Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Elektronisch E-Book |
| Sprache: | English |
| Veröffentlicht: |
Cham
Springer
[2017]
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| Schriftenreihe: | Springer Theses, Recognizing Outstanding Ph.D. Research
|
| Schlagworte: | |
| Online-Zugang: | TUM01 UBM01 UBT01 URL des Erstveröffentlichers |
| Beschreibung: | 1 Online-Ressource (XXIII, 164 p. 116 illus., 6 illus. in color) |
| ISBN: | 9783319666075 |
| DOI: | 10.1007/978-3-319-66607-5 |
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| 245 | 1 | 0 | |a Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets |c María Ángela Pampillón Arce |
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Datensatz im Suchindex
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| author | Pampillón Arce, María Ángela |
| author_facet | Pampillón Arce, María Ángela |
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| author_sort | Pampillón Arce, María Ángela |
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| dewey-full | 530.417 |
| dewey-hundreds | 500 - Natural sciences and mathematics |
| dewey-ones | 530 - Physics |
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| dewey-search | 530.417 |
| dewey-sort | 3530.417 |
| dewey-tens | 530 - Physics |
| discipline | Physik |
| doi_str_mv | 10.1007/978-3-319-66607-5 |
| format | Thesis Electronic eBook |
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| indexdate | 2024-07-10T07:56:00Z |
| institution | BVB |
| isbn | 9783319666075 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-029961952 |
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| physical | 1 Online-Ressource (XXIII, 164 p. 116 illus., 6 illus. in color) |
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| series2 | Springer Theses, Recognizing Outstanding Ph.D. Research |
| spelling | Pampillón Arce, María Ángela Verfasser aut Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets María Ángela Pampillón Arce Cham Springer [2017] 1 Online-Ressource (XXIII, 164 p. 116 illus., 6 illus. in color) txt rdacontent c rdamedia cr rdacarrier Springer Theses, Recognizing Outstanding Ph.D. Research Dissertation The Complutense University of Madrid, Spain Physics Surfaces (Physics) Interfaces (Physical sciences) Thin films Electronic circuits Nanotechnology Surface and Interface Science, Thin Films Electronic Circuits and Devices Nanotechnology and Microengineering (DE-588)4113937-9 Hochschulschrift gnd-content Erscheint auch als Druck-Ausgabe 978-3-319-66606-8 https://doi.org/10.1007/978-3-319-66607-5 Verlag URL des Erstveröffentlichers Volltext |
| spellingShingle | Pampillón Arce, María Ángela Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets Physics Surfaces (Physics) Interfaces (Physical sciences) Thin films Electronic circuits Nanotechnology Surface and Interface Science, Thin Films Electronic Circuits and Devices Nanotechnology and Microengineering |
| subject_GND | (DE-588)4113937-9 |
| title | Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets |
| title_auth | Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets |
| title_exact_search | Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets |
| title_full | Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets María Ángela Pampillón Arce |
| title_fullStr | Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets María Ángela Pampillón Arce |
| title_full_unstemmed | Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets María Ángela Pampillón Arce |
| title_short | Growth of High Permittivity Dielectrics by High Pressure Sputtering from Metallic Targets |
| title_sort | growth of high permittivity dielectrics by high pressure sputtering from metallic targets |
| topic | Physics Surfaces (Physics) Interfaces (Physical sciences) Thin films Electronic circuits Nanotechnology Surface and Interface Science, Thin Films Electronic Circuits and Devices Nanotechnology and Microengineering |
| topic_facet | Physics Surfaces (Physics) Interfaces (Physical sciences) Thin films Electronic circuits Nanotechnology Surface and Interface Science, Thin Films Electronic Circuits and Devices Nanotechnology and Microengineering Hochschulschrift |
| url | https://doi.org/10.1007/978-3-319-66607-5 |
| work_keys_str_mv | AT pampillonarcemariaangela growthofhighpermittivitydielectricsbyhighpressuresputteringfrommetallictargets |