Gettering and defect engineering in semiconductor technology XV: selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference (GADEST 2013), September 22-27, 2013, Oxford, UK
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Bibliographic Details
Corporate Author: Gettering and Defect Engineering in Semiconductor Technology Conference < 2013, Oxford, England> (Author)
Format: Electronic eBook
Language:English
Published: Durnten-Zurich, Switzerland Trans Tech Publications [2014]
Series:Solid state phenomena 205-206
Subjects:
Item Description:Description based on online resource; title from PDF title page (ebrary, viewed December 9, 2013)
Physical Description:1 online resource (513 pages) illustrations
ISBN:9783038262053

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Interlibrary loan Place Request Caution: Not in THWS collection!