Plasma processing and processing science:
Gespeichert in:
| Format: | Elektronisch E-Book |
|---|---|
| Sprache: | English |
| Veröffentlicht: |
Washington, D.C.
National Academy Press
1995
|
| Schriftenreihe: | NRL strategic series
|
| Schlagworte: | |
| Beschreibung: | Committee chair: Francis F. Chen. - This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124 |
| Beschreibung: | x, 35 p |
| ISBN: | 0309575168 |
Internformat
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| 264 | 1 | |a Washington, D.C. |b National Academy Press |c 1995 | |
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| 650 | 4 | |a Plasma engineering | |
| 650 | 4 | |a Semiconductors |x Etching | |
| 650 | 4 | |a Plasma etching | |
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Datensatz im Suchindex
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| dewey-hundreds | 600 - Technology (Applied sciences) |
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| dewey-search | 621.044 |
| dewey-sort | 3621.044 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Werkstoffwissenschaften / Fertigungstechnik |
| format | Electronic eBook |
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| id | DE-604.BV044832914 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T08:02:20Z |
| institution | BVB |
| isbn | 0309575168 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030227777 |
| oclc_num | 58567010 |
| open_access_boolean | |
| physical | x, 35 p |
| psigel | ZDB-38-ESG |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | National Academy Press |
| record_format | marc |
| series2 | NRL strategic series |
| spelling | Plasma processing and processing science Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council Washington, D.C. National Academy Press 1995 x, 35 p txt rdacontent c rdamedia cr rdacarrier NRL strategic series Committee chair: Francis F. Chen. - This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124 Plasma engineering Semiconductors Etching Plasma etching Chen, Francis F. 1929- Sonstige (DE-588)17201932X oth National Research Council (U.S.) Panel on Plasma Processing oth National Research Council (U.S.) Naval Studies Board oth National Research Council (U.S.) Commission on Physical Sciences, Mathematics, and Applications oth |
| spellingShingle | Plasma processing and processing science Plasma engineering Semiconductors Etching Plasma etching |
| title | Plasma processing and processing science |
| title_auth | Plasma processing and processing science |
| title_exact_search | Plasma processing and processing science |
| title_full | Plasma processing and processing science Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council |
| title_fullStr | Plasma processing and processing science Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council |
| title_full_unstemmed | Plasma processing and processing science Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council |
| title_short | Plasma processing and processing science |
| title_sort | plasma processing and processing science |
| topic | Plasma engineering Semiconductors Etching Plasma etching |
| topic_facet | Plasma engineering Semiconductors Etching Plasma etching |
| work_keys_str_mv | AT chenfrancisf plasmaprocessingandprocessingscience AT nationalresearchcouncilus plasmaprocessingandprocessingscience |