APA (7th ed.) Citation

(2018). Micro and Nano Fabrication Technology. Springer Singapore. https://doi.org/10.1007/978-981-13-0098-1

Chicago Style (17th ed.) Citation

Micro and Nano Fabrication Technology. Singapore: Springer Singapore, 2018. https://doi.org/10.1007/978-981-13-0098-1.

MLA (9th ed.) Citation

Micro and Nano Fabrication Technology. Springer Singapore, 2018. https://doi.org/10.1007/978-981-13-0098-1.