Fundamental principles of optical lithography: the science of microfabrication
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic eBook |
| Language: | English |
| Published: |
Chichester, West Sussex, England
Wiley
c2007
|
| Subjects: | |
| Physical Description: | xvii, 515 p. |
| ISBN: | 9780470018934 0470018933 |
Staff View
MARC
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| 245 | 1 | 0 | |a Fundamental principles of optical lithography |b the science of microfabrication |c Chris Mack |
| 264 | 1 | |a Chichester, West Sussex, England |b Wiley |c c2007 | |
| 300 | |a xvii, 515 p. | ||
| 336 | |b txt |2 rdacontent | ||
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| 505 | 8 | |a Includes bibliographical references and index | |
| 650 | 4 | |a Integrated circuits |x Design and construction | |
| 650 | 4 | |a Microlithography |x Industrial applications | |
| 650 | 0 | 7 | |a Fotolithografie |g Halbleitertechnologie |0 (DE-588)4174516-4 |2 gnd |9 rswk-swf |
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Record in the Search Index
| _version_ | 1804178349375881216 |
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| any_adam_object | |
| author | Mack, Chris A. |
| author_facet | Mack, Chris A. |
| author_role | aut |
| author_sort | Mack, Chris A. |
| author_variant | c a m ca cam |
| building | Verbundindex |
| bvnumber | BV044840933 |
| classification_rvk | ZN 4170 |
| collection | ZDB-38-ESG |
| contents | Includes bibliographical references and index |
| ctrlnum | (ZDB-38-ESG)ebr10300846 (OCoLC)608624290 (DE-599)BVBBV044840933 |
| dewey-full | 621.3815/31 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.3815/31 |
| dewey-search | 621.3815/31 |
| dewey-sort | 3621.3815 231 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Electronic eBook |
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| id | DE-604.BV044840933 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T08:02:33Z |
| institution | BVB |
| isbn | 9780470018934 0470018933 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030235796 |
| oclc_num | 608624290 |
| open_access_boolean | |
| physical | xvii, 515 p. |
| psigel | ZDB-38-ESG |
| publishDate | 2007 |
| publishDateSearch | 2007 |
| publishDateSort | 2007 |
| publisher | Wiley |
| record_format | marc |
| spelling | Mack, Chris A. Verfasser aut Fundamental principles of optical lithography the science of microfabrication Chris Mack Chichester, West Sussex, England Wiley c2007 xvii, 515 p. txt rdacontent c rdamedia cr rdacarrier Includes bibliographical references and index Integrated circuits Design and construction Microlithography Industrial applications Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd rswk-swf Fotolithografie Halbleitertechnologie (DE-588)4174516-4 s 1\p DE-604 Erscheint auch als Druck-Ausgabe, Paperback 978-0-470-72730-0 Erscheint auch als Druck-Ausgabe, Paperback 0-470-72730-6 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Mack, Chris A. Fundamental principles of optical lithography the science of microfabrication Includes bibliographical references and index Integrated circuits Design and construction Microlithography Industrial applications Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| subject_GND | (DE-588)4174516-4 |
| title | Fundamental principles of optical lithography the science of microfabrication |
| title_auth | Fundamental principles of optical lithography the science of microfabrication |
| title_exact_search | Fundamental principles of optical lithography the science of microfabrication |
| title_full | Fundamental principles of optical lithography the science of microfabrication Chris Mack |
| title_fullStr | Fundamental principles of optical lithography the science of microfabrication Chris Mack |
| title_full_unstemmed | Fundamental principles of optical lithography the science of microfabrication Chris Mack |
| title_short | Fundamental principles of optical lithography |
| title_sort | fundamental principles of optical lithography the science of microfabrication |
| title_sub | the science of microfabrication |
| topic | Integrated circuits Design and construction Microlithography Industrial applications Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd |
| topic_facet | Integrated circuits Design and construction Microlithography Industrial applications Fotolithografie Halbleitertechnologie |
| work_keys_str_mv | AT mackchrisa fundamentalprinciplesofopticallithographythescienceofmicrofabrication |