Growth monitoring of ultrathin copper and copper oxide films deposited by atomic layer deposition:
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English German |
| Published: |
Chemnitz
Technische Universität Chemnitz
2016
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| Subjects: | |
| Physical Description: | 171 Blätter Illustrationen, Diagramme |
Staff View
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| 245 | 1 | 0 | |a Growth monitoring of ultrathin copper and copper oxide films deposited by atomic layer deposition |c vorgelegt von M.Sc. Dileep Dhakal |
| 246 | 1 | 3 | |a Untersuchungen zum Wachstum ultradünner Kupfer- und Kupferoxid Schichten mittels Atomlagenabscheidung |
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Record in the Search Index
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| author_GND | (DE-588)1153215780 |
| author_facet | Dhakal, Dileep 1986- |
| author_role | aut |
| author_sort | Dhakal, Dileep 1986- |
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| ctrlnum | (OCoLC)1057308724 (DE-599)BSZ500128219 |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV044828684 |
| illustrated | Illustrated |
| indexdate | 2024-07-10T08:02:13Z |
| institution | BVB |
| language | English German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030223556 |
| oclc_num | 1057308724 |
| open_access_boolean | |
| owner | DE-83 |
| owner_facet | DE-83 |
| physical | 171 Blätter Illustrationen, Diagramme |
| publishDate | 2016 |
| publishDateSearch | 2016 |
| publishDateSort | 2016 |
| publisher | Technische Universität Chemnitz |
| record_format | marc |
| spelling | Dhakal, Dileep 1986- Verfasser (DE-588)1153215780 aut Growth monitoring of ultrathin copper and copper oxide films deposited by atomic layer deposition vorgelegt von M.Sc. Dileep Dhakal Untersuchungen zum Wachstum ultradünner Kupfer- und Kupferoxid Schichten mittels Atomlagenabscheidung Chemnitz Technische Universität Chemnitz 2016 171 Blätter Illustrationen, Diagramme txt rdacontent n rdamedia nc rdacarrier Dissertation Technische Universität Chemnitz 2016 Kupfer (DE-588)4033734-0 gnd rswk-swf ULSI (DE-588)4226286-0 gnd rswk-swf Metallisierungsschicht (DE-588)4296760-0 gnd rswk-swf Reduktion (DE-588)4177306-8 gnd rswk-swf Kupferoxide (DE-588)4166141-2 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Kupfer (DE-588)4033734-0 s Kupferoxide (DE-588)4166141-2 s Metallisierungsschicht (DE-588)4296760-0 s Reduktion (DE-588)4177306-8 s ULSI (DE-588)4226286-0 s DE-604 |
| spellingShingle | Dhakal, Dileep 1986- Growth monitoring of ultrathin copper and copper oxide films deposited by atomic layer deposition Kupfer (DE-588)4033734-0 gnd ULSI (DE-588)4226286-0 gnd Metallisierungsschicht (DE-588)4296760-0 gnd Reduktion (DE-588)4177306-8 gnd Kupferoxide (DE-588)4166141-2 gnd |
| subject_GND | (DE-588)4033734-0 (DE-588)4226286-0 (DE-588)4296760-0 (DE-588)4177306-8 (DE-588)4166141-2 (DE-588)4113937-9 |
| title | Growth monitoring of ultrathin copper and copper oxide films deposited by atomic layer deposition |
| title_alt | Untersuchungen zum Wachstum ultradünner Kupfer- und Kupferoxid Schichten mittels Atomlagenabscheidung |
| title_auth | Growth monitoring of ultrathin copper and copper oxide films deposited by atomic layer deposition |
| title_exact_search | Growth monitoring of ultrathin copper and copper oxide films deposited by atomic layer deposition |
| title_full | Growth monitoring of ultrathin copper and copper oxide films deposited by atomic layer deposition vorgelegt von M.Sc. Dileep Dhakal |
| title_fullStr | Growth monitoring of ultrathin copper and copper oxide films deposited by atomic layer deposition vorgelegt von M.Sc. Dileep Dhakal |
| title_full_unstemmed | Growth monitoring of ultrathin copper and copper oxide films deposited by atomic layer deposition vorgelegt von M.Sc. Dileep Dhakal |
| title_short | Growth monitoring of ultrathin copper and copper oxide films deposited by atomic layer deposition |
| title_sort | growth monitoring of ultrathin copper and copper oxide films deposited by atomic layer deposition |
| topic | Kupfer (DE-588)4033734-0 gnd ULSI (DE-588)4226286-0 gnd Metallisierungsschicht (DE-588)4296760-0 gnd Reduktion (DE-588)4177306-8 gnd Kupferoxide (DE-588)4166141-2 gnd |
| topic_facet | Kupfer ULSI Metallisierungsschicht Reduktion Kupferoxide Hochschulschrift |
| work_keys_str_mv | AT dhakaldileep growthmonitoringofultrathincopperandcopperoxidefilmsdepositedbyatomiclayerdeposition AT dhakaldileep untersuchungenzumwachstumultradunnerkupferundkupferoxidschichtenmittelsatomlagenabscheidung |