Low energy ion assisted film growth:
This book is an introductory manual for Ion Assisted Deposition (IAD) procedures of thin films. It is addressed to researchers, post-graduates and even engineers with little or no experience in the techniques of thin film deposition. It reviews the basic concepts related to the interaction of low en...
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
London
Imperial College Press
c2003
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| Schlagworte: | |
| Online-Zugang: | FHN01 Volltext |
| Zusammenfassung: | This book is an introductory manual for Ion Assisted Deposition (IAD) procedures of thin films. It is addressed to researchers, post-graduates and even engineers with little or no experience in the techniques of thin film deposition. It reviews the basic concepts related to the interaction of low energy ion beams with materials. The main procedures used for IAD synthesis of thin films and the main effects of ion beam bombardment on growing films, such as densification, stress, mixing, surface flattening and changes in texture are critically discussed. A description of some of the applications of IAD methods and a review of the synthesis by IAD of diamond-like carbon and cubic-boron nitride complete the book |
| Beschreibung: | xiv, 283 p. ill |
| ISBN: | 9781848161320 |
Internformat
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| id | DE-604.BV044633326 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-10T07:57:42Z |
| institution | BVB |
| isbn | 9781848161320 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-030031298 |
| oclc_num | 1012641138 |
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| physical | xiv, 283 p. ill |
| psigel | ZDB-124-WOP ZDB-124-WOP FHN_PDA_WOP |
| publishDate | 2003 |
| publishDateSearch | 2003 |
| publishDateSort | 2003 |
| publisher | Imperial College Press |
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| spelling | González-Elipe, A. R. Verfasser aut Low energy ion assisted film growth A R González-Elipe, F Yubero, J M Sanz London Imperial College Press c2003 xiv, 283 p. ill txt rdacontent c rdamedia cr rdacarrier This book is an introductory manual for Ion Assisted Deposition (IAD) procedures of thin films. It is addressed to researchers, post-graduates and even engineers with little or no experience in the techniques of thin film deposition. It reviews the basic concepts related to the interaction of low energy ion beams with materials. The main procedures used for IAD synthesis of thin films and the main effects of ion beam bombardment on growing films, such as densification, stress, mixing, surface flattening and changes in texture are critically discussed. A description of some of the applications of IAD methods and a review of the synthesis by IAD of diamond-like carbon and cubic-boron nitride complete the book Thin films / Design and construction Thin films / Effect of radiation on Ion bombardment Yubero, F. Sonstige oth Sanz, J. M. Sonstige oth Erscheint auch als Druck-Ausgabe 1860943519 Erscheint auch als Druck-Ausgabe 9781860943515 http://www.worldscientific.com/worldscibooks/10.1142/P282#t=toc Verlag URL des Erstveroeffentlichers Volltext |
| spellingShingle | González-Elipe, A. R. Low energy ion assisted film growth Thin films / Design and construction Thin films / Effect of radiation on Ion bombardment |
| title | Low energy ion assisted film growth |
| title_auth | Low energy ion assisted film growth |
| title_exact_search | Low energy ion assisted film growth |
| title_full | Low energy ion assisted film growth A R González-Elipe, F Yubero, J M Sanz |
| title_fullStr | Low energy ion assisted film growth A R González-Elipe, F Yubero, J M Sanz |
| title_full_unstemmed | Low energy ion assisted film growth A R González-Elipe, F Yubero, J M Sanz |
| title_short | Low energy ion assisted film growth |
| title_sort | low energy ion assisted film growth |
| topic | Thin films / Design and construction Thin films / Effect of radiation on Ion bombardment |
| topic_facet | Thin films / Design and construction Thin films / Effect of radiation on Ion bombardment |
| url | http://www.worldscientific.com/worldscibooks/10.1142/P282#t=toc |
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