_unstemmed | Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators by Gerhard Lammel, Sandra Schweizer, Philippe Renaud |
| title_short | Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators |
| title_sort | optical microscanners and microspectrometers using thermal bimorph actuators |
| topic | Engineering Mechanical Engineering Engineering Design Electrical Engineering Characterization and Evaluation of Materials Vibration, Dynamical Systems, Control Vibration Dynamical systems Dynamics Mechanical engineering Engineering design Electrical engineering Materials science Mikromechanik (DE-588)4205811-9 gnd Scanner (DE-588)4195691-6 gnd Mikrospektralanalyse (DE-588)4169859-9 gnd Elektromechanik (DE-588)4151846-9 gnd |
| topic_facet | Engineering Mechanical Engineering Engineering Design Electrical Engineering Characterization and Evaluation of Materials Vibration, Dynamical Systems, Control Vibration Dynamical systems Dynamics Mechanical engineering Engineering design Electrical engineering Materials science Mikromechanik Scanner Mikrospektralanalyse Elektromechanik |
| url | https://doi.org/10.1007/978-1-4757-6083-5 |
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