Micro and Nano Fabrication Technology:
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Bibliographic Details
Format: Electronic eBook
Language:English
Published: Singapore Springer Singapore 2018
Series:Micro/Nano Technologies
Subjects:
Online Access:BTU01
FAW01
FHA01
FHI01
FHM01
FHN01
FHR01
FKE01
FLA01
FRO01
FWS01
FWS02
HTW01
TUM01
UBY01
Volltext
Physical Description:1 Online-Ressource (817 illus., 549 illus. in color. eReference)
ISBN:9789811300981
ISSN:2522-5065
DOI:10.1007/978-981-13-0098-1